Patents by Inventor SHENG-HAUNG HUANG

SHENG-HAUNG HUANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11930645
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a substrate, a transistor region, a first and a second contact plug, a first metal via, a magnetic tunneling junction (MTJ) structure, and a metal interconnect. The transistor region includes a gate over the substrate, and a first and a second doped regions at least partially in the substrate. The first and the second contact plug are over the transistor region. The first and the second contact plug include a coplanar upper surface. The first metal via and the MTJ structure are over the first and the second contact plug, respectively. The first metal via is leveled with the MTJ structure. The metal interconnect is over the first metal via and the MTJ structure, and the metal interconnect includes at least two second metal vias in contact with the first metal via and the MTJ structure, respectively.
    Type: Grant
    Filed: March 5, 2023
    Date of Patent: March 12, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Alexander Kalnitsky, Harry-Hak-Lay Chuang, Sheng-Haung Huang, Tien-Wei Chiang
  • Publication number: 20230371277
    Abstract: The present disclosure provides a semiconductor device. The semiconductor device includes a plurality of doped regions located in a substrate; a first dielectric layer located on the substrate; a plurality of first contacts and second contacts located in the first dielectric layer and connected to the plurality of doped regions; a second dielectric layer located on the first dielectric layer; a memory element located in the second dielectric layer, the memory element being electrically connected to the second contact; and a plurality of conductive interconnects located in the second dielectric layer. The conductive interconnects being electrically connected to the plurality of first contacts, and a top surface of the conductive interconnects being at a same level as a top surface of the memory element. A method of fabricating a semiconductor device, and a semiconductor structure having a semiconductor device are also provided.
    Type: Application
    Filed: July 11, 2023
    Publication date: November 16, 2023
    Inventors: ALEXANDER KALNITSKY, HARRY-HAK-LAY CHUANG, SHENG-HAUNG HUANG, TIEN-WEI CHIANG
  • Publication number: 20230225136
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a substrate, a transistor region, a first and a second contact plug, a first metal via, a magnetic tunneling junction (MTJ) structure, and a metal interconnect. The transistor region includes a gate over the substrate, and a first and a second doped regions at least partially in the substrate. The first and the second contact plug are over the transistor region. The first and the second contact plug include a coplanar upper surface. The first metal via and the MTJ structure are over the first and the second contact plug, respectively. The first metal via is leveled with the MTJ structure. The metal interconnect is over the first metal via and the MTJ structure, and the metal interconnect includes at least two second metal vias in contact with the first metal via and the MTJ structure, respectively.
    Type: Application
    Filed: March 5, 2023
    Publication date: July 13, 2023
    Inventors: ALEXANDER KALNITSKY, HARRY-HAK-LAY CHUANG, SHENG-HAUNG HUANG, TIEN-WEI CHIANG
  • Patent number: 11600661
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a substrate, a transistor region, a metal interconnect, and a magnetic tunneling junction (MTJ). The transistor region includes a gate over the substrate, and a doped region is at least partially in the substrate. The metal interconnect is over the doped region. The metal interconnect includes a metal via. The MTJ is entirely underneath the metal interconnect and between the doped region and the metal via, and a diameter of a bottom surface of the MTJ is greater than a diameter of an upper surface of the MTJ.
    Type: Grant
    Filed: June 9, 2021
    Date of Patent: March 7, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Alexander Kalnitsky, Harry-Hak-Lay Chuang, Sheng-Haung Huang, Tien-Wei Chiang
  • Publication number: 20210305317
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a substrate, a transistor region., a metal interconnect, and a magnetic tunneling junction (MTJ). The transistor region includes a gate over the substrate, and a doped region is at least partially in the substrate. The metal interconnect is over the doped region. The metal interconnect includes a metal via. The MTJ is entirely underneath the metal interconnect and between the doped region and the metal via, and a diameter of a bottom surface of the MTJ is greater than a diameter of an upper surface of the MTJ.
    Type: Application
    Filed: June 9, 2021
    Publication date: September 30, 2021
    Inventors: ALEXANDER KALNITSKY, HARRY-HAK-LAY CHUANG, SHENG-HAUNG HUANG, TIEN-WEI CHIANG
  • Patent number: 11037982
    Abstract: The present disclosure provides a semiconductor structure including a substrate, a transistor region having a gate over the substrate, a first doped region, and a second doped region at least partially in the substrate, and a contact plug directly over the gate, a first metal interconnect composed of copper over the transistor region, and a magnetic tunneling junction (MTJ) directly over the contact plug and under the first metal interconnect.
    Type: Grant
    Filed: December 17, 2019
    Date of Patent: June 15, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Alexander Kalnitsky, Harry-Hak-Lay Chuang, Sheng-Haung Huang, Tien-Wei Chiang
  • Publication number: 20200127049
    Abstract: The present disclosure provides a semiconductor structure including a substrate, a transistor region having a gate over the substrate, a first doped region, and a second doped region at least partially in the substrate, and a contact plug directly over the gate, a first metal interconnect composed of copper over the transistor region, and a magnetic tunneling junction (MTJ) directly over the contact plug and under the first metal interconnect.
