Abstract: Embodiments disclosed herein include methods of patterning a back end of line (BEOL) stack and the resulting structures. In an embodiment a method of patterning a BEOL stack comprises forming a grating over an interlayer dielectric (ILD), and forming a spacer over the grating. In an embodiment, the spacer is etch selective to the grating. In an embodiment, the method further comprises disposing a hardmask over the grating and the spacer, and patterning the hardmask to form an opening in the hardmask. In an embodiment, the method further comprises filling the opening with a plug, removing the hardmask, and etching the spacer. In an embodiment, a portion of the spacer is protected from the etch by the plug. In an embodiment, the method may further comprise removing the plug, and transferring the grating into the ILD with an etching process.

Abstract: Various examples are provided for intelligent mouthguards that can be used in fitness and sport activities. In one example, an intelligent mouthguard system includes a mouthguard including sensors and an internal module in communication with the sensors. The sensors can include a nine-axis inertial sensor comprising a three-axis magnetometer, a three-axis accelerometer and a three-axis gyroscope. The three-axis magnetometer can provide a reference plane in relation to the earth's magnetic field for the three-axis accelerometer and the three-axis gyroscope. The internal module can provide sensor data to an external processing unit when located in an oral cavity.

Abstract: Various examples are provided for controlled drug release over an extended period of time. In one example, a controlled release system includes a multilayer membrane including a first biocompatible nanofiber layer; a microbead layer disposed on the first biocompatible nanofiber layer, the microbeads comprising a releasable agent; and a second biocompatible nanofiber layer disposed over the microbead layer. The first and second biocompatible nanofiber layers support the microbead layer and provide a diffusion barrier that can control a release profile of the releasable agent.

Abstract: Various examples are provided for smart transportation and sensing systems. In one example, an apparatus for smart transportation sensing includes a reflector integrated in a contoured roadway unit configured to protect the reflector from damage by vehicles traveling along a transportation surface; and a radio frequency identification (RFID) tag integrated in the contoured roadway unit. In another example, a system for smart transportation includes a vehicle including a radio frequency identification (RFID) reader configured to interrogate RFID tags integrated in reflector units disposed along a transportation surface; and a processing system in communication with the RFID reader, the processing system configured to process data obtained from at least one of the RFID tags to determine vehicle location along the transportation surface.

Abstract: Various examples are provided for magnetic particle imbedded nanofibrous membranes. In one example, among others, a nanofibrous membrane includes one or more electrospun nanofibers forming form a layer of nanofibers, and a plurality of magnetic nanoparticles embedded in the one or more electrospun nanofibers. In another example, a method includes generating one or more electrospun nanofibers including magnetic nanoparticles from one or more nozzles positioned over a substrate to form a magnetic nanofibrous layer, and affixing the magnetic nanofibrous layer to a support structure. In another example, a system includes a magnetic nanofibrous membrane affixed to a support structure, and a magnetic field generator configured to generate a magnetic field that passes through the magnetic nanofibrous membrane.

Abstract: Various examples are provided for intelligent mouthguards that can be used in fitness and sport activities. In one example, an intelligent mouthguard system includes a mouthguard including sensors and an internal module in communication with the sensors. The sensors can include a nine-axis inertial sensor comprising a three-axis magnetometer, a three-axis accelerometer and a three-axis gyroscope. The three-axis magnetometer can provide a reference plane in relation to the earth's magnetic field for the three-axis accelerometer and the three-axis gyroscope. The internal module can provide sensor data to an external processing unit when located in an oral cavity.

Abstract: Various examples are provided for smart transportation and sensing systems. In one example, an apparatus for smart transportation sensing includes a reflector integrated in a contoured roadway unit configured to protect the reflector from damage by vehicles traveling along a transportation surface; and a radio frequency identification (RFID) tag integrated in the contoured roadway unit. In another example, a system for smart transportation includes a vehicle including a radio frequency identification (RFID) reader configured to interrogate RFID tags integrated in reflector units disposed along a transportation surface; and a processing system in communication with the RFID reader, the processing system configured to process data obtained from at least one of the RFID tags to determine vehicle location along the transportation surface.

Abstract: Various examples are provided for magnetic particle imbedded nanofibrous membranes. In one example, among others, a nanofibrous membrane includes one or more electrospun nanofibers forming form a layer of nanofibers, and a plurality of magnetic nanoparticles embedded in the one or more electrospun nanofibers. In another example, a method includes generating one or more electrospun nanofibers including magnetic nanoparticles from one or more nozzles positioned over a substrate to form a magnetic nanofibrous layer, and affixing the magnetic nanofibrous layer to a support structure. In another example, a system includes a magnetic nanofibrous membrane affixed to a support structure, and a magnetic field generator configured to generate a magnetic field that passes through the magnetic nanofibrous membrane.