Patents by Inventor Sheng-Ting Shu

Sheng-Ting Shu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Slide-type cylinder coupling for CMP load cup
    Patent number: 6968772
    Abstract: A slide-type cylinder coupling which is suitable for the quick connect/disconnect attachment of a lift piston on a pedestal lift cylinder to a lift pedestal on a load cup or HCLU station of a chemical mechanical polishing apparatus. The cylinder coupling includes a coupling bolt which is provided on the lift piston and a coupling bracket which is provided on the bottom surface of the lift pedestal. The coupling bolt is slidably inserted in the coupling bracket to removably connect the lift cylinder to the lift pedestal. The coupling bolt is slidably removed from the coupling bracket to disconnect the lift cylinder from the lift pedestal for replacement or maintenance of the lift cylinder.
    Type: Grant
    Filed: September 3, 2003
    Date of Patent: November 29, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jing-Long Lin, Fu-Ta Ho, Sheng-Ting Shu
  • Slide-type cylinder coupling for CMP load cup
    Publication number: 20050047858
    Abstract: A slide-type cylinder coupling which is suitable for the quick connect/disconnect attachment of a lift piston on a pedestal lift cylinder to a lift pedestal on a load cup or HCLU station of a chemical mechanical polishing apparatus. The cylinder coupling includes a coupling bolt which is provided on the lift piston and a coupling bracket which is provided on the bottom surface of the lift pedestal. The coupling bolt is slidably inserted in the coupling bracket to removably connect the lift cylinder to the lift pedestal. The coupling bolt is slidably removed from the coupling bracket to disconnect the lift cylinder from the lift pedestal for replacement or maintenance of the lift cylinder.
    Type: Application
    Filed: September 3, 2003
    Publication date: March 3, 2005
    Inventors: Jing-Long Lin, Fu-Ta Ho, Sheng-Ting Shu