    Type: Application
    Filed: December 17, 2019
    Publication date: April 23, 2020
    Inventors: ALEXANDER KALNITSKY, HARRY-HAK-LAY CHUANG, SHENG-HAUNG HUANG, TIEN-WEI CHIANG
  • Patent number: 10510804
    Abstract: The present disclosure provides a semiconductor structure including a substrate, a transistor region having a gate over the substrate and a doped region at least partially in the substrate, a first metal layer over the transistor region, and a magnetic tunneling junction (MTJ) between the transistor region and the first metal layer. The present disclosure provides a method for manufacturing a semiconductor structure, including forming a transistor region over a substrate, the transistor region comprising a gate and a doped region, forming a magnetic tunneling junction (MTJ) over the transistor region, electrically coupling to the transistor region, and forming a first metal layer over the MTJ, electrically coupling to the MTJ and the transistor region.
    Type: Grant
    Filed: September 4, 2018
    Date of Patent: December 17, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Alexander Kalnitsky, Harry-Hak-Lay Chuang, Sheng-Haung Huang, Tien-Wei Chiang
  • Publication number: 20180374896
    Abstract: The present disclosure provides a semiconductor structure including a substrate, a transistor region having a gate over the substrate and a doped region at least partially in the substrate, a first metal layer over the transistor region, and a magnetic tunneling junction (MTJ) between the transistor region and the first metal layer. The present disclosure provides a method for manufacturing a semiconductor structure, including forming a transistor region over a substrate, the transistor region comprising a gate and a doped region, forming a magnetic tunneling junction (MTJ) over the transistor region, electrically coupling to the transistor region, and forming a first metal layer over the MTJ, electrically coupling to the MTJ and the transistor region.
    Type: Application
    Filed: September 4, 2018
    Publication date: December 27, 2018
    Inventors: ALEXANDER KALNITSKY, HARRY-HAK-LAY CHUANG, SHENG-HAUNG HUANG, TIEN-WEI CHIANG
  • Patent number: 10068945
    Abstract: The present disclosure provides a semiconductor structure including a substrate, a transistor region having a gate over the substrate and a doped region at least partially in the substrate, a first metal layer over the transistor region, and a magnetic tunneling junction (MTJ) between the transistor region and the first metal layer. The present disclosure provides a method for manufacturing a semiconductor structure, including forming a transistor region over a substrate, the transistor region comprising a gate and a doped region, forming a magnetic tunneling junction (MTJ) over the transistor region, electrically coupling to the transistor region, and forming a first metal layer over the MTJ, electrically coupling to the MTJ and the transistor region.
    Type: Grant
    Filed: September 30, 2015
    Date of Patent: September 4, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Alexander Kalnitsky, Harry-Hak-Lay Chuang, Sheng-Haung Huang, Tien-Wei Chiang
  • Patent number: 10038137
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a magnetoresistive random access memory (MRAM) device in an insulating layer. The MRAM device includes a first electrode, a magnetic tunnel junction (MTJ) over the first electrode, a second electrode over the MTJ, and an insulating spacer surrounding sidewalls of the first electrode, the MTJ, and the second electrode. Top surfaces of the insulating spacer and the second electrode are exposed from the insulating layer. The semiconductor device structure also includes a conductive pad over the insulating layer and electrically connected to the second electrode. The MTJ is entirely covered by the conductive pad.
    Type: Grant
    Filed: September 30, 2016
    Date of Patent: July 31, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Harry-Hak-Lay Chuang, Sheng-Haung Huang, Hung-Cho Wang, Kuei-Hung Shen, Shy-Jay Lin
  • Publication number: 20180097175
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a magnetoresistive random access memory (MRAM) device in an insulating layer. The MRAM device includes a first electrode, a magnetic tunnel junction (MTJ) over the first electrode, a second electrode over the MTJ, and an insulating spacer surrounding sidewalls of the first electrode, the MTJ, and the second electrode. Top surfaces of the insulating spacer and the second electrode are exposed from the insulating layer. The semiconductor device structure also includes a conductive pad over the insulating layer and electrically connected to the second electrode. The MTJ is entirely covered by the conductive pad.
    Type: Application
    Filed: September 30, 2016
    Publication date: April 5, 2018
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Harry-Hak-Lay CHUANG, Sheng-Haung HUANG, Hung-Cho WANG, Kuei-Hung SHEN, Shy-Jay LIN
  • Publication number: 20170092692
    Abstract: The present disclosure provides a semiconductor structure including a substrate, a transistor region having a gate over the substrate and a doped region at least partially in the substrate, a first metal layer over the transistor region, and a magnetic tunneling junction (MTJ) between the transistor region and the first metal layer. The present disclosure provides a method for manufacturing a semiconductor structure, including forming a transistor region over a substrate, the transistor region comprising a gate and a doped region, forming a magnetic tunneling junction (MTJ) over the transistor region, electrically coupling to the transistor region, and forming a first metal layer over the MTJ, electrically coupling to the MTJ and the transistor region.
    Type: Application
    Filed: September 30, 2015
    Publication date: March 30, 2017
    Inventors: ALEXANDER KALNITSKY, HARRY-HAK-LAY CHUANG, SHENG-HAUNG HUANG, TIEN-WEI CHIANG