Patents by Inventor Sheng-Hung LO

Sheng-Hung LO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor apparatus and washing method
    Patent number: 10155252
    Abstract: A semiconductor apparatus is provided. The semiconductor apparatus includes a wafer carrier, and a cup surrounding the wafer carrier. The semiconductor apparatus also includes a bottom washing device located between the wafer carrier and the cup, and configured to spray washing liquid onto the cup. Therefore, the cup can be washed by the bottom washing device.
    Type: Grant
    Filed: April 30, 2015
    Date of Patent: December 18, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Yu Lee, Sheng-Hung Lo, Wen-Lung Ho, Wen-Sung Tseng
  • SEMICONDUCTOR APPARATUS AND WASHING METHOD
    Publication number: 20160322240
    Abstract: A semiconductor apparatus is provided. The semiconductor apparatus includes a wafer carrier, and a cup surrounding the wafer carrier. The semiconductor apparatus also includes a bottom washing device located between the wafer carrier and the cup, and configured to spray washing liquid onto the cup. Therefore, the cup can be washed by the bottom washing device.
    Type: Application
    Filed: April 30, 2015
    Publication date: November 3, 2016
    Inventors: Chun-Yu LEE, Sheng-Hung LO, Wen-Lung HO, Wen-Sung TSENG