Patents by Inventor Sheby Mary George

Sheby Mary George has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR FABRICATING TRIHALODISILANE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME
    Publication number: 20230264963
    Abstract: A method for fabricating trihalodisilane, the method includes providing a halodisilane including at least four halogen atoms; reducing the halodisilane, using a mixed reducing agent including a first reducing agent represented by following Chemical Formula 1-1, in which RA is an alkyl group, and m and n are each independently 1 or 2, and m+n=3, and a second reducing agent represented by following Chemical Formula 2-1, in which RS is an alkyl group or an aryl group, p and q are each independently 1, 2, or 3, and p+q=4; and obtaining a product including a 1,1,1-trihalodisilane, (RA)m—Al—Hn??[Chemical Formula 1-1] (RS)p—Sn—Hq.
    Type: Application
    Filed: January 24, 2023
    Publication date: August 24, 2023
    Applicant: WONIK Materials Co., Ltd.
    Inventors: Ji Eun YUN, Byung Keun HWANG, Min Soo KANG, Sheby Mary GEORGE, Woo Ri BAE, Sun Hye HWANG, Seong Tae OH, Byeong Ok CHO
  • Strontium precursor, method for preparing same, and method for forming thin film by using same
    Patent number: 9790238
    Abstract: Disclosed herein is a novel strontium precursor containing a beta-diketonate compound. Being superior in thermal stability and volatility, the strontium precursor can form a quality strontium thin film.
    Type: Grant
    Filed: May 3, 2013
    Date of Patent: October 17, 2017
    Assignee: KOREA RESEARCH INSTITUTE OF CHEMICAL TECHNOLOGY
    Inventors: Bo-Keum Park, Taek-Mo Chung, Chang-Gyoun Kim, Sheby Mary George, Young-Kuk Lee, Jong-Sun Lim, Seog-Jong Jeong, Dong-Ju Jeon, Ki-Seok An, Sun-Sook Lee
  • STRONTIUM PRECURSOR, METHOD FOR PREPARING SAME, AND METHOD FOR FORMING THIN FILM BY USING SAME
    Publication number: 20150175629
    Abstract: Disclosed herein is a novel strontium precursor containing a beta-diketonate compound. Being superior in thermal stability and volatility, the strontium precursor can form a quality strontium thin film.
    Type: Application
    Filed: May 3, 2013
    Publication date: June 25, 2015
    Inventors: Bo-Keun Park, Taek-Mo Chung, Chang-Gyoun Kim, Sheby Mary George, Young-Kuk Lee, Jong-Sun Lim, Seog-Jong Jeong, Dong-Ju Jeon, Ki-Seok An, Sun-Sook Lee