Patents by Inventor Shemesh Dror

Shemesh Dror has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam device and method for inspecting specimen
    Patent number: 8008629
    Abstract: A charged particle beam device is provided. The device includes a primary objective lens for focusing a primary charged particle beam, the primary objective lens defining an optical axis, a specimen stage defining a specimen location area, a deflection unit for deflecting the primary charged particle beam between the primary objective lens and the specimen location area, towards a beam path for impingement on the specimen, wherein the deflection unit is movable with respect to the optical axis.
    Type: Grant
    Filed: July 23, 2007
    Date of Patent: August 30, 2011
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
    Inventors: Pavel Adamec, Shemesh Dror
  • CHARGED PARTICLE BEAM DEVICE AND METHOD FOR INSPECTING SPECIMEN
    Publication number: 20080048116
    Abstract: A charged particle beam device is provided. The device includes a primary objective lens for focusing a primary charged particle beam, the primary objective lens defining an optical axis, a specimen stage defining a specimen location area, a deflection unit for deflecting the primary charged particle beam between the primary objective lens and the specimen location area, towards a beam path for impingement on the specimen, wherein the deflection unit is movable with respect to the optical axis.
    Type: Application
    Filed: July 23, 2007
    Publication date: February 28, 2008
    Inventors: PAVEL ADAMEC, SHEMESH DROR