Patents by Inventor Sheng-Jui Chen

Sheng-Jui Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240142878
    Abstract: Example implementations described herein include a laser source and associated methods of operation that can balance or reduce uneven beam profile problem and even improve plasma heating efficiency to enhance conversion efficiency and intensity for extreme ultraviolet radiation generation. The laser source described herein generates an auxiliary laser beam to augment a pre-pulse laser beam and/or a main-pulse laser beam, such that uneven beam profiles may be corrected and/or compensated. This may improve an intensity of the laser source and also improve an energy distribution from the laser source to a droplet of a target material, effective to increase an overall operating efficiency of the laser source.
    Type: Application
    Filed: January 10, 2024
    Publication date: May 2, 2024
    Inventors: Tai-Yu CHEN, Shang-Chieh CHIEN, Sheng-Kang YU, Li-Jui CHEN, Heng-Hsin LIU
  • Patent number: 11955507
    Abstract: A light-emitting device, including a first type semiconductor layer, a patterned insulating layer, a light-emitting layer, and a second type semiconductor layer, is provided. The patterned insulating layer covers the first type semiconductor layer and has a plurality of insulating openings. The insulating openings are separated from each other. The light-emitting layer is located in the plurality of insulating openings and covers a portion of the first type semiconductor layer. The second type semiconductor layer is located on the light-emitting layer.
    Type: Grant
    Filed: September 9, 2021
    Date of Patent: April 9, 2024
    Assignee: AU OPTRONICS CORPORATION
    Inventors: Hsin-Hung Li, Wei-Syun Wang, Chih-Chiang Chen, Yu-Cheng Shih, Cheng-Chan Wang, Chia-Hsin Chung, Ming-Jui Wang, Sheng-Ming Huang
  • Patent number: 11948702
    Abstract: A radiation source apparatus includes a vessel, a laser source, a collector, a horizontal obscuration bar, and a reflective mirror. The vessel has an exit aperture. The laser source is configured to emit a laser beam to excite a target material to form a plasma. The collector is disposed in the vessel and configured to collect a radiation emitted by the plasma and to reflect the collected radiation to the exit aperture of the vessel. The horizontal obscuration bar extends from a sidewall of the vessel at least to a position between the laser source and the exit aperture of the vessel. The reflective mirror is in the vessel and connected to the horizontal obscuration bar.
    Type: Grant
    Filed: May 5, 2023
    Date of Patent: April 2, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wei-Chung Tu, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu
  • Publication number: 20240103378
    Abstract: The present disclosure provides an extreme ultraviolet (EUV) lithography system including a radiation source and an EUV control system integrated with the radiation source. The EUV control system includes a 3-dimensional diagnostic module (3DDM) designed to collect a laser beam profile of a laser beam from the radiation source in a 3-dimensional (3D) mode, an analysis module designed to analyze the laser beam profile, a database designed to store the laser beam profile, and an EUV control module designed to adjust the radiation source. The analysis module is coupled with the database and the EUV control module. The database is coupled with the 3DDM and the analysis module. The EUV control module is coupled with the analysis module and the radiation source.
    Type: Application
    Filed: November 30, 2023
    Publication date: March 28, 2024
    Inventors: Tai-Yu CHEN, Tzu-Jung PAN, Kuan-Hung CHEN, Sheng-Kang YU, Shang-Chieh CHIEN, Li-Jui CHEN, Heng-Hsin LIU
  • Patent number: 10782219
    Abstract: A particle counting method comprises obtaining first particle information related to the gas to be measured by a first particle counter with a first particle size detection range, obtaining second particle information related to the gas to be measured by a second particle counter with a second particle size detection range, and generating particle size distribution information according to the first and second particle information. The first particle information includes a plurality of particle size ranges and a plurality of particle quantities wherein each of the plurality of particle size ranges corresponds to a respective one of the plurality of particle quantities, the second particle information includes the quantity of particles of which the size values are in the second particle size range, and the lower limit of the second particle size range is lower than that of the first particle size range.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: September 22, 2020
    Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Sheng-Jui Chen, Sheau-Shi Pan, Ta-Chang Yu
  • Publication number: 20190195765
    Abstract: A particle counting method comprises obtaining first particle information related to the gas to be measured by a first particle counter with a first particle size detection range, obtaining second particle information related to the gas to be measured by a second particle counter with a second particle size detection range, and generating particle size distribution information according to the first and second particle information. The first particle information includes a plurality of particle size ranges and a plurality of particle quantities wherein each of the plurality of particle size ranges corresponds to a respective one of the plurality of particle quantities, the second particle information includes the quantity of particles of which the size values are in the second particle size range, and the lower limit of the second particle size range is lower than that of the first particle size range.
