Patents by Inventor Shen Peng
Shen Peng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250054729Abstract: A transformer coupled capacitive tuning (TCCT) match network includes coarse and fine adjustment circuits. The coarse adjustment circuit receives a first RF signal and includes a first tune variable capacitance circuit and a first load variable capacitance circuit. The first tune variable capacitance circuit adjusts a frequency of the first RF signal to generate a second RF signal. The first load variable capacitance circuit is connected to a ground reference terminal and configured to adjust an impedance of the TCCT match network. The fine adjustment circuit includes a second tune variable capacitance circuit and a second load variable capacitance circuit. The second tune variable capacitance circuit fine tunes a frequency of the second RF signal. The second load variable capacitance circuit is connected to the ground reference terminal and fine tunes the impedance of the transformer coupled capacitive tuning match network.Type: ApplicationFiled: December 13, 2022Publication date: February 13, 2025Inventor: Shen PENG
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Patent number: 12087557Abstract: A substrate processing system includes a processing chamber including a dielectric window and a substrate support arranged therein to support a substrate. A coil is arranged outside of the processing chamber adjacent to the dielectric window. A Faraday shield is arranged between the coil and the dielectric window. An RF generator is configured to supply RF power to the coil. The coil is coupled by stray capacitance and/or directly coupled to the Faraday shield. A capacitor is connected to one of the coil and the Faraday shield to adjust a position of a voltage standing wave along the coil.Type: GrantFiled: September 10, 2020Date of Patent: September 10, 2024Assignee: LAM RESEARCH CORPORATIONInventors: Shen Peng, Tamarak Pandhumsoporn, Anthony Nguyen, Dan Marohl
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Patent number: 11614581Abstract: A polarization-maintaining multi-core fiber includes a plurality of fiber core areas and a main outer cladding. The fiber core areas include one central fiber core area, and two or more than two outer fiber core areas equidistantly and uniformly arranged around the central fiber core area that is a polarization-maintaining fiber core area. Each outer fiber core area includes a fiber core and an inner cladding surrounding a core layer. A portion outside the fiber core areas is the main outer cladding. The fiber can greatly enhance spectral efficiency of an optical transmission system, and improve fiber communication capacity. The arrangement of the polarization-maintaining fiber core area provides a waveguide structure with a function of maintaining polarized light, which can be used for transmission of local light.Type: GrantFiled: June 18, 2020Date of Patent: March 28, 2023Assignee: YANGTZE OPTICAL FIBRE AND CABLE JOINT STOCK LIMITED COMPANYInventors: Xinben Zhang, Ming Tang, Chen Yang, Yue Meng, Kun Yang, Shen Peng, Chi Zhang, Weijun Tong
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Publication number: 20230009651Abstract: Systems and methods for using a transformer to achieve uniformity in processing a substrate are described. One of the systems includes a primary winding having a first end and a second end. The first end is coupled to an output of an impedance matching circuit and the second end is coupled to a capacitor. The system further includes a secondary winding associated with the primary winding and coupled to a first end and a second end of a transformer coupled plasma (TCP) coil of a plasma chamber. The primary winding receives a modified radio frequency (RF) signal from the impedance matching circuit to generate a magnetic flux to induce a voltage in the secondary winding. An RF signal generated by the voltage is transferred from the secondary winding to the TCP coil.Type: ApplicationFiled: November 23, 2020Publication date: January 12, 2023Inventors: Sunil Kapoor, Dan Marohl, Shen Peng
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Patent number: 11550097Abstract: An array-type polarization-maintaining multi-core fiber includes a main outer cladding, fiber core units, and stress units. The fiber core units and the stress units are arranged to form a unit array including one central unit and any unit in the unit array being equidistantly arranged from adjacent units thereof. Provided is at least one pair of stress units, each pair of stress units being arranged symmetrical about one fiber core unit to form a polarization-maintaining fiber core unit. The fiber core units each include a fiber core and an inner cladding surrounding a core layer. A portion outside the fiber core units and the stress units is the main outer cladding. The fiber can greatly enhance spectral efficiency of an optical transmission system, and improve fiber communication capacity.Type: GrantFiled: June 18, 2020Date of Patent: January 10, 2023Assignee: YANGTZE OPTICAL FIBRE AND CABLE JOINT STOCK LIMITED COMPANYInventors: Xinben Zhang, Ming Tang, Chen Yang, Yue Meng, Kun Yang, Shen Peng, Chi Zhang, Beibei Cao, Weijun Tong
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Publication number: 20210305017Abstract: A system for heating a dielectric window of a plasma processing chamber is provided. In one example, the method includes the use of a heating element. The heating element includes a dielectric disc and a conductive line formed in the dielectric disc. The conductive line includes a plurality of loops oriented radially around the dielectric disc. Each loop extends from a radial periphery of the dielectric disc toward a center of the dielectric disc. Each loop of the conductive line has an inward segment coupled to a return segment by a switchback segment. The inward segment is vertically aligned with the return segment.Type: ApplicationFiled: March 26, 2021Publication date: September 30, 2021Inventors: Gordon Peng, Craig Rosslee, Shen Peng, James Chris Vetter
