Patents by Inventor Shen-Han LIN

Shen-Han LIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for generating ions in an ion source
    Patent number: 9922800
    Abstract: Embodiments of a method for generating ions in an ion source are provided. The method for generating ions in an ion source includes introducing a dopant gas and a diluent gas into an ion source arc chamber. The method for generating ions in an ion source further includes generating plasma in the ion source arc chamber based on the dopant gas and the diluent gas. In addition, the dopant gas includes carbon monoxide, and the diluent gas includes xenon and hydrogen.
    Type: Grant
    Filed: January 17, 2014
    Date of Patent: March 20, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Ming-Hui Li, Stanley Chang, Po-Yi Tseng, Chia-Cheng Liu, Chang-Chun Wu, Shen-Han Lin, Chih-Wen Huang, Ming-Hsien Wu
  • SYSTEM AND METHOD FOR GENERATING IONS IN AN ION SOURCE
    Publication number: 20150206690
    Abstract: Embodiments of a method for generating ions in an ion source are provided. The method for generating ions in an ion source includes introducing a dopant gas and a diluent gas into an ion source arc chamber. The method for generating ions in an ion source further includes generating plasma in the ion source arc chamber based on the dopant gas and the diluent gas.
    Type: Application
    Filed: January 17, 2014
    Publication date: July 23, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ming-Hui LI, Stanley CHANG, Po-Yi TSENG, Chia-Cheng LIU, Chang-Chun WU, Shen-Han LIN, Chih-Wen HUANG, Ming-Hsien WU