Patents by Inventor Sheng-Chieh Chiao

Sheng-Chieh Chiao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8628990
    Abstract: A photodetector is formed in a front surface of a substrate. The substrate is thinned from a back surface of the substrate. A plurality of dopants is introduced into the thinned substrate from the back surface. The plurality of dopants in the thinned substrate is annealed. An anti-reflective layer is deposited over the back surface of the thinned substrate. A micro lens is formed over the anti-reflective layer. At least one ultraviolet (UV) radiation treatment is performed after at least one of the preceding steps.
    Type: Grant
    Filed: September 27, 2012
    Date of Patent: January 14, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Ta Wu, Sheng-Chieh Chiao, Yeur-Luen Tu, Chia-Shiung Tsai, Shuang-Ji Tsai