Patents by Inventor Sheldon R. Normand

Sheldon R. Normand has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor processing tools with improved performance by use of hybrid learning models
    Patent number: 11947888
    Abstract: Embodiments disclosed herein include a semiconductor manufacturing tool with a hybrid model and methods of using the hybrid model for processing wafers and/or developing process recipes. In an embodiment, a method for developing a semiconductor manufacturing process recipe comprises selecting one or more device outcomes, and querying a hybrid model to obtain a process recipe recommendation suitable for obtaining the device outcomes. In an embodiment, the hybrid process model comprises a statistical model and a physical model. In an embodiment, the method may further comprise executing a design of experiment (DoE) on a set of wafers to validate the process recipe recommended by the hybrid process model.
    Type: Grant
    Filed: January 19, 2023
    Date of Patent: April 2, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Stephen Moffatt, Sheldon R. Normand, Dermot P. Cantwell
  • SEMICONDUCTOR PROCESSING TOOLS WITH IMPROVED PERFORMANCE BY USE OF HYBRID LEARNING MODELS
    Publication number: 20230153503
    Abstract: Embodiments disclosed herein include a semiconductor manufacturing tool with a hybrid model and methods of using the hybrid model for processing wafers and/or developing process recipes. In an embodiment, a method for developing a semiconductor manufacturing process recipe comprises selecting one or more device outcomes, and querying a hybrid model to obtain a process recipe recommendation suitable for obtaining the device outcomes. In an embodiment, the hybrid process model comprises a statistical model and a physical model. In an embodiment, the method may further comprise executing a design of experiment (DoE) on a set of wafers to validate the process recipe recommended by the hybrid process model.
    Type: Application
    Filed: January 19, 2023
    Publication date: May 18, 2023
    Inventors: Stephen Moffatt, SHELDON R. NORMAND, DERMOT P. CANTWELL
  • Semiconductor processing tools with improved performance by use of hybrid learning models
    Patent number: 11586794
    Abstract: Embodiments disclosed herein include a semiconductor manufacturing tool with a hybrid model and methods of using the hybrid model for processing wafers and/or developing process recipes. In an embodiment, a method for developing a semiconductor manufacturing process recipe comprises selecting one or more device outcomes, and querying a hybrid model to obtain a process recipe recommendation suitable for obtaining the device outcomes. In an embodiment, the hybrid process model comprises a statistical model and a physical model. In an embodiment, the method may further comprise executing a design of experiment (DoE) on a set of wafers to validate the process recipe recommended by the hybrid process model.
    Type: Grant
    Filed: July 30, 2020
    Date of Patent: February 21, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Stephen Moffatt, Sheldon R. Normand, Dermot P. Cantwell
  • SEMICONDUCTOR PROCESSING TOOLS WITH IMPROVED PERFORMANCE BY USE OF HYBRID LEARNING MODELS
    Publication number: 20220035979
    Abstract: Embodiments disclosed herein include a semiconductor manufacturing tool with a hybrid model and methods of using the hybrid model for processing wafers and/or developing process recipes. In an embodiment, a method for developing a semiconductor manufacturing process recipe comprises selecting one or more device outcomes, and querying a hybrid model to obtain a process recipe recommendation suitable for obtaining the device outcomes. In an embodiment, the hybrid process model comprises a statistical model and a physical model. In an embodiment, the method may further comprise executing a design of experiment (DoE) on a set of wafers to validate the process recipe recommended by the hybrid process model.
    Type: Application
    Filed: July 30, 2020
    Publication date: February 3, 2022
    Inventors: Stephen Moffatt, Sheldon R. Normand, Dermot P. Cantwell