Abstract: A method for cleaning a lithography apparatus is provided. The method includes flowing a major cleaning agent in volume over a reflective surface of a collector of the lithography apparatus; and flowing a minor cleaning agent in volume intermittently over the reflective surface of the collector, so as to clean the reflective surface of the collector.

Abstract: A control method of an electronic device is provided. The electronic device has an input unit and a display unit. The control method includes: displaying a user interface on the display unit, the user interface having a function event; receiving an execution command corresponding to the function event through the input unit, and displaying a window in response to the execution command on the display unit; and receiving a disable command corresponding to the function through the input unit, and displaying an execution result in response to the disable command on the display unit. At least one of the execution command and the disable command is a gesture.

Abstract: A lithography system and a cleaning method thereof are provided. The lithography system includes a light source generator. The light source generator includes a collector, a droplet generator and a droplet catcher. The droplet generator and the droplet catcher are facing each other, and disposed at a region surrounding the collector. The cleaning method includes: shifting the droplet generator out of the light source generator via a port of the light source generator; inserting a shove assembly into the light source generator via the port; using a borescope attached to the shovel assembly to identify a location of a deposit formed by droplets generated by the droplet generator; using the shovel assembly to remove and collect the deposit; and withdrawing the shovel assembly along with the borescope from the light source generator via the port.

Abstract: A lithography system and a cleaning method thereof are provided. The lithography system includes a light source generator. The light source generator includes a collector, a droplet generator and a droplet catcher. The droplet generator and the droplet catcher are facing each other, and disposed at a region surrounding the collector. The cleaning method includes: shifting the droplet generator out of the light source generator via a port of the light source generator; inserting a shove assembly into the light source generator via the port; using a borescope attached to the shovel assembly to identify a location of a deposit formed by droplets generated by the droplet generator; using the shovel assembly to remove and collect the deposit; and withdrawing the shovel assembly along with the borescope from the light source generator via the port.

Abstract: An extreme ultra violet (EUV) radiation source apparatus includes a chamber and the chamber encloses an EUV collector mirror. The EUV collector mirror is configured to collect and direct EUV radiation generated in the chamber and at least three exhaust ports are configured to remove debris from the chamber. In some embodiments, the exhaust ports are symmetrically arranged in a plane perpendicular to an optical axis of the collector mirror. In some embodiments, three exhaust ports are disposed such that an angle between any two adjacent ports is 120 degrees. In some embodiments, four exhaust ports are disposed such that an angle between any two adjacent ports is 90 degrees. In some embodiments, the chamber is configured to maintain a pressure in a range from 0.1 mbar to 10 mbar.

Abstract: A droplet catcher includes a tube main body and baffles arranged along a length direction of the tube main body.

Abstract: An extreme ultraviolet radiation source is provided, including a vessel and a gas scrubber. The vessel has a gas inlet from which a cleaning gas is supplied into the vessel and a gas outlet from which the cleaning gas exits the vessel. The gas scrubber is disposed within the vessel, arranged such that the cleaning gas leaves the vessel through the gas outlet after flowing through the gas scrubber. The gas scrubber has a number of gas passages to allow the cleaning gas to flow through, and the sizes of the gas passages vary according to the distance between each of the gas passages and the gas outlet.

Abstract: An extreme ultraviolet radiation source is provided, including a vessel, an optical collector, and a gas scrubber. The vessel has a gas inlet and a gas outlet. The optical collector is disposed within the vessel and configured to collect and reflect extreme ultraviolet light produced in the vessel. A cleaning gas is introduced into the vessel through the gas inlet to clean the surface of the optical collector. The gas scrubber is disposed within the vessel, arranged such that the cleaning gas leaves the vessel through the gas outlet after flowing through the gas scrubber. The gas scrubber has a number of gas passages to allow the cleaning gas to flow through, and the size of the gas passage close to the gas outlet is smaller than the size of the gas passage away from the gas outlet.

Abstract: A droplet catcher includes a tube main body and baffles arranged along a length direction of the tube main body.

Abstract: A method for cleaning a lithography apparatus is provided. The method includes flowing a major cleaning agent in volume over a reflective surface of a collector of the lithography apparatus; and flowing a minor cleaning agent in volume intermittently over the reflective surface of the collector, so as to clean the reflective surface of the collector.

Abstract: An extreme ultra violet (EUV) radiation source apparatus includes a chamber and the chamber encloses an EUV collector mirror. The EUV collector mirror is configured to collect and direct EUV radiation generated in the chamber and at least three exhaust ports are configured to remove debris from the chamber. In some embodiments, the exhaust ports are symmetrically arranged in a plane perpendicular to an optical axis of the collector mirror. In some embodiments, three exhaust ports are disposed such that an angle between any two adjacent ports is 120 degrees. In some embodiments, four exhaust ports are disposed such that an angle between any two adjacent ports is 90 degrees. In some embodiments, the chamber is configured to maintain a pressure in a range from 0.1 mbar to 10 mbar.