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Patent number: 10923322Abstract: A coil portion is formed. A first articulation portion extends from the coil portion. A first mounting structure extends from the first articulation portion. The first mounting structure includes a first mounting region configured to mount in contact with a terminal of a first electrical component. The first articulation portion and the first mounting structure are configured to position the first mounting region at a location outside of a strong electromagnetic field emanating from the coil portion. A second articulation portion extends from the coil portion. A second mounting structure extends from the second articulation portion. The second mounting structure includes a second mounting region configured to mount in contact with a terminal of a second electrical component. The second articulation portion and the second mounting structure are configured to position the second mounting region at a location outside of the strong electromagnetic field emanating from the coil portion.Type: GrantFiled: June 14, 2017Date of Patent: February 16, 2021Assignee: Lam Research CorporationInventors: Oscar Lopez, Shen Peng, David Setton, Craig Rosslee, Dan Marohl, Andras Kuthi
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Publication number: 20200411297Abstract: A substrate processing system includes a processing chamber including a dielectric window and a substrate support arranged therein to support a substrate. A coil is arranged outside of the processing chamber adjacent to the dielectric window. A Faraday shield is arranged between the coil and the dielectric window. An RF generator is configured to supply RF power to the coil. The coil is coupled by stray capacitance and/or directly coupled to the Faraday shield. A capacitor is connected to one of the coil and the Faraday shield to adjust a position of a voltage standing wave along the coil.Type: ApplicationFiled: September 10, 2020Publication date: December 31, 2020Inventors: Shen PENG, Tamarek PANDHUMSOPORN, Anthony NGUYEN, Dan MAROHL
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Publication number: 20200400877Abstract: An array-type polarization-maintaining multi-core fiber includes a main outer cladding, fiber core units, and stress units. The fiber core units and the stress units are arranged to form a unit array including one central unit and any unit in the unit array being equidistantly arranged from adjacent units thereof. Provided is at least one pair of stress units, each pair of stress units being arranged symmetrical about one fiber core unit to form a polarization-maintaining fiber core unit. The fiber core units each include a fiber core and an inner cladding surrounding a core layer. A portion outside the fiber core units and the stress units is the main outer cladding. The fiber can greatly enhance spectral efficiency of an optical transmission system, and improve fiber communication capacity.Type: ApplicationFiled: June 18, 2020Publication date: December 24, 2020Inventors: Xinben ZHANG, Ming TANG, Chen YANG, Yue MENG, Kun YANG, Shen PENG, Chi ZHANG, Beibei Cao, Weijun TONG
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Publication number: 20200400876Abstract: A polarization-maintaining multi-core fiber includes a plurality of fiber core areas and a main outer cladding. The fiber core areas include one central fiber core area, and two or more than two outer fiber core areas equidistantly and uniformly arranged around the central fiber core area that is a polarization-maintaining fiber core area. Each outer fiber core area includes a fiber core and an inner cladding surrounding a core layer. A portion outside the fiber core areas is the main outer cladding. The fiber can greatly enhance spectral efficiency of an optical transmission system, and improve fiber communication capacity. The arrangement of the polarization-maintaining fiber core area provides a waveguide structure with a function of maintaining polarized light, which can be used for transmission of local light.Type: ApplicationFiled: June 18, 2020Publication date: December 24, 2020Inventors: Xinben ZHANG, Ming TANG, Chen YANG, Yue MENG, Kun YANG, Shen PENG, Chi ZHANG, Weijun TONG
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Publication number: 20200234920Abstract: An apparatus for processing substrates is provided. A plasma processing chamber is provided. At least one substrate support for supporting at least one substrate is in the plasma processing chamber. At least one gas inlet is provided for flowing gas into the plasma processing chamber. A dielectric window forms a cover for the plasma processing chamber. The dielectric window comprises an outer dielectric window ring with a central aperture and an inner concaved dielectric window extending across the central aperture, wherein the inner concaved dielectric window forms a volume in fluid communication with an interior of the plasma processing chamber, and wherein the at least one gas inlet flows gas into the volume of the inner concaved dielectric window. An outer coil assembly is adjacent to the outer dielectric window ring. An inner coil assembly surrounds the inner concaved dielectric window.Type: ApplicationFiled: January 22, 2019Publication date: July 23, 2020Inventors: Shen PENG, Dan MAROHL, Ambarish CHHATRE, Ming-Te LIN, Andras KUTHI
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Patent number: 10586688Abstract: A first inductive loop is formed within a printed circuit board (PCB). The PCB is mounted in a fixed spatial relationship with a radiofrequency power supply structure. A second inductive loop is formed within the PCB. The second inductive loop is positioned in fixed spatial relationship with the first inductive loop such that a distance between the centerpoints of the first and second inductive loops has a fixed value and is precisely known. Each of the first and second inductive loops is formed in an essentially identical manner with regard to number of complete turns of the loops and a size of the loops. A first voltage signal present on the first inductive loop and a second voltage signal present on the second inductive loop and the distance between the first and second loops provide for determination of a radiofrequency current present on the radiofrequency power supply structure.Type: GrantFiled: January 30, 2017Date of Patent: March 10, 2020Assignee: Lam Research CorporationInventors: Andras Kuthi, Shen Peng, Jimmy Nguyen
