Patents by Inventor SHENG-HUA Su

SHENG-HUA Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12086519
    Abstract: The present disclosure provides a method and an apparatus for setting wafer script, a device, and a storage medium. In response to the demand unit determining that the execution necessary condition of the script to be executed satisfies the business requirement based on the parameter information, the platform unit acquires the lot identification of the script to be executed and the corresponding production information. In response to the demand unit determining that the script to be executed is executed for the wafers corresponding to the script to be executed for the first time, the platform unit detects whether the first production information corresponding to the first wafers satisfies the execution necessary condition. If satisfied, the platform unit sets parameter information and assignment information for the first wafers, and synchronizes the first wafers with the set information to the material execution unit such that the material execution unit performs corresponding operation.
    Type: Grant
    Filed: September 17, 2021
    Date of Patent: September 10, 2024
    Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventors: Sheng-Hua Su, Minghung Hsieh
  • Patent number: 11869784
    Abstract: A detection method includes: determining process data of a new process; according to the process data of the new process, detecting, by a first production system, whether a wafer carrier type of the new process matches an acceptable level of a corresponding process step or not and whether the new process matches a flag of the corresponding process step or not; if not, determining that the process data does not pass the detection and outputting first detection information; or if the wafer carrier type of the new process matches the acceptable level of the corresponding process step and the new process matches the flag of the corresponding process step, detecting, by a second production system, if the second production system detects a mismatch, determining that the process data does not pass the detection and outputting second detection information.
    Type: Grant
    Filed: June 16, 2021
    Date of Patent: January 9, 2024
    Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventors: Dandan Chen, MingHung Hsieh, Sheng-Hua Su
  • Publication number: 20230215747
    Abstract: A detection method includes: determining process data of a new process; according to the process data of the new process, detecting, by a first production system, whether a wafer carrier type of the new process matches an acceptable level of a corresponding process step or not and whether the new process matches a flag of the corresponding process step or not; if not, determining that the process data does not pass the detection and outputting first detection information; or if the wafer carrier type of the new process matches the acceptable level of the corresponding process step and the new process matches the flag of the corresponding process step, detecting, by a second production system, if the second production system detects a mismatch, determining that the process data does not pass the detection and outputting second detection information.
    Type: Application
    Filed: June 16, 2021
    Publication date: July 6, 2023
    Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventors: Dandan CHEN, MingHung HSIEH, SHENG-HUA SU
  • Publication number: 20220285183
    Abstract: The present disclosure provides a semiconductor intelligent detection system, an intelligent detection method and a storage medium. The semiconductor intelligent detection system includes: a data import module, configured to acquire a data table to-be-detected; a data storage module, having a process resource database stored therein, a data type of data stored in the process resource database being used to perform data detection on items to-be-detected of a corresponding type; a resource detection module, connected to the data import module and the data storage module; wherein the resource detection module is configured to perform data detection on the items to-be-detected in the data table to-be-detected one by one, and record wrong items to-be-detected in an abnormity information table; and, an abnormity export module, connected to the resource detection module and configured to detect whether the resource detection module has detected the last item to-be-detected in the data table to-be-detected.
    Type: Application
    Filed: October 15, 2021
    Publication date: September 8, 2022
    Inventors: Ya MENG, Ming-Hung HSIEH, Sheng-Hua SU
  • Publication number: 20220237196
    Abstract: A data monitoring method for a standardized management system includes: obtaining log files of a standardized management system; parsing the log files to obtain parsed data, and saving the parsed data in a database; and displaying queried target data and historical data corresponding to the target data on a same interface according to a preset rule and the database.
    Type: Application
    Filed: September 8, 2021
    Publication date: July 28, 2022
    Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventors: Wenjie WANG, Dandan CHEN, SHENG-HUA SU, HUNG-CHIH KUO
  • Publication number: 20220215320
    Abstract: A method for processing process data, a process data processing apparatus, a computer-readable storage medium, and an electronic equipment are provided, belonging to the field of manufacturing technology. The method includes: acquiring modified data for process data; checking whether the modified data is compliant according to the fields of the modified data; and generating a modification record according to the modified data when it is determined that the modified data is compliant.
    Type: Application
    Filed: February 24, 2022
    Publication date: July 7, 2022
    Inventors: Daofeng ZHU, Sheng-Hua Su, MingHung HSIEH
  • Publication number: 20220138386
    Abstract: The present disclosure provides a method and an apparatus for setting wafer script, a device, and a storage medium. In response to the demand unit determining that the execution necessary condition of the script to be executed satisfies the business requirement based on the parameter information, the platform unit acquires the lot identification of the script to be executed and the corresponding production information. In response to the demand unit determining that the script to be executed is executed for the wafers corresponding to the script to be executed for the first time, the platform unit detects whether the first production information corresponding to the first wafers satisfies the execution necessary condition. If satisfied, the platform unit sets parameter information and assignment information for the first wafers, and synchronizes the first wafers with the set information to the material execution unit such that the material execution unit performs corresponding operation.
    Type: Application
    Filed: September 17, 2021
    Publication date: May 5, 2022
    Inventors: SHENG-HUA Su, MingHung Hsieh