Patents by Inventor Sheng-I Tseng

Sheng-I Tseng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical mechanical polishing method and system
    Patent number: 8602838
    Abstract: A chemical mechanical polishing method is provided. The chemical mechanical polishing method includes steps of providing a plurality of semiconductor elements to be polished, obtaining a respective dimension of the each semiconductor element to be polished, and polishing the each semiconductor element according to the respective dimension thereof.
    Type: Grant
    Filed: August 26, 2010
    Date of Patent: December 10, 2013
    Assignee: Mcronix International Co., Ltd.
    Inventors: Meng-Yi Shen, Liang-Yu Hu, Tsung-Hsuan Ho, Sheng-I Tseng
  • CHEMICAL MECHANICAL POLISHING METHOD AND SYSTEM
    Publication number: 20120052604
    Abstract: A chemical mechanical polishing method is provided. The chemical mechanical polishing method includes steps of providing a plurality of semiconductor elements to be polished, obtaining a respective dimension of the each semiconductor element to be polished, and polishing the each semiconductor element according to the respective dimension thereof.
    Type: Application
    Filed: August 26, 2010
    Publication date: March 1, 2012
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Meng-Yi Shen, Liang-Yu Hu, Tsung-Hsuan Ho, Sheng-I Tseng