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Publication number: 20180366301Abstract: A coil portion is formed. A first articulation portion extends from the coil portion. A first mounting structure extends from the first articulation portion. The first mounting structure includes a first mounting region configured to mount in contact with a terminal of a first electrical component. The first articulation portion and the first mounting structure are configured to position the first mounting region at a location outside of a strong electromagnetic field emanating from the coil portion. A second articulation portion extends from the coil portion. A second mounting structure extends from the second articulation portion. The second mounting structure includes a second mounting region configured to mount in contact with a terminal of a second electrical component. The second articulation portion and the second mounting structure are configured to position the second mounting region at a location outside of the strong electromagnetic field emanating from the coil portion.Type: ApplicationFiled: June 14, 2017Publication date: December 20, 2018Inventors: Oscar Lopez, Shen Peng, David Setton, Craig Rosslee, Dan Marohl, Andras Kuthi
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Publication number: 20180217185Abstract: A first inductive loop is formed within a printed circuit board (PCB). The PCB is mounted in a fixed spatial relationship with a radiofrequency power supply structure. A second inductive loop is formed within the PCB. The second inductive loop is positioned in fixed spatial relationship with the first inductive loop such that a distance between the centerpoints of the first and second inductive loops has a fixed value and is precisely known. Each of the first and second inductive loops is formed in an essentially identical manner with regard to number of complete turns of the loops and a size of the loops. A first voltage signal present on the first inductive loop and a second voltage signal present on the second inductive loop and the distance between the first and second loops provide for determination of a radiofrequency current present on the radiofrequency power supply structure.Type: ApplicationFiled: January 30, 2017Publication date: August 2, 2018Inventors: Andras Kuthi, Shen Peng, Jimmy Nguyen
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Publication number: 20180047543Abstract: A system is provided and includes a first linear motor, a first separator support assembly, and a controller. The first linear motor includes a shaft that is linearly driven based on a current supplied to the first linear motor. The first separator support assembly is configured to connect to the shaft of the first linear motor and to a rod of a first capacitor of a match network. The first linear motor is configured to actuate the rod to move a first electrode of the first capacitor relative to a second electrode of the first capacitor to change a capacitance of the first capacitor. The controller is connected to the first linear motor and is configured to adjust power supplied to a first radio frequency reactor coil of a plasma processing chamber by adjusting the current supplied to the first linear motor.Type: ApplicationFiled: August 8, 2017Publication date: February 15, 2018Inventors: David Setton, Dan Marohl, Shen Peng, Gautam Bhattacharyya, Andras Kuthi
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Publication number: 20170278680Abstract: A substrate processing system includes a processing chamber including a dielectric window and a substrate support arranged therein to support a substrate. A coil is arranged outside of the processing chamber adjacent to the dielectric window. A Faraday shield is arranged between the coil and the dielectric window. An RF generator is configured to supply RF power to the coil. The faraday shield is coupled by stray capacitance and/or directly coupled to the Faraday shield. A capacitor is connected to one of the coil and the Faraday shield to adjust a position of a voltage standing wave along the coil.Type: ApplicationFiled: March 23, 2017Publication date: September 28, 2017Inventors: Shen Peng, Tamarek Pandhumsoporn, Anthony Nguyen, Dan Marohl
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Patent number: 8832813Abstract: Techniques for secure voice authentication. In one example, a method includes the following steps. A first computing device initiates establishment of a secure channel between the first computing device and a second computing device. The first computing device includes a trusted device and the second computing device at least partially hosts a service that a user of the trusted device seeks to access. A prompt is received at the first computing device from the second computing device over the secure channel. The prompt requests a user voice response for use in making an authentication decision for the user based on the user voice response.Type: GrantFiled: December 19, 2012Date of Patent: September 9, 2014Assignee: EMC CorporationInventors: Ke Cai, Ian Farquhar, Shen Peng, Todd A. Morneau, Weiwei Qian
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Patent number: 5352436Abstract: The present invention is a mixture including a solvent, a first surfactant and a second, dispersible surfactant different from the first surfactant, the mixture having stabilized gas microbubbles formed therein by sonication. The gas microbubbles are useful in ultrasonic diagnostics. Preferably the first surfactant is substantially soluble in the solvent and the second surfactant is substantially insoluble in the solvent. The present invention also includes a process for preparing the stabilized gas microbubbles and a method for altering the contrast of an ultrasonic image using the microbubbles as a contrast agent.Type: GrantFiled: November 22, 1993Date of Patent: October 4, 1994Assignee: Drexel UniversityInventors: Margaret A. Wheatley, Shen Peng, Shruti Singhal, Barry B. Goldberg