    Type: Application
    Filed: December 22, 2017
    Publication date: June 27, 2019
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Sheng-Jui CHEN, Sheau-Shi PAN, Ta-Chang YU
  • Patent number: 10041782
    Abstract: An apparatus for measuring a length of an optical resonant cavity includes a frequency tunable light source, a beam splitter, a frequency modulator and an optical resonant cavity. The frequency tunable light source emits a beam. The beam splitter is disposed on the optical path of the beam for dividing the beam into a first beam and a second beam. The frequency of the second beam is modulated by the frequency modulator to differ from the frequency of the first beam by a beat frequency. The optical resonant cavity is disposed on the main optical path of the first beam and the main optical path of the modulated second beam. The first beam and the modulated second beam enter the optical resonant cavity for measuring a length of the optical resonant cavity, and a variation in cavity length is calculated from the beat frequency.
    Type: Grant
    Filed: December 28, 2015
    Date of Patent: August 7, 2018
    Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventor: Sheng-Jui Chen
  • Patent number: 9943389
    Abstract: A plug of an artificial insemination tube for livestock breeding includes a leading portion and a viewing portion, each having different color layers or different hardness layers, and being formed by stacking and combining different foam layers. In an artificial insemination for livestock breeding, the plug installed at the front of a sperm delivery duct is inserted into a reproductive organ of the livestock, and secretion or fluid is attached and shown on surfaces of the plug leading portion and the viewing portion with different colors to achieve the effect of detecting the physical and physiological conditions of the livestock. In addition, the leading portion is a foam layer with relatively greater hardness, density, and smoothness, so that the plug may be entered into the female livestock body more easily, and the injection hole will not be deformed easily, so as to improve the smoothness and efficiency of the artificial insemination.
    Type: Grant
    Filed: January 8, 2016
    Date of Patent: April 17, 2018
    Inventor: Sheng-Jui Chen
  • Publication number: 20170146337
    Abstract: An apparatus for measuring a length of an optical resonant cavity includes a frequency tunable light source, a beam splitter, a frequency modulator and an optical resonant cavity. The frequency tunable light source emits a beam. The beam splitter is disposed on the optical path of the beam for dividing the beam into a first beam and a second beam. The frequency of the second beam is modulated by the frequency modulator to differ from the frequency of the first beam by a beat frequency. The optical resonant cavity is disposed on the main optical path of the first beam and the main optical path of the modulated second beam. The first beam and the modulated second beam enter the optical resonant cavity for measuring a length of the optical resonant cavity, and a variation in cavity length is calculated from the beat frequency.
    Type: Application
    Filed: December 28, 2015
    Publication date: May 25, 2017
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventor: Sheng-Jui CHEN
  • Publication number: 20170112606
    Abstract: A plug of an artificial insemination tube for livestock breeding includes a leading portion and a viewing portion, each having different color layers or different hardness layers, and being formed by stacking and combining different foam layers. In an artificial insemination for livestock breeding, the plug installed at the front of a sperm delivery duct is inserted into a reproductive organ of the livestock, and secretion or fluid is attached and shown on surfaces of the plug leading portion and the viewing portion with different colors to achieve the effect of detecting the physical and physiological conditions of the livestock. In addition, the leading portion is a foam layer with relatively greater hardness, density, and smoothness, so that the plug may be entered into the female livestock body more easily, and the injection hole will not be deformed easily, so as to improve the smoothness and efficiency of the artificial insemination.
