Patents by Inventor Shawn McVey
Shawn McVey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11378532Abstract: An inspection system serves to qualify semiconductor structures. The inspection system has an ion beam source for space-resolved exposition of the structures to be qualified with an ion beam. The inspection system also includes a secondary ion detection device with a mass spectrometer. The mass spectrometer is configured to measure an ion mass to charge ratio in a given bandwidth.Type: GrantFiled: December 21, 2020Date of Patent: July 5, 2022Assignees: Carl Zeiss SMT GmbH, Carl Zeiss Microscopy, LLCInventors: Brett Lewis, Wilhelm Kuehn, Deying Xia, Shawn McVey, Ulrich Mantz
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Publication number: 20210109046Abstract: An inspection system serves to qualify semiconductor structures. The inspection system has an ion beam source for space-resolved exposition of the structures to be qualified with an ion beam. The inspection system also includes a secondary ion detection device with a mass spectrometer. The mass spectrometer is configured to measure an ion mass to charge ratio in a given bandwidth.Type: ApplicationFiled: December 21, 2020Publication date: April 15, 2021Inventors: Brett Lewis, Wilhelm Kuehn, Deying Xia, Shawn McVey, Ulrich Mantz
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Patent number: 9640364Abstract: The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10?5 per incident neon ion.Type: GrantFiled: December 15, 2015Date of Patent: May 2, 2017Assignee: Carl Zeiss Microscopy, LLCInventors: John A. Notte, IV, FHM-Faridur Rahman, Weijie Huang, Shawn McVey
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Patent number: 9627172Abstract: The disclosure relates to a method of operating a gas field ion beam system in which the gas field ion beam system comprises an external housing, an internal housing, arranged within the external housing, an electrically conductive tip arranged within the internal housing, a gas supply for supplying one or more gases to the internal housing, the gas supply having a tube terminating within the internal housing, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole into the external housing. The method comprises the step of regularly heating the external housing, the internal housing, the electrically conductive tip, the tube and the extractor electrode to a temperature of above 100° C.Type: GrantFiled: December 15, 2015Date of Patent: April 18, 2017Assignee: Carl Zeiss Microscopy, LLCInventors: John A. Notte, IV, Weijie Huang, FHM-Faridur Rahman, Shawn McVey
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Patent number: 9536699Abstract: The present disclosure relates to a gas field ion source having a gun housing, an electrically conductive gun can base attached to the gun housing, an inner tube mounted to the gun can base, the inner tube being made of an electrically isolating ceramic, an electrically conductive tip attached to the inner tube, an outer tube mounted to the gun can base, the outer tube being made of an electrically isolating ceramic, and an extractor electrode attached to the outer tube. The extractor electrode can have an opening for the passage of ions generated in proximity to the electrically conductive tip.Type: GrantFiled: June 25, 2014Date of Patent: January 3, 2017Assignee: Carl Zeiss Microscopy, LLCInventors: John A. Notte, IV, Weijie Huang, Raymond Hill, FHM-Faridur Rahman, Alexander Groholski, Shawn McVey
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Publication number: 20160111243Abstract: The disclosure relates to a method of operating a gas field ion beam system in which the gas field ion beam system comprises an external housing, an internal housing, arranged within the external housing, an electrically conductive tip arranged within the internal housing, a gas supply for supplying one or more gases to the internal housing, the gas supply having a tube terminating within the internal housing, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole into the external housing. The method comprises the step of regularly heating the external housing, the internal housing, the electrically conductive tip, the tube and the extractor electrode to a temperature of above 100° C.Type: ApplicationFiled: December 15, 2015Publication date: April 21, 2016Inventors: John A. Notte, IV, Weijie Huang, FHM-Faridur Rahman, Shawn McVey
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Publication number: 20160104598Abstract: The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10?5 per incident neon ion.Type: ApplicationFiled: December 15, 2015Publication date: April 14, 2016Inventors: John A. Notte, IV, FHM-Faridur Rahman, Weijie Huang, Shawn McVey
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Patent number: 9218935Abstract: The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10?5 per incident neon ion.Type: GrantFiled: June 25, 2014Date of Patent: December 22, 2015Assignee: Carl Zeiss Microscopy, LLCInventors: John A. Notte, IV, FHM-Faridur Rahman, Weijie Huang, Shawn McVey
