Patents by Inventor Sheng-Yi Hsiao

Sheng-Yi Hsiao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11951569
    Abstract: In some embodiments, the present disclosure relates to a wafer edge trimming apparatus that includes a processing chamber defined by chamber housing. Within the processing chamber is a wafer chuck configured to hold onto a wafer structure. Further, a blade is arranged near an edge of the wafer chuck and configured to remove an edge potion of the wafer structure and to define a new sidewall of the wafer structure. A laser sensor apparatus is configured to direct a laser beam directed toward a top surface of the wafer chuck. The laser sensor apparatus is configured to measure a parameter of an analysis area of the wafer structure. Control circuitry is to the laser sensor apparatus and the blade. The control circuitry is configured to start a damage prevention process when the parameter deviates from a predetermined threshold value by at least a predetermined shift value.
    Type: Grant
    Filed: May 12, 2021
    Date of Patent: April 9, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Ming Wu, Yung-Lung Lin, Hau-Yi Hsiao, Sheng-Chau Chen, Cheng-Yuan Tsai
  • Publication number: 20240038892
    Abstract: A semiconductor device includes a transistor disposed in an active region. The transistor comprises a source/drain feature, a fin channel and a gate structure wrapping over the fin channel. The transistor also includes an insulation region disposed at an active edge. The active edge is at a boundary of the active region. The insulation region includes a trench. The trench has a tapered portion. A width of the tapered portion of the trench at a top of the fin channel is greater than a width of the tapered portion of the trench at a bottom of the gate structure.
    Type: Application
    Filed: July 29, 2022
    Publication date: February 1, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ya-Yi Tsai, Sheng-Yi Hsiao, Shu-Yuan Ku, Ryan Chia-Jen Chen
  • Publication number: 20230402455
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes a fin disposed over a semiconductor substrate, and the fin has a first width. The structure further includes an isolation region disposed around the fin, a gate electrode disposed over the fin and the isolation region, and a fill material disposed in the gate electrode. The fill material is in contact with a top surface of a portion of the semiconductor substrate, the top surface has at least a portion having a substantially flat cross-section, and the portion of the top surface has a second width substantially greater than the first width.
    Type: Application
    Filed: January 15, 2023
    Publication date: December 14, 2023
    Inventors: Ya-Yi TSAI, Sheng-Yi Hsiao, Shu-Yuan KU, Ryan Chia-Jen CHEN, Tzu-Ging LIN, Jih-Jse LIN, Yih-Ann LIN
  • Publication number: 20230402544
    Abstract: A FinFET includes a semiconductor substrate, a semiconductor fin, a gate structure, and an isolation structure. The semiconductor fin protrudes from the semiconductor substrate. The gate structure is disposed across a first segment of the semiconductor fin. The isolation structure interrupts a continuity of a second segment of the semiconductor fin. The isolation structure has a first portion and a second portion stacked on the first portion. Sidewalls of the first portion are inclined and sidewalls of the second portion are straight. A top surface of the first portion is coplanar with a top surface of the gate structure.
    Type: Application
    Filed: June 13, 2022
    Publication date: December 14, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ya-Yi Tsai, Sheng-Yi Hsiao, Chao-Hsuan Chen, Yun-Ting Chiang, Shu-Yuan Ku
  • Patent number: 10002716
    Abstract: Differing from conventional technology utilizing double-layer electron transport layer (ETL) to improving power conversion efficiency of perovskite solar cell, the present invention discloses a novel electron transport structure comprising an interfacial diploe moment enhancing layer, an electron transport layer and an interfacial layer. After applying this electron transport structure in a perovskite solar cell, it is found that an interfacial dipole moment formed between the electron transport layer of the electron transport structure and an active layer of the perovskite solar cell is amplified, so as to give rise to an enhanced driving force for the separation of photogenerated carriers and accelerating charge extraction.
    Type: Grant
    Filed: May 26, 2017
    Date of Patent: June 19, 2018
    Assignee: National Tsing Hua University
    Inventors: Hao-Wu Lin, Wei-Hung Lee, Sheng-Yi Hsiao
  • Patent number: 9715102
    Abstract: This disclosure provides systems, methods, and apparatus for reducing tilt instability in an electromechanical systems (EMS) device, where the EMS device includes a plurality of hinges supporting a movable mirror over a stationary electrode and having identical hinge lengths. The EMS device can include a plurality of first anchor points providing connection at the substrate and a plurality of second anchor points providing connection at the movable mirror. Each of the hinges can be positioned between paired first and second anchor points and symmetrically arranged about the center of the movable mirror. In some implementations, the plurality of first anchor points and the plurality of second anchor points can be defined by a single mask.
    Type: Grant
    Filed: June 11, 2015
    Date of Patent: July 25, 2017
    Assignee: SnapTrack, Inc.
    Inventors: Bor-Shiun Lee, Hung-Yi Lin, Chih-Chun Lee, Sheng-Yi Hsiao
  • Publication number: 20160363761
    Abstract: This disclosure provides systems, methods, and apparatus for reducing tilt instability in an electromechanical systems (EMS) device, where the EMS device includes a plurality of hinges supporting a movable mirror over a stationary electrode and having identical hinge lengths. The EMS device can include a plurality of first anchor points providing connection at the substrate and a plurality of second anchor points providing connection at the movable mirror. Each of the hinges can be positioned between paired first and second anchor points and symmetrically arranged about the center of the movable mirror. In some implementations, the plurality of first anchor points and the plurality of second anchor points can be defined by a single mask.
