Abstract: Some embodiments of the present disclosure relate to a processing tool. The tool includes a housing enclosing a processing chamber, and an input/output port configured to pass a wafer through the housing into and out of the processing chamber. A back-side macro-inspection system is arranged within the processing chamber and is configured to image a back side of the wafer. A front-side macro-inspection system is arranged within the processing chamber and is configured to image a front side of the wafer according to a first image resolution. A front-side micro-inspection system is arranged within the processing chamber and is configured to image the front side of the wafer according to a second image resolution which is higher than the first image resolution.

Abstract: A memory module includes parallel first and second printed circuit boards, each having a mounting edge, a chip mounting side with a set of memory chips mounted thereon, and signal traces that extend from the mounting edge and that are connected to the set of memory chips on the chip mounting side. A signal conductor unit is disposed between the first and second printed circuit boards, and interconnects the signal traces on the first and second printed circuit boards.