Abstract: A leak check is performed on a semiconductor wafer processing tool that includes a process chamber and process gas lines, and a semiconductor wafer is processed using the semiconductor wafer processing tool if the leak check passes. Each gas line includes a mass flow controller (MFC) and normally closed valves including an upstream and downstream valves upstream and downstream of the MFC. Leak checking includes: leak checking up to the downstream valves of the gas lines with the upstream valves closed and the downstream valves of the gas lines closed; and leak checking up to the upstream valve of each the process gas line with the upstream valves of the of the process gas lines closed and with the downstream valve of the of the process gas line being leak checked open and the downstream valve of every other process gas line closed.

Abstract: A bonding tool includes a gas supply line that may extend directly between valves associated with one or more gas supply tanks and a processing chamber such that gas supply line is uninterrupted without any intervening valves or other types of structures that might otherwise cause a pressure buildup in the gas supply line between the processing chamber and the valves associated with the one or more gas supply tanks. The pressure in the gas supply line may be maintained at or near the pressure in the processing chamber so that gas provided to the processing chamber through the gas supply line does not cause a pressure imbalance in the processing chamber, which might otherwise cause early or premature contact between semiconductor substrates that are to be bonded in the processing chamber.

Abstract: A carrier for transporting goods includes a supporting mechanism, a lifting mechanism, a first detection component, and a controller. The supporting mechanism includes at least one entrance and connected to a mobile robot. The lifting mechanism includes a lifting driving member and a bearing part. The lifting driving member is arranged on the supporting mechanism, and the bearing part is arranged on the lifting driving member to be driven to be elevated or lowered by the lifting driving member. The first detection component is arranged on the bearing part and is located in front of the at least one entrance for detecting a position of the goods. The controller is arranged on the supporting mechanism and is respectively communicatively connected with the lifting driving member, the first detection component, and the mobile robot. A mobile lifting conveyor having the carrier is also provided.

Abstract: A carrier for transporting goods includes a supporting mechanism, a lifting mechanism, a first detection component, and a controller. The supporting mechanism includes at least one entrance and connected to a mobile robot. The lifting mechanism includes a lifting driving member and a bearing part. The lifting driving member is arranged on the supporting mechanism, and the bearing part is arranged on the lifting driving member to be driven to be elevated or lowered by the lifting driving member. The first detection component is arranged on the bearing part and is located in front of the at least one entrance for detecting a position of the goods. The controller is arranged on the supporting mechanism and is respectively communicatively connected with the lifting driving member, the first detection component, and the mobile robot. A mobile lifting conveyor having the carrier is also provided.