    Type: Application
    Filed: June 11, 2015
    Publication date: December 15, 2016
    Inventors: Bor-Shiun Lee, Hung-Yi Lin, Chih-Chun Lee, Sheng-Yi Hsiao
  • Publication number: 20160349497
    Abstract: This disclosure provides a display device that can achieve a neutral white color by combining a first tinted native white color produced by a first display element of the display device or a portion thereof with a second tinted native white color produced by a second display element of the display device or a portion of the first display element. The tint of the first tinted native white color and the second tinted native white color can be complementary to each other. The first tinted native white color and the second tinted native white color can be combined using spatial and/or temporal dithering.
    Type: Application
    Filed: May 27, 2015
    Publication date: December 1, 2016
    Inventors: Jian Jim Ma, Shen-Ge Wang, Tallis Young Chang, John Hyunchul Hong, Chih-Chun Lee, Sheng-Yi Hsiao, Bor-shiun Lee, Hung-Yi Lin
  • Patent number: 9431613
    Abstract: A method of fabricating a perovskite solar cell includes forming a hole transport layer on a transparent electrically conductive substrate, and forming a perovskite layer on the hole transport layer via a two-stage vacuum evaporation process. Then, an electron transport layer and an electrode layer are formed in order. The two-stage vacuum evaporation process includes first vacuum evaporating a first material on the hole transport layer and then vacuum evaporating a second material on the first material so as to react the first material with the second material in situ and form the perovskite layer.
    Type: Grant
    Filed: January 21, 2015
    Date of Patent: August 30, 2016
    Assignee: National Tsing Hua University
    Inventors: Hao-Wu Lin, Chang-Wen Chen, Hao-Wei Kang, Sheng-Yi Hsiao
  • Publication number: 20160049585
    Abstract: A method of fabricating a perovskite solar cell includes forming a hole transport layer on a transparent electrically conductive substrate, and forming a perovskite layer on the hole transport layer via a two-stage vacuum evaporation process. Then, an electron transport layer and an electrode layer are formed in order. The two-stage vacuum evaporation process includes first vacuum evaporating a first material on the hole transport layer and then vacuum evaporating a second material on the first material so as to react the first material with the second material in situ and form the perovskite layer.
    Type: Application
    Filed: January 21, 2015
    Publication date: February 18, 2016
    Inventors: Hao-Wu Lin, Chang-Wen Chen, Hao-Wei Kang, Sheng-Yi Hsiao
  • Publication number: 20130256932
    Abstract: A method for preparing a hemisphere-shaped dosage form containing drug. A high molecular weight solution containing the drug is prepared, and the solution is then dropped onto a base material. The interface phenomenon between the solution and different base materials causes the solution to form a hemisphere-shaped liquid drop dosage. After solidifying by cross-link or evaporation, a hemisphere-shaped dosage form containing drug is obtained. The advantages of the preparation method are a simple and fast process, and simple operation. Applications of the preparation method to prepare a hemisphere-shaped dosage form containing drug are also provide.
    Type: Application
    Filed: May 28, 2013
    Publication date: October 3, 2013
    Applicant: Instrument Technology Research Center, National Applied Research Laboratories
    Inventors: Yung-Sheng LIN, Chun-Ting LIN, Keng-Shiang HUANG, Chih-Hui YANG, Sheng-Yi HSIAO, Chih-Cheng HUANG, Shih-Feng TSENG
  • Publication number: 20110256231
    Abstract: A method for preparing drug in hemisphere-shaped dosage form. A high molecular weight solution containing the drug is prepared, and the solution is then dropped on a base material. The interface phenomena between the solution and different base materials makes the drop of high molecular weight solution containing the drug form a hemisphere-shape. After solidifying by cross-link or evaporation, the drug in hemisphere-shaped dosage form is obtained. The advantages of the preparation method are a simple and fast process, and simple operation. Applications of the method to prepare a drug in hemisphere-shaped dosage form are also provided.
    Type: Application
    Filed: April 20, 2010
    Publication date: October 20, 2011
    Inventors: Yung-Sheng Lin, Chun-Ting Lin, Keng-Shiang Huang, Chih-Hui Yang, Sheng-Yi Hsiao, Chih-Cheng Huang, Shih-Feng Tseng
  • Patent number: 7981329
    Abstract: A method of manufacturing an optical component is provided. The method comprises steps of providing a first liquid; providing a fluid, disposed above the first liquid, wherein an interface exists between the first liquid and the fluid; providing a polymer precursor at the interface; and solidifying the polymer precursor so as to form the optical component made by a polymer.
    Type: Grant
    Filed: January 21, 2009
    Date of Patent: July 19, 2011
    Assignee: National Tsing Hua University
    Inventors: Chih-Chun Lee, Sheng-Yi Hsiao, Weileun Fang
  • Publication number: 20090194892
    Abstract: A method of manufacturing an optical component is provided. The method comprises steps of providing a first liquid; providing a fluid, disposed above the first liquid, wherein an interface exists between the first liquid and the fluid; providing a polymer precursor at the interface; and solidifying the polymer precursor so as to form the optical component made by a polymer.
    Type: Application
    Filed: January 21, 2009
    Publication date: August 6, 2009
    Applicant: NATIONAL TSING HUA UNIVERSITY
    Inventors: Chih-Chun Lee, Sheng-Yi Hsiao, Weileun Fang