Patents by Inventor Sheng-Ting Fan
Sheng-Ting Fan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230240062Abstract: A memory structure includes a substrate; a first gate structure, a second gate structure and a third gate structure disposed on the substrate, separated from each other along the first direction and respectively extending along the second direction and the third direction; channel bodies separated from each other and passing through the first gate structure, the second gate structure and the third gate structure along the first direction; dielectric films disposed between the first gate structure, the second gate structure, the third gate structure and the channel bodies; and a first side plug electrically connected to the substrate and the channel bodies. The first gate structure, the second gate structure and the third gate structure surround each of the dielectric films and each of the channel bodies, and the dielectric films do not include a charge storage structure.Type: ApplicationFiled: May 18, 2022Publication date: July 27, 2023Inventors: Sheng-Ting FAN, Wei-Chen CHEN, Hang-Ting LUE
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Patent number: 11664218Abstract: A transistor based on topological insulators is provided. In an embodiment a topological insulator is used to form both the channel as well as the source/drain regions, wherein the channel has a first thickness such that the topological insulator material has properties of a semiconductor material and the source/drain regions have a second thickness such that the topological insulator has properties of a conductive material.Type: GrantFiled: June 7, 2021Date of Patent: May 30, 2023Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Sheng-Ting Fan, Pin-Shiang Chen, Chee Wee Liu, Chi-Wen Liu
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Publication number: 20210296112Abstract: A transistor based on topological insulators is provided. In an embodiment a topological insulator is used to form both the channel as well as the source/drain regions, wherein the channel has a first thickness such that the topological insulator material has properties of a semiconductor material and the source/drain regions have a second thickness such that the topological insulator has properties of a conductive material.Type: ApplicationFiled: June 7, 2021Publication date: September 23, 2021Inventors: Sheng-Ting Fan, Pin-Shiang Chen, Chee Wee Liu, Chi-Wen Liu
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Patent number: 11043376Abstract: A transistor based on topological insulators is provided. In an embodiment a topological insulator is used to form both the channel as well as the source/drain regions, wherein the channel has a first thickness such that the topological insulator material has properties of a semiconductor material and the source/drain regions have a second thickness such that the topological insulator has properties of a conductive material.Type: GrantFiled: April 14, 2020Date of Patent: June 22, 2021Assignees: Taiwan Semiconductor Manufacturing Company, Ltd., National Taiwan UniversityInventors: Sheng-Ting Fan, Pin-Shiang Chen, Chee Wee Liu, Chi-Wen Liu
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Patent number: 11018239Abstract: A semiconductor device includes a channel, source/drain structures, and a gate stack. The source/drain structures are on opposite sides of the channel. The gate stack is over the channel, and the gate stack includes a gate dielectric layer, a doped ferroelectric layer, and a gate electrode. The gate dielectric layer is over the channel. The doped ferroelectric layer is over the gate dielectric layer. The gate electrode is over the doped ferroelectric layer. A dopant concentration of the doped ferroelectric layer varies in a direction from the gate electrode toward the channel.Type: GrantFiled: April 13, 2019Date of Patent: May 25, 2021Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL CHIAO TUNG UNIVERSITYInventors: Pin-Shiang Chen, Sheng-Ting Fan, Chee-Wee Liu
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Publication number: 20200328287Abstract: A semiconductor device includes a channel, source/drain structures, and a gate stack. The source/drain structures are on opposite sides of the channel. The gate stack is over the channel, and the gate stack includes a gate dielectric layer, a doped ferroelectric layer, and a gate electrode. The gate dielectric layer is over the channel. The doped ferroelectric layer is over the gate dielectric layer. The gate electrode is over the doped ferroelectric layer. A dopant concentration of the doped ferroelectric layer varies in a direction from the gate electrode toward the channel.Type: ApplicationFiled: April 13, 2019Publication date: October 15, 2020Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL CHIAO TUNG UNIVERSITYInventors: Pin-Shiang CHEN, Sheng-Ting FAN, Chee-Wee LIU
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Publication number: 20200243327Abstract: A transistor based on topological insulators is provided. In an embodiment a topological insulator is used to form both the channel as well as the source/drain regions, wherein the channel has a first thickness such that the topological insulator material has properties of a semiconductor material and the source/drain regions have a second thickness such that the topological insulator has properties of a conductive material.Type: ApplicationFiled: April 14, 2020Publication date: July 30, 2020Inventors: Sheng-Ting Fan, Pin-Shiang Chen, Chee Wee Liu, Chi-Wen Liu
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Patent number: 10686072Abstract: A semiconductor device includes a source and a drain and a channel disposed between the source and the drain, a first gate dielectric layer disposed on the channel, a first gate electrode disposed on the first gate dielectric layer, a second gate dielectric layer disposed on the first gate electrode, and a second gate electrode disposed on the second gate dielectric layer. The second gate dielectric layer is made of a ferroelectric material. A first area of a bottom surface of the first gate electrode which is in contact with the first gate dielectric layer where the is greater than a second area of a bottom surface of the second gate dielectric layer which is in contact with the first gate electrode.Type: GrantFiled: March 2, 2017Date of Patent: June 16, 2020Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITYInventors: Yu-Hung Liao, Samuel C. Pan, Sheng-Ting Fan, Min-Hung Lee, Chee-Wee Liu
