Abstract: High-performance optical-metasurface-based components configured to at frequencies of UV light and, in particular, in deep UV range and performing multiple optical-wavefront-shaping functions (among which there are high-numerical-aperture lensing, accelerating beam generation, and hologram projection). As a representative material for such components, hafnium oxide demands creation and establishment of a novel process of manufacture that is nevertheless based on general principles of Damascene lithography, to be compatible with existing technology and yet sufficient for producing high-aspect-ratio features that currently-used materials and processes simply do not deliver. The described invention opens a way towards low-form-factor, multifunctional ultraviolet nanophotonic platforms based on flat optical components and enabling diverse applications including lithography, imaging, spectroscopy, and quantum information processing.

Abstract: An Incoherent Fourier ptychographic imaging system. Multiple known light patterns are projected sequentially onto a target and images of the combined pattern and target are recorded by a camera, with the images being processed using an optical transfer function (OTF). The camera and projection system are aligned along the same optical axis. The known illumination patterns and the optical transfer function (OTF) are combined in an iterative algorithm to generate an image with resolution greater than would be achieved by uniform illumination of the target and imaging with the camera.

Abstract: An Incoherent Fourier ptychographic imaging system. Multiple known light patterns are projected sequentially onto a target and images of the combined pattern and target are recorded by a camera, with the images being processed using an optical transfer function (OTF). The camera and projection system are aligned along the same optical axis. The known illumination patterns and the optical transfer function (OTF) are combined in an iterative algorithm to generate an image with resolution greater than would be achieved by uniform illumination of the target and imaging with the camera.

Abstract: High-performance optical-metasurface-based components configured to at frequencies of UV light and, in particular, in deep UV range and performing multiple optical-wavefront-shaping functions (among which there are high-numerical-aperture lensing, accelerating beam generation, and hologram projection). As a representative material for such components, hafnium oxide demands creation and establishment of a novel process of manufacture that is nevertheless based on general principles of Damascene lithography, to be compatible with existing technology and yet sufficient for producing high-aspect-ratio features that currently-used materials and processes simply do not deliver. The described invention opens a way towards low-form-factor, multifunctional ultraviolet nanophotonic platforms based on flat optical components and enabling diverse applications including lithography, imaging, spectroscopy, and quantum information processing.

Abstract: A metasurface optical pulse shaper includes a metasurface with superpixels disposed on an entry side of the metasurface and a wire grid polarizer disposed on an exit surface of the metasurface for controlling a phase, amplitude, or polarization of an optical pulse, wherein the metasurface in combination with dispersers provide for optical shaping of the optical pulse. A process for optically changing a pulse shape includes dispersing a primary optical pulse; separating spatially, by frequency, primary frequency waves; changing, by superpixels, a relative phase of the primary frequency waves and producing phase waves that are separated spatially by frequency and phase; and producing a plurality of shaped frequency waves such that, from an individual phase wave, a shaped frequency wave is produced that separated spatially by frequency and phase, such that a superposition of shaped frequency waves produce a shaped optical pulse that has pulse shape that is different than the primary optical pulse.

Abstract: A metasurface optical pulse shaper includes a metasurface with superpixels disposed on an entry side of the metasurface and a wire grid polarizer disposed on an exit surface of the metasurface for controlling a phase, amplitude, or polarization of an optical pulse, wherein the metasurface in combination with dispersers provide for optical shaping of the optical pulse. A process for optically changing a pulse shape includes dispersing a primary optical pulse; separating spatially, by frequency, primary frequency waves; changing, by superpixels, a relative phase of the primary frequency waves and producing phase waves that are separated spatially by frequency and phase; and producing a plurality of shaped frequency waves such that, from an individual phase wave, a shaped frequency wave is produced that separated spatially by frequency and phase, such that a superposition of shaped frequency waves produce a shaped optical pulse that has pulse shape that is different than the primary optical pulse.