Abstract: A method for detecting an endpoint of a seasoning process in a process chamber includes obtaining seasoning progress data indicating a progress of the seasoning process for each substrate of a first plurality of substrates, and collecting historical parameter values from a plurality of sensors disposed in the process chamber. The historical parameter values for each substrate of the first plurality of substrates are normalized with respect to a plurality of parameter values for a particular substrate in the first plurality of substrates. An MVA model is generated by applying a set of coefficients to the normalized parameter values for each substrate of the first plurality of substrates, and the set of coefficients are regressed based on the seasoning progress data. An end point of the seasoning process is determined using the MVA model with a plurality of substantially real-time parameter values measured when performing a seasoning process over each substrate of a second plurality of substrates.

Abstract: A method for detecting an endpoint of a seasoning process in a process chamber includes obtaining seasoning progress data indicating a progress of the seasoning process for each substrate of a first plurality of substrates, and collecting historical parameter values from a plurality of sensors disposed in the process chamber. The historical parameter values for each substrate of the first plurality of substrates are normalized with respect to a plurality of parameter values for a particular substrate in the first plurality of substrates. An MVA model is generated by applying a set of coefficients to the normalized parameter values for each substrate of the first plurality of substrates, and the set of coefficients are regressed based on the seasoning progress data. An end point of the seasoning process is determined using the MVA model with a plurality of substantially real-time parameter values measured when performing a seasoning process over each substrate of a second plurality of substrates.

Abstract: A vacuum truck for the collection and discharge of a waste particulate material which includes a storage tank, waste collection and discharge assemblies and an air pump assembly. The air pump assembly is operable to induce negative and positive pressures within the storage tank. The collection assembly includes a vacuum inlet for fluid flow between the vacuum inlet and the storage tank inlet during air pump operation to induce said negative pressure. The waste discharge assembly includes a discharge conduit for conveying a pressurized fluid flow and entrained collected material from a tank materials outlet to an outlet end while the air pump assembly is operated to induces a positive pressure.

Abstract: A portable storage tank for use with a vacuum truck for the collection and discharge of a waste particulate material which includes a storage tank, waste collection and discharge assemblies and an air pump assembly. The air pump assembly is operable to induce negative and positive pressures within the storage tank. The collection assembly includes a vacuum inlet for fluid flow between the vacuum inlet and the storage tank inlet during air pump operation to induce said negative pressure. The waste discharge assembly includes a discharge conduit for conveying a pressurized fluid flow and entrained collected material from a tank materials outlet to an outlet end while the air pump assembly is operated to induce a positive pressure.