    Type: Application
    Filed: January 8, 2016
    Publication date: April 27, 2017
    Inventor: SHENG-JUI CHEN
  • Patent number: 9347838
    Abstract: A capacitive shear force sensor and a method for fabricating thereof are provided. The capacitive shear force sensor includes a first electric field shielding layer, a second electric field shielding layer, a driving electrode, a first sensing electrode, a second sensing electrode and a dielectric layer. The second electric field shielding layer is disposed under the first electric field shielding layer. The driving electrode is disposed between the first electric field shielding layer and the second electric field shielding layer. The first and the second sensing electrodes are disposed between the driving electrode and the second electric field shielding layer. The dielectric layer is disposed between the driving electrode and the first sensing electrode, and between the driving electrode and the second sensing electrode. The first sensing electrode and the driving electrode form a first capacitor. The second sensing electrode and the driving electrode form a second capacitor.
    Type: Grant
    Filed: May 17, 2013
    Date of Patent: May 24, 2016
    Assignee: Industrial Technology Research Institute
    Inventors: Sheng-Jui Chen, Gwo-Jen Wu, Chung-Lin Wu, Jian-Lin Huang
  • Patent number: 8800371
    Abstract: An electrostatic force generator is disclosed. The electrostatic force generator includes an RF AC voltage source, a capacitive module, a resonant capacitive-inductive bridge (CIB) module, a lock-in amplifier module, and a proportional-integral-derivative (PID) controller. The resonant capacitive-inductive bridge module converts the differential capacitance to a differential signal. The differential signal from the resonant capacitive-inductive bridge module is demodulated at the RF excitation frequency by the lock-in amplifier module. The PID controller receives the output signal from the lock-in amplifier module and generates two audio frequency AC signals to generate a compensation electrostatic force and maintain the capacitance balance inside the capacitive module.
    Type: Grant
    Filed: March 8, 2012
    Date of Patent: August 12, 2014
    Assignee: Industrial Technology Research Institute
    Inventors: Sheng Jui Chen, Hsiao Hsi Pan
  • Publication number: 20140174204
    Abstract: A capacitive shear force sensor and a method for fabricating thereof are provided. The capacitive shear force sensor includes a first electric field shielding layer, a second electric field shielding layer, a driving electrode, a first sensing electrode, a second sensing electrode and a dielectric layer. The second electric field shielding layer is disposed under the first electric field shielding layer. The driving electrode is disposed between the first electric field shielding layer and the second electric field shielding layer. The first and the second sensing electrodes are disposed between the driving electrode and the second electric field shielding layer. The dielectric layer is disposed between the driving electrode and the first sensing electrode, and between the driving electrode and the second sensing electrode. The first sensing electrode and the driving electrode form a first capacitor. The second sensing electrode and the driving electrode form a second capacitor.
    Type: Application
    Filed: May 17, 2013
    Publication date: June 26, 2014
    Applicant: Industrial Technology Research Institute
    Inventors: Sheng-Jui Chen, Gwo-Jen Wu, Chung-Lin Wu, Jian-Lin Huang
  • Publication number: 20130233077
    Abstract: An electrostatic force generator is disclosed. The electrostatic force generator includes an RF AC voltage source, a capacitive module, a resonant capacitive-inductive bridge (CIB) module, a lock-in amplifier module, and a proportional-integral-derivative (PID) controller. The resonant capacitive-inductive bridge module converts the differential capacitance to a differential signal. The differential signal from the resonant capacitive-inductive bridge module is demodulated at the RF excitation frequency by the lock-in amplifier module. The PID controller receives the output signal from the lock-in amplifier module and generates two audio frequency AC signals to generate a compensation electrostatic force and maintain the capacitance balance inside the capacitive module.
    Type: Application
    Filed: March 8, 2012
    Publication date: September 12, 2013
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: SHENG JUI CHEN, HSIAO HSI PAN
  • Publication number: 20100331610
    Abstract: An improved artificial insemination device for animals is disclosed. The device has an inner catheter tube inserted inside a catheter tube where the front end of the inner catheter tube is closed in arc shape and its periphery is arranged with a plurality of spray release openings with arc-shaped invagination at outer edges and an extension member that communicates with the interior. As such, when the front end of the inner catheter tube enters the uterus along the cervical tract, it will not scratch the walls of cervical tract during movement because the outer edges of the spray release openings are in arc invaginated shape. When the contraction of the uterus sucks out the animal semen inside the inner catheter tube, it works like a straw through the extension members of the spray release openings, and the semen pooled together inside the catheter could be released rapidly and smoothly into different parts of the uterus to fully enhance the efficiency and the success rate of artificial insemination.
