Abstract: Some embodiments of the present disclosure relate to a processing tool. The tool includes a housing enclosing a processing chamber, and an input/output port configured to pass a wafer through the housing into and out of the processing chamber. A back-side macro-inspection system is arranged within the processing chamber and is configured to image a back side of the wafer. A front-side macro-inspection system is arranged within the processing chamber and is configured to image a front side of the wafer according to a first image resolution. A front-side micro-inspection system is arranged within the processing chamber and is configured to image the front side of the wafer according to a second image resolution which is higher than the first image resolution.

Abstract: A drying system positioned after a foregoing workstation or system for drying workpieces, includes a transport belt for the workpieces to be positioned on; and at least one oven including a main body and a drying member positioned on top of the main body for heating the air in the oven. The main body of the oven includes a base and an air guiding member positioned on the base, and the base and the air guiding member cooperatively define a chamber running through the at least one oven. The transport belt passes through the foregoing workstation and through the chamber. The integration of the drying system with other manufacturing workstations or systems may save time and labor used for transporting workpieces in between drying and other manufacturing steps. The disclosure also provides an oven utilized in the drying system.