Abstract: An overhead buffer device used for disposing in a semi-conductor factory includes a strut module and a plurality of buffer modules. The strut module disposed on the top wall of the factory has a horizontal beam and a plurality of overhead strut. The overhead strut is set on the horizontal beam and spaced arranged along the horizontal beam. The buffer modules are installed on the overhead strut respectively. Each buffer module has a plurality of buffers arranged in sequence and along a vertical direction. Each buffer is used for receiving one front opening unified pod (FOUP). Thus, the instant disclosure can be used for using the space of the factory efficiently. Besides, the instant disclosure also provides a wafer transport system having the overhead buffer device.

Abstract: A wafer stocker is provided in present invention including a main body having an opening communicating with an inner accommodation space, a plurality of storage cells for wafer pod disposed in the main body, and an embedded storage shelf mounting in the accommodation space of the main body via the opening, the embedded storage shelf is provided with a plurality of storage cells for wafer pods which may combine with the storage cells in the main body to serve jointly as the storage cells of the entire wafer stocker, wherein the embedded storage shelf may be removed from the accommodation space to be replaced with an embedded wafer sorter.

Abstract: The instant disclosure relates to a lifting device for transporting a wafer carrier to an automatic handling system including a suspension rail and an automatic guiding vehicle configured to move along the suspension rail, comprising an elevating holder, a plurality of suspension modules, and a plurality of first drive modules. Specially, the elevating holder has a motion sensor configured to detect whether the elevating holder is in a horizontal state or a non-horizontal state. The first drive modules can be used to synchronously drive the suspension modules according the horizontal state detected by the motion sensor, and the first drive modules can also be used to individually drive each of the suspension modules according the non-horizontal state detected by the motion sensor to recover the elevating holder from the non-horizontal state as the horizontal state.

Abstract: An overhead buffer device used for disposing in a semi-conductor factory includes a strut module and a plurality of buffer modules. The strut module disposed on the top wall of the factory has a horizontal beam and a plurality of overhead strut. The overhead strut is set on the horizontal beam and spaced arranged along the horizontal beam. The buffer modules are installed on the overhead strut respectively. Each buffer module has a plurality of buffers arranged in sequence and along a vertical direction. Each buffer is used for receiving one front opening unified pod (FOUP). Thus, the instant disclosure can be used for using the space of the factory efficiently. Besides, the instant disclosure also provides a wafer transport system having the overhead buffer device.

Abstract: A wafer stocker is provided in present invention comprising a main body having an opening communicating with an inner accommodation space, a plurality of storage cells for wafer pod disposed in said main body, and an embedded storage shelf mounting in said accommodation space of said main body via said opening, said embedded storage shelf is provided with a plurality of storage cells for wafer pods which may combine with the storage cells in said main body to serve jointly as the storage cells of the entire said wafer stocker, wherein said embedded storage shelf may be removed from said accommodation space to be replaced with an embedded wafer sorter.

Abstract: A combined structure of waterproof lens and waterproof camera for rapid and simple assembly and disassembly; it comprising: waterproof lens and waterproof camera; in particular: the locking portions, such as internal thread and groove, are arranged onto the hollow wall of a socket end of the waterproof lens, while snapping portions, such as external thread and retaining clip, are arranged around an embedding end of the waterproof camera; based on this structural design, the waterproof lens and waterproof camera can be combined easily by the matched locking portions and snapping portions, thus realizing rapid separation for subsequent efficient repair, maintenance and replacement.