    Type: Application
    Filed: June 26, 2009
    Publication date: December 30, 2010
    Inventor: Sheng-Jui Chen
  • Patent number: 7845214
    Abstract: This invention relates to a device and method for optical nanoindentation measurement, according to which respective measurement results are obtained by having an indenter tip apply load to a fixed portion of a thin film, having an indenter tip apply load to a non-fixed portion of a thin film, and having a vibrating component transmit the dynamic properties of the vibration to the thin film. By combining the above measurement results in calculations, the Young's modulus, the Poisson's ratio, and the density of the thin film can be obtained.
    Type: Grant
    Filed: August 28, 2008
    Date of Patent: December 7, 2010
    Assignee: Industrial Technology Research Institute
    Inventors: Jiong-Shiun Hsu, Hui-Ching Lu, Chung-Lin Wu, Sheng-Jui Chen
  • Publication number: 20100179378
    Abstract: The invention discloses an improved insemination catheter for artificial insemination in animals, characterized in which a center orifice disposed at the rear end of the nozzle for connecting the catheter tube is a blind orifice, and a diversion slit is configured between and connecting the front end of center orifice and the front end of nozzle, the diversion slit being opened when semen in the catheter tube is being squeezed and closed when semen in the catheter tube is not being squeezed. As such, the front end of the nozzle would be closed when it is inserted along with the catheter tube into the vaginal orifice of female animal body during artificial insemination such that contaminants from outside the female animal body or lubricant used will not flow into the center orifice of the nozzle, thereby enhancing the safety of artificial insemination.
    Type: Application
    Filed: January 15, 2009
    Publication date: July 15, 2010
    Inventor: Sheng-Jui Chen
  • Publication number: 20090165537
    Abstract: This invention relates to a device and method for optical nanoindentation measurement, according to which respective measurement results are obtained by having an indenter tip apply load to a fixed portion of a thin film, having an indenter tip apply load to a non-fixed portion of a thin film, and having a vibrating component transmit the dynamic properties of the vibration to the thin film. By combining the above measurement results in calculations, the Young's modulus, the Poisson's ratio, and the density of the thin film can be obtained.
    Type: Application
    Filed: August 28, 2008
    Publication date: July 2, 2009
    Applicant: Industrial Technology Research Institute
    Inventors: Jiong-Shiun Hsu, Hui-Ching Lu, Chung-Lin Wu, Sheng-Jui Chen
  • Publication number: 20090163765
    Abstract: The invention discloses an improved catheter for artificial insemination in animals, comprising primarily a simple improvement of the nozzle mounted at the front end of catheter. The nozzle is predefined on its peripheral surface with pores, channels, or indented texts or patterns of different shapes, which can be used to hold reagents, liquid medicine, ointment or lubricant for animals. As such, when the operator inserts the nozzle into the vagina of female animal body, the procedure achieves not only artificial insemination, but also other purposes, such as testing, experiment and treatment, thereby augmenting the usage and enhancing the efficiency of artificial insemination catheter.
    Type: Application
    Filed: December 21, 2007
    Publication date: June 25, 2009
    Inventor: Sheng-Jui Chen
  • Publication number: 20090071380
    Abstract: An improved board for pasturage includes pasturage equipments installed on a back side of a board body, a positioning slot and a leg positioning slot disposed at a pasturage equipment and a leg of the pasturage equipment respectively, cup slots and containing slots disposed on a front side and around the periphery of the board body, an embedding slot disposed at a position corresponding to front and back sides of four corners of the board body, male and female latches disposed on both lateral sides of the board body and engaged with each other, and water injecting holes disposed on a lateral side of the board body. The board for pasturage not only connects the pasturage equipment directly for its use, but also operates with a leg or a support pillar as a leisure table, a storage cabinet, a fence or a billboard. The applications are simple, convenient and diversified.
    Type: Application
    Filed: September 19, 2007
    Publication date: March 19, 2009
    Inventor: Sheng-Jui Chen