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Patent number: 9218934Abstract: The disclosure relates to a method of operating a gas field ion beam system in which the gas field ion beam system comprises an external housing, an internal housing, arranged within the external housing, an electrically conductive tip arranged within the internal housing, a gas supply for supplying one or more gases to the internal housing, the gas supply having a tube terminating within the internal housing, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole into the external housing. The method comprises the step of regularly heating the external housing, the internal housing, the electrically conductive tip, the tube and the extractor electrode to a temperature of above 100° C.Type: GrantFiled: June 25, 2014Date of Patent: December 22, 2015Assignee: Carl Zeiss Microscopy, LLCInventors: John A. Notte, IV, Weijie Huang, FHM-Faridur Rahman, Shawn McVey
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Patent number: 9000396Abstract: Disclosed are devices, systems, and methods are disclosed that include: (a) a first material layer positioned on a first surface of a support structure and configured to generate secondary electrons in response to incident charged particles that strike the first layer, the first layer including an aperture configured to permit a portion of the incident charged particles to pass through the aperture; and (b) a second material layer positioned on a second surface of the support structure and separated from the first layer by a distance of 0.5 cm or more, the second layer being configured to generate secondary electrons in response to charged particles that pass through the aperture and strike the second layer, where the device is a charged particle detector.Type: GrantFiled: October 20, 2011Date of Patent: April 7, 2015Assignee: Carl Zeiss Microscopy, LLCInventors: Raymond Hill, Shawn McVey, John Notte, IV
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Publication number: 20150008334Abstract: The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10?5 per incident neon ion.Type: ApplicationFiled: June 25, 2014Publication date: January 8, 2015Inventors: John A. Notte, IV, FHM-Faridur Rahman, Weijie Huang, Shawn McVey
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Publication number: 20150008333Abstract: The disclosure relates to a method of operating a gas field ion beam system in which the gas field ion beam system comprises an external housing, an internal housing, arranged within the external housing, an electrically conductive tip arranged within the internal housing, a gas supply for supplying one or more gases to the internal housing, the gas supply having a tube terminating within the internal housing, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole into the external housing. The method comprises the step of regularly heating the external housing, the internal housing, the electrically conductive tip, the tube and the extractor electrode to a temperature of above 100° C.Type: ApplicationFiled: June 25, 2014Publication date: January 8, 2015Inventors: John A. Notte, IV, Weijie Huang, FHM-Faridur Rahman, Shawn McVey
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Publication number: 20150008332Abstract: The present disclosure relates to a gas field ion source having a gun housing, an electrically conductive gun can base attached to the gun housing, an inner tube mounted to the gun can base, the inner tube being made of an electrically isolating ceramic, an electrically conductive tip attached to the inner tube, an outer tube mounted to the gun can base, the outer tube being made of an electrically isolating ceramic, and an extractor electrode attached to the outer tube. The extractor electrode can have an opening for the passage of ions generated in proximity to the electrically conductive tip.Type: ApplicationFiled: June 25, 2014Publication date: January 8, 2015Inventors: John A. Notte, IV, Weijie Huang, Raymond Hill, FHM-Faridur Rahman, Alexander Groholski, Shawn McVey
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Publication number: 20120068068Abstract: Disclosed are devices, systems, and methods are disclosed that include: (a) a first material layer positioned on a first surface of a support structure and configured to generate secondary electrons in response to incident charged particles that strike the first layer, the first layer including an aperture configured to permit a portion of the incident charged particles to pass through the aperture; and (b) a second material layer positioned on a second surface of the support structure and separated from the first layer by a distance of 0.5 cm or more, the second layer being configured to generate secondary electrons in response to charged particles that pass through the aperture and strike the second layer, where the device is a charged particle detector.Type: ApplicationFiled: October 20, 2011Publication date: March 22, 2012Applicant: CARL ZEISS NTS, LLCInventors: Raymond Hill, Shawn McVey, John Notte, IV
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Patent number: 7521693Abstract: Ion sources, systems and methods are disclosed.Type: GrantFiled: November 15, 2006Date of Patent: April 21, 2009Assignee: ALIS CorporationInventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Shawn McVey, Johannes Bihr
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Publication number: 20070205375Abstract: Ion sources, systems and methods are disclosed.Type: ApplicationFiled: November 15, 2006Publication date: September 6, 2007Inventors: Billy Ward, John Notte, Louis Farkas, Randall Percival, Raymond Hill, Shawn McVey, Johannes Bihr