Abstract: A radar wave sensing apparatus including a rotation element, a nanosecond pulse near-field sensor and a control unit is provided. The nanosecond pulse near-field sensor emits an incident radar wave and receives a reflection radar wave of the incident radar wave hitting on a surface of the rotation element to obtain a repetition frequency variation of the reflection radar wave corresponding to the incident radar wave. The control unit calculates a vibration of the rotation element according to the repetition frequency variation.

Abstract: A radar wave sensing apparatus including a rotation element, a nanosecond pulse near-field sensor and a control unit is provided. The nanosecond pulse near-field sensor emits an incident radar wave and receives a reflection radar wave of the incident radar wave hitting on a surface of the rotation element to obtain a repetition frequency variation of the reflection radar wave corresponding to the incident radar wave. The control unit calculates a vibration of the rotation element according to the repetition frequency variation.

Abstract: A planar moving apparatus includes a moving stage, a first driving apparatus, a second driving apparatus and a base member. The base member carries the stage, the first driving apparatus and the second driving apparatus. The first driving apparatus drives the moving stage along a first axial direction and the second driving apparatus drives the moving stage along a second axial direction. The first driving apparatus and the second driving apparatus operate independently and do not interfere with each other when the moving stage moves along either the first axial direction or the second axial direction.