Abstract: An extreme ultraviolet radiation source is provided, including a vessel, an optical collector, and a gas scrubber. The vessel has a gas inlet and a gas outlet. The optical collector is disposed within the vessel and configured to collect and reflect extreme ultraviolet light produced in the vessel. A cleaning gas is introduced into the vessel through the gas inlet to clean the surface of the optical collector. The gas scrubber is disposed within the vessel, arranged such that the cleaning gas leaves the vessel through the gas outlet after flowing through the gas scrubber. The gas scrubber has a number of gas passages to allow the cleaning gas to flow through, and the size of the gas passage close to the gas outlet is smaller than the size of the gas passage away from the gas outlet.

Abstract: An extreme ultraviolet radiation source is provided, including a droplet generator and a droplet catcher. The droplet generator is configured to output a plurality of target droplets along a target droplet path that is parallel to a horizontal direction. The droplet catcher includes an open end substantially aligned with the target droplet path, and an enclosed end that is opposite to the open end. The droplet catcher also includes a pipe wall disposed between the open end the enclosed end. The pipe wall includes a first pipe wall portion having an inner top surface parallel to the horizontal direction and an inner bottom surface inclined relative to the inner top surface. In addition, the droplet catcher includes at least one gutter formed on the inner bottom surface and having a long axis extending along the horizontal direction.

Abstract: An electronic device including a touch input unit, a display unit, and a control unit is provided. The touch input unit includes a first default input function. The display unit is configured to display a default interface or a first interface. The first interface is corresponding to the first default input function. The control unit is electrically connected to the touch input unit and the display unit for controlling the display unit to be switched from the default interface to the first interface.

Abstract: An audio interface circuit including a processor, an audio jack, a first filter circuit, a second filter circuit, a first clamp circuit, a second clamp circuit, a third filter circuit, and a fourth filter circuit is provided. A first clamp circuit and a second clamp circuit between a third and fourth electrodes and a processor, so that the third and fourth electrodes are allowed to be coupled to a microphone.

Abstract: An audio interface circuit including a processor, an audio jack, a first filter circuit, a second filter circuit, a first clamp circuit, a second clamp circuit, a third filter circuit, and a fourth filter circuit is provided. A first clamp circuit and a second clamp circuit between a third and fourth electrodes and a processor, so that the third and fourth electrodes are allowed to be coupled to a microphone.

Abstract: An input device and a method of switching an input mode of the input device are provided. The input device includes a main body, a state detecting module, a touchpad and a control unit. The main body includes a top surface, a bottom surface and a side surface connected the bottom and top surfaces. The state detecting module includes a first state detecting unit disposed at the bottom surface and a second state detecting unit disposed at the side surface. The first and second state detecting units detect a using state of the input device and generate first and second detecting signals, respectively. The control unit is electrically connected to the state detecting module and the touchpad, and the control unit switches the touchpad to a first control mode or a second control mode according to the first and second detecting signals.

Abstract: A docking station for a portable electronic device is provided. The docking station includes a main body, a supporting structure and a pivot. The pivot includes a first fixing portion, a second fixing portion and a pivot portion. The first fixing portion is disposed at the supporting structure, the second fixing portion is disposed at the main body. The pivot portion is connected to the first fixing portion and the second fixing portion. When the portable electronic device is disposed at the supporting structure, the portable electronic device and the supporting structure can rotate relative to the main body via the pivot. The docking station allows the portable electronic device disposing at the docking station drives the supporting structure to rotate relatively to the main body alone the axis of the pivot to stand in vertical, and then the horizontal space of the portable electronic device is saved.

Abstract: A docking station for a portable electronic device is provided. The docking station includes a main body, a supporting structure and a pivot. The pivot includes a first fixing portion, a second fixing portion and a pivot portion. The first fixing portion is disposed at the supporting structure, the second fixing portion is disposed at the main body. The pivot portion is connected to the first fixing portion and the second fixing portion. When the portable electronic device is disposed at the supporting structure, the portable electronic device and the supporting structure can rotate relative to the main body via the pivot. The docking station allows the portable electronic device disposing at the docking station drives the supporting structure to rotate relatively to the main body alone the axis of the pivot to stand in vertical, and then the horizontal space of the portable electronic device is saved.

Abstract: An input device and a method of switching an input mode of the input device are provided. The input device includes a main body, a state detecting module, a touchpad and a control unit. The main body includes a top surface, a bottom surface and a side surface connected the bottom and top surfaces. The state detecting module includes a first state detecting unit disposed at the bottom surface and a second state detecting unit disposed at the side surface. The first and second state detecting units detect a using state of the input device and generate first and second detecting signals, respectively. The control unit is electrically connected to the state detecting module and the touchpad, and the control unit switches the touchpad to a first control mode or a second control mode according to the first and second detecting signals.