Patents by Inventor Sheng-Te Shu

Sheng-Te Shu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Preventative maintenance aided tool for CVD chamber
    Patent number: 6776850
    Abstract: A preventive maintenance tool which may be installed on a metal chemical vapor deposition (CVD) chamber to prevent escape of contaminating and toxic gases from the chamber interior during preventative maintenance (PM) cleaning of the chamber. The tool comprises a cylindrical tool body which fits to the lid O-ring of the chamber to form a gas-tight seal therewith; a vacuum line connector nipple extending from the body for connection to a vacuum line; and a lid panel rotatably mounted in the body and fitted with a pair of hinged closing panels for reversibly sealing the chamber and facilitating chamber cleaning.
    Type: Grant
    Filed: June 8, 2002
    Date of Patent: August 17, 2004
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Miao-Cheng Liao, Ying-Lang Wang, Hung-Hsin Liang, Hsiang-Sheng Cheng, Sheng-Te Shu, Chih-Yuan Yang
  • PREVENTATIVE MAINTENANCE AIDED TOOL FOR CVD CHAMBER
    Publication number: 20030228751
    Abstract: A preventative maintenance tool which may be installed on a metal chemical vapor deposition (CVD) chamber to prevent escape of contaminating and toxic gases from the chamber interior during preventative maintenance (PM) cleaning of the chamber. The tool comprises a cylindrical tool body which fits to the lid O-ring of the chamber to form a gas-tight seal therewith; a vacuum line connector nipple extending from the body for connection to a vacuum line; and a lid panel rotatably mounted in the body and fitted with a pair of hinged closing panels for reversibly sealing the chamber and facilitating chamber cleaning.
    Type: Application
    Filed: June 8, 2002
    Publication date: December 11, 2003
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Miao-Cheng Liao, Ying-Lang Wang, Hung-Hsin Liang, Hsiang-Sheng Cheng, Sheng-Te Shu, Chih-Yuan Yang