Patents by Inventor Shawn FIEDLER

Shawn FIEDLER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pedestal setup using camera wafer
    Patent number: 12362153
    Abstract: A method comprises arranging an apparatus on a top surface of a pedestal in a processing chamber. The apparatus comprises an annular member, N supporting members, and N pins, where N is an integer greater than two. The N supporting members support the annular member in a plane parallel to and above the top surface of the pedestal. The N pins are arranged perpendicularly to the plane along a circumference around the annular member. Each of the N pins includes threads engageable with respective threaded slots in the apparatus. Each of the N pins includes a conical end pointing towards the top surface of the pedestal and engageable with a periphery of the top surface of the pedestal. The method further comprises aligning a center of the annular member to a center of the pedestal by adjusting one or more of the N pins.
    Type: Grant
    Filed: July 24, 2020
    Date of Patent: July 15, 2025
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Prasanna Kulkarni, Rachel E. Batzer, Ted Tan, Vivekanandan Krishnaswamy, Boonyarit Woonprasert, Shawn Fiedler
  • PEDESTAL SETUP USING CAMERA WAFER
    Publication number: 20220282380
    Abstract: A method comprises arranging an apparatus on a top surface of a pedestal in a processing chamber. The apparatus comprises an annular member, N supporting members, and N pins, where N is an integer greater than two. The N supporting members support the annular member in a plane parallel to and above the top surface of the pedestal. The N pins are arranged perpendicularly to the plane along a circumference around the annular member. Each of the N pins includes threads engageable with respective threaded slots in the apparatus. Each of the N pins includes a conical end pointing towards the top surface of the pedestal and engageable with a periphery of the top surface of the pedestal. The method further comprises aligning a center of the annular member to a center of the pedestal by adjusting one or more of the N pins.
    Type: Application
    Filed: July 24, 2020
    Publication date: September 8, 2022
    Inventors: Prasanna KULKARNI, Rachel E. BATZER, Ted TAN, Vivekanandan KRISHNASWAMY, Boonyarit WOONPRASERT, Shawn FIEDLER