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Patent number: 10636651Abstract: A transistor based on topological insulators is provided. In an embodiment a topological insulator is used to form both the channel as well as the source/drain regions, wherein the channel has a first thickness such that the topological insulator material has properties of a semiconductor material and the source/drain regions have a second thickness such that the topological insulator has properties of a conductive material.Type: GrantFiled: July 31, 2018Date of Patent: April 28, 2020Assignees: Taiwan Semiconductor Manufacturing Company, Ltd., National Taiwan UniversityInventors: Sheng-Ting Fan, Pin-Shiang Chen, Chee Wee Liu, Chi-Wen Liu
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Patent number: 10290708Abstract: Semiconductor devices and methods of forming the same are provided. A first gate electrode layer is formed over a substrate. A first gate dielectric layer is formed over the first gate electrode layer. A first channel layer is formed over the first gate dielectric layer. An isolation layer is formed over the first channel layer. A second channel layer is formed over the isolation layer. A second gate dielectric layer is formed over the second channel layer. The second gate dielectric layer, the second channel layer, the isolation layer and the first channel layer are patterned to form a first opening, the first opening extending through the first gate dielectric layer, the second channel layer and the isolation layer, and into the first channel layer. A first source/drain region is formed in the first opening.Type: GrantFiled: October 21, 2016Date of Patent: May 14, 2019Assignees: Taiwan Semiconductor Manufacturing Company, Ltd., National Taiwan UniversityInventors: Pin-Shiang Chen, Samuel C. Pan, Chee-Wee Liu, Sheng-Ting Fan
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Publication number: 20180337032Abstract: A transistor based on topological insulators is provided. In an embodiment a topological insulator is used to form both the channel as well as the source/drain regions, wherein the channel has a first thickness such that the topological insulator material has properties of a semiconductor material and the source/drain regions have a second thickness such that the topological insulator has properties of a conductive material.Type: ApplicationFiled: July 31, 2018Publication date: November 22, 2018Inventors: Sheng-Ting Fan, Pin-Shiang Chen, Chee Wee Liu, Chi-Wen Liu
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Patent number: 10109477Abstract: A transistor based on topological insulators is provided. In an embodiment a topological insulator is used to form both the channel as well as the source/drain regions, wherein the channel has a first thickness such that the topological insulator material has properties of a semiconductor material and the source/drain regions have a second thickness such that the topological insulator has properties of a conductive material.Type: GrantFiled: May 10, 2016Date of Patent: October 23, 2018Assignees: Taiwan Semiconductor Manufacturing Company, Ltd., National Taiwan UniversityInventors: Sheng-Ting Fan, Pin-Shiang Chen, Chee Wee Liu, Chi-Wen Liu
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Publication number: 20180166582Abstract: A semiconductor device includes a source and a drain and a channel disposed between the source and the drain, a first gate dielectric layer disposed on the channel, a first gate electrode disposed on the first gate dielectric layer, a second gate dielectric layer disposed on the first gate electrode, and a second gate electrode disposed on the second gate dielectric layer. The second gate dielectric layer is made of a ferroelectric material. A first area of a bottom surface of the first gate electrode which is in contact with the first gate dielectric layer where the is greater than a second area of a bottom surface of the second gate dielectric layer which is in contact with the first gate electrode.Type: ApplicationFiled: March 2, 2017Publication date: June 14, 2018Inventors: Yu-Hung LIAO, Samuel C. PAN, Sheng-Ting FAN, Min-Hung LEE, Chee-Wee LIU
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Publication number: 20170194470Abstract: A transistor based on topological insulators is provided. In an embodiment a topological insulator is used to form both the channel as well as the source/drain regions, wherein the channel has a first thickness such that the topological insulator material has properties of a semiconductor material and the source/drain regions have a second thickness such that the topological insulator has properties of a conductive material.Type: ApplicationFiled: May 10, 2016Publication date: July 6, 2017Inventors: Sheng-Ting Fan, Pin-Shiang Chen, Chee Wee Liu, Chi-Wen Liu
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Publication number: 20170040418Abstract: Semiconductor devices and methods of forming the same are provided. A first gate electrode layer is formed over a substrate. A first gate dielectric layer is formed over the first gate electrode layer. A first channel layer is formed over the first gate dielectric layer. An isolation layer is formed over the first channel layer. A second channel layer is formed over the isolation layer. A second gate dielectric layer is formed over the second channel layer. The second gate dielectric layer, the second channel layer, the isolation layer and the first channel layer are patterned to form a first opening, the first opening extending through the first gate dielectric layer, the second channel layer and the isolation layer, and into the first channel layer. A first source/drain region is formed in the first opening.Type: ApplicationFiled: October 21, 2016Publication date: February 9, 2017Inventors: Pin-Shiang Chen, Samuel C. Pan, Chee-Wee Liu, Sheng-Ting Fan
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Patent number: 9490430Abstract: Semiconductor devices and methods of forming the same are provided. A first gate electrode layer is formed over a substrate. A first gate dielectric layer is formed over the first gate electrode layer. A first channel layer is formed over the first gate dielectric layer. An isolation layer is formed over the first channel layer. A second channel layer is formed over the isolation layer. A second gate dielectric layer is formed over the second channel layer. The second gate dielectric layer, the second channel layer, the isolation layer and the first channel layer are patterned to form a first opening, the first opening extending through the first gate dielectric layer, the second channel layer and the isolation layer, and into the first channel layer. A first source/drain region is formed in the first opening.Type: GrantFiled: June 26, 2015Date of Patent: November 8, 2016Assignees: Taiwan Semiconductor Manufacturing Company, Ltd., National Taiwan UniversityInventors: Pin-Shiang Chen, Samuel C. Pan, Chee-Wee Liu, Sheng-Ting Fan