Patents by Inventor Shekhar ATHANI

Shekhar ATHANI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250037974
    Abstract: Disclosed herein is a processing system. The processing system has an upper chamber body and a lower chamber body defining a processing environment. An upper heater is moveably disposed in the upper chamber body. The upper heater has a moveable support and an upper step formed along an outer perimeter. A lower showerhead is fixedly disposed in the lower chamber body. The lower showerhead includes a top surface configured to support a substrate, a lower step disposed along an outer perimeter wherein the substrate is configured to extend from the top surface partially over the lower step. Lift pins are disposed in the lower showerhead and configured to extend through the top surface and support the substrate thereon. Gas holes are disposed in a first zone along the top surface and a second zone on the step and configured to independently flow both a process and non-process gas.
    Type: Application
    Filed: July 27, 2023
    Publication date: January 30, 2025
    Applicant: Applied Materials, Inc.
    Inventors: Dmitry LUBOMIRSKY, Junghoon KIM, Hyun Joo LEE, Pranav Vijay GADRE, Adib KHAN, Nithin Thomas ALEX, Douglas A. BUCHBERGER, Jr., Qiwei LIANG, Ellie Y. YIEH, Shekhar ATHANI
  • Publication number: 20250022745
    Abstract: Embodiments of substrate supports are provided herein. In some embodiments, a substrate support for use in a chemical vapor deposition (CVD) chamber includes: a pedestal to support a substrate, wherein the pedestal includes a dielectric plate coupled to a pedestal body; an RF rotary joint coupled to the pedestal and having a RF connector; and an RF conduit that extends from the RF connector to the pedestal through a central opening of the pedestal body to provide RF bias to the pedestal; an insulator tube disposed about the RF conduit; and a ground tube disposed about the insulator tube and extending from the RF rotary joint to the pedestal, wherein the insulator tube extends vertically above an upper surface of the ground tube.
    Type: Application
    Filed: September 27, 2024
    Publication date: January 16, 2025
    Inventors: Qiwei LIANG, Douglas Arthur BUCHBERGER, JR., Gautam PISHARODY, Dmitry LUBOMIRSKY, Shekhar ATHANI
  • Patent number: 12112972
    Abstract: Embodiments of substrate supports are provided herein. In some embodiments, a substrate support for use in a chemical vapor deposition (CVD) chamber includes: a pedestal to support a substrate, wherein the pedestal includes a dielectric plate coupled to a pedestal body; a rotary union coupled to the pedestal, wherein the rotary union includes a stationary housing disposed about a rotor; a drive assembly coupled to the rotary union; a coolant union coupled to the rotary union and having a coolant inlet fluidly coupled to coolant channels disposed in the pedestal via a coolant line; an RF rotary joint coupled to the coolant union and having an RF connector configured to couple the pedestal to an RF bias power source; and an RF conduit that extends from the RF connector to the pedestal through a central opening of the pedestal body to provide RF bias to the pedestal.
    Type: Grant
    Filed: April 2, 2021
    Date of Patent: October 8, 2024
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Qiwei Liang, Douglas Arthur Buchberger, Jr., Gautam Pisharody, Dmitry Lubomirsky, Shekhar Athani
  • Publication number: 20230161260
    Abstract: A method and apparatus for performing post-exposure bake cooling operations is described herein. The method begins by post exposure baking a substrate disposed on heated substrate support in a process chamber, the process chamber having a showerhead. The heated substrate support is moved to increase a distance between the heated substrate support and a cooled plate of the showerhead. The substrate is separated from the heated substrate support using a substrate lifting device. The substrate is moved into a close proximity to the cooled showerhead. The substrate is cooled until the substrate is less than about 70 degrees Celsius. The substrate is spaced away from the cooled showerhead using the substrate lifting device and aligning the substrate with a substrate transfer passage of the processing chamber for removal by a robot.
    Type: Application
    Filed: October 5, 2022
    Publication date: May 25, 2023
    Inventors: Dmitry LUBOMIRSKY, Douglas A. BUCHBERGER, Jr., Hyunjun KIM, Alan L. TSO, Shekhar ATHANI, Qiwei LIANG, Ellie Y. YIEH
  • Publication number: 20220319896
    Abstract: Embodiments of substrate supports are provided herein. In some embodiments, a substrate support for use in a chemical vapor deposition (CVD) chamber includes: a pedestal to support a substrate, wherein the pedestal includes a dielectric plate coupled to a pedestal body; a rotary union coupled to the pedestal, wherein the rotary union includes a stationary housing disposed about a rotor; a drive assembly coupled to the rotary union; a coolant union coupled to the rotary union and having a coolant inlet fluidly coupled to coolant channels disposed in the pedestal via a coolant line; an RF rotary joint coupled to the coolant union and having an RF connector configured to couple the pedestal to an RF bias power source; and an RF conduit that extends from the RF connector to the pedestal through a central opening of the pedestal body to provide RF bias to the pedestal.
    Type: Application
    Filed: April 2, 2021
    Publication date: October 6, 2022
    Inventors: Qiwei LIANG, Douglas Arthur BUCHBERGER, Jr., Gautam PISHARODY, Dmitry LUBOMIRSKY, Shekhar ATHANI
  • Publication number: 20220005723
    Abstract: Embodiments of the disclosure provide electrostatic chucks for securing substrates during processing. Some embodiments of this disclosure provide methods and apparatus for increased temperature control across the radial profile of the substrate. Some embodiments of the disclosure provide methods and apparatus for providing control of hydrogen concentration in processed films during a high-density plasma (HDP) process.
    Type: Application
    Filed: July 6, 2021
    Publication date: January 6, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Hanish Kumar Panavalappil Kumarankutty, Sean M. Seutter, Sudhir R. Gondhalekar, Wendell Glenn Boyd, JR., Badri Ramamurthi, Shekhar Athani, Anil Kumar Kalal, Jay Dee Pinson, II
  • Patent number: 10388549
    Abstract: Implementations of the present disclosure generally relate to an improved factory interface that is coupled to an on-board metrology housing configured for measuring film properties of a substrate. In one implementation, an apparatus comprises a factory interface, and a metrology housing removably coupled to the factory interface through a load port, the metrology housing comprises an on-board metrology assembly for measuring properties of a substrate to be transferred into the metrology housing.
    Type: Grant
    Filed: November 9, 2016
    Date of Patent: August 20, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Khokan C. Paul, Jay D. Pinson, II, Juan Carlos Rocha-Alvarez, Hari K. Ponnekanti, Rupankar Choudhury, Shekhar Athani, Sandeep Kumpala, Hanish Kumar Panavalappil Kumarankutty
  • Publication number: 20170148654
    Abstract: Implementations of the present disclosure generally relate to an improved factory interface that is coupled to an on-board metrology housing configured for measuring film properties of a substrate. In one implementation, an apparatus comprises a factory interface, and a metrology housing removably coupled to the factory interface through a load port, the metrology housing comprises an on-board metrology assembly for measuring properties of a substrate to be transferred into the metrology housing.
    Type: Application
    Filed: November 9, 2016
    Publication date: May 25, 2017
    Inventors: Khokan C. PAUL, Jay D. PINSON, II, Juan Carlos ROCHA-ALVAREZ, Hari K. PONNEKANTI, Rupankar CHOUDHURY, Shekhar ATHANI, Sandeep KUMPALA, Hanish Kumar PANAVALAPPIL KUMARANKUTTY