Patents by Inventor Sheng-Tsaing Tseng

Sheng-Tsaing Tseng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6514861
    Abstract: A semiconductor process for manufacturing a wafer. First, a previously predicted process rate and a previously measured process rate are provided by a process tool. Next, a presently predicted process rate is obtained by a first linear equation having a first variable weighting factor using the previously predicted process rate and the previously measured process rate as variables. Next, a process time is obtained according to the presently predicted process rate and a predetermined process target to input to the process tool. Finally, the wafer is manufactured according to the process time by the process tool.
    Type: Grant
    Filed: June 20, 2002
    Date of Patent: February 4, 2003
    Assignee: ProMOS Technologies Inc.
    Inventors: Ming-Cheng Yang, Jun-Yi Lee, Yun-Yu Chan, Sheng-Tsaing Tseng