Abstract: A capacitance transducer has a first hermetically sealed cavity adapted to deform in response to an applied force, such as pressure or acceleration, and a second hermetically sealed cavity adapted to resist deformation in response to such applied force. The cavities are formed between two doped silicon layers separated by a selectively etched electrically insulating spacer layer. Multiple medial electrically insulating cavity area spacer segments within the second cavity resist deformation thereof in response to the applied force to be measured. The capacitance transducer can be manufactured from doped silicon wafers using well developed silicon wafer processing techniques.

Abstract: A method for making pressure sensors is disclosed. A wafer of doped silicon or other semiconductive material is selectively chemically etched (micromachined) on both sides to form a plurality of diaphragms, a thicker silicon rim surrounding each diaphragm, and a feedthrough hole corresponding to each diaphragm external to the silicon rim. A small metallized area of the upper surface of the silicon substrate on the rim adjacent each diaphragm permits external electrical connection to the silicon plate. Capacitor plates are formed by depositing a metallized film or other conductive material on a dielectric substrate in locations corresponding to the diaphragms of the silicon wafer. To permit external electrical connection to the conductive material, contact pads electrically connected to the conductive material are formed on the dielectric substrate external to the area corresponding to the diaphragms.

Abstract: A hot-wire mass air flow sensor includes integral, elongated silicon members with a silicon dioxide coating on which temperature sensitive resistors are deposited. The air flow sensor has an extremely low thermal conductivity material base on which is mounted one or more of the elongate silicon members. This structure maximizes the thermal impedance of the conductive path existing at the ends of the flow sensor resistors and minimizes sensor errors. A method for fabricating the air flow sensor is also provided.

Abstract: A mass airflow meter for positioning within a duct wherein a fluid flows, particularly an air intake of an internal combustion engine, includes a symmetrical body having an axial passageway and a radial passageway. The radial passageway has a temperature dependent element positioned therein and extends from the axial passageway at an acute angle to the downstream flow of air. Accordingly, the radial passageway provides inertial separation of airborne particulate and also provides isolation from air flowing backwards through the air intake.

Abstract: A mass airflow sensor includes a silicon substrate with integral, thin, elongated silicon members between openings through the silicon substrate. A silicon dioxide coating and a metal coating on the silicon member adapt it to function as a hot wire mass airflow sensor.

Abstract: A mass airflow sensor with backflow detection includes a first, second, and third elongated, relatively thin silicon members generally parallel to each other and spaced from each other in an orienting plane. The second silicon member, between the first and third silicon members, has a metal coating for carrying a heating current. The first and third silicon members each have a thermocouple formed thereon so as to detect temperature differences on either side of the second silicon member and thus the direction of airflow across the metal second silicon member.

Abstract: A thin film electroluminescent device constructed on a smooth surface substrate on which a base conductive layer is formed, followed in sequence by an impurity doped barrier layer, an electrically resistive layer and a counterelectrode layer. The impurity doped barrier layer is doped with a material which exhibits electroluminescence.The impurity doped barrier layer is produced in a controlled oxidation process of the base conductive layer which is alloyed to a minor extent with the impurity material.

Abstract: A reflective type light modulator utilizing the principal of ion injection from a switching electrode into a fluid dielectric to effect turbulent forces and the resultant movement of a light reflecting object into and out of a light path. The fluid dielectric and the movable object have similar values of specific gravity.

Abstract: A light modulator utilizing the principal of ion injection from a switching electrode into a fluid dielectric to effect turbulent forces and the resultant movement of a light interrupting object into and out of a light path. The fluid dielectric and the movable object have similar values of specific gravity.

Abstract: A solid state source of radiant energy having a characteristic frequency spectra with a high frequency cutoff .nu..sub.co, which is a function of the applied voltage value. The source is a metal-insulator-metal tunnel junction wherein the insulator layer is relatively thin with respect to the metal layers and inelastic tunneling occurs. To facilitate output coupling to surface plasmon modes in the junction, the counter-electrode metal layer, from which the radiant energy is emitted, is roughened. One of the uses for the solid state source is as a light source of a spectrophotometer where the transmittance or reflectance band characteristics of a sample are determined by converting the photodetector current to its second derivative and correlating the second derivative with the applied voltage which is modulated over a predetermined range of amplitude values.

Abstract: A solid state source of radiant energy having a characteristic frequency spectra with a high frequency cutoff .nu..sub.co, which is a function of the applied voltage value. The source is a metal-insulator-metal tunnel junction wherein the insulator layer is relatively thin with respect to the metal layers and inelastic tunneling occurs. To facilitate output coupling to surface plasmon modes in the junction, the counter-electrode metal layer, from which the radiant energy is emitted, is roughened.