Patents by Inventor Sheng-Yuan Chang

Sheng-Yuan Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12262642
    Abstract: A method for fabricating magnetoresistive random-access memory cells (MRAM) on a substrate is provided. The substrate is formed with a magnetic tunneling junction (MTJ) layer thereon. When the MTJ layer is etched to form the MRAM cells, there may be metal components deposited on a surface of the MRAM cells and between the MRAM cells. The metal components are then removed by chemical reaction. However, the removal of the metal components may form extra substances on the substrate. A further etching process is then performed to remove the extra substances by physical etching.
    Type: Grant
    Filed: November 17, 2023
    Date of Patent: March 25, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chang-Lin Yang, Chung-Te Lin, Sheng-Yuan Chang, Han-Ting Lin, Chien-Hua Huang
  • Publication number: 20240349616
    Abstract: A method for fabricating magnetoresistive random-access memory cells (MRAM) on a substrate is provided. The substrate is formed with a magnetic tunneling junction (MTJ) layer thereon. When the MTJ layer is etched to form the MRAM cells, there may be metal components deposited on a surface of the MRAM cells and between the MRAM cells by chemical reaction. The metal components are then removed by chemical reaction.
    Type: Application
    Filed: June 27, 2024
    Publication date: October 17, 2024
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chang-Lin YANG, Chung-Te LIN, Sheng-Yuan CHANG, Han-Ting LIN, Chien-Hua HUANG
  • Patent number: 12048250
    Abstract: A method for fabricating magnetoresistive random-access memory cells (MRAM) on a substrate is provided. The substrate is formed with a magnetic tunneling junction (MTJ) layer thereon. When the MTJ layer is etched to form the MRAM cells, there may be metal components deposited on a surface of the MRAM cells and between the MRAM cells by chemical reaction. The metal components are then removed by chemical reaction.
    Type: Grant
    Filed: April 15, 2021
    Date of Patent: July 23, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chang-Lin Yang, Chung-Te Lin, Sheng-Yuan Chang, Han-Ting Lin, Chien-Hua Huang
  • Publication number: 20240090336
    Abstract: A method for fabricating magnetoresistive random-access memory cells (MRAM) on a substrate is provided. The substrate is formed with a magnetic tunneling junction (MTJ) layer thereon. When the MTJ layer is etched to form the MRAM cells, there may be metal components deposited on a surface of the MRAM cells and between the MRAM cells. The metal components are then removed by chemical reaction. However, the removal of the metal components may form extra substances on the substrate. A further etching process is then performed to remove the extra substances by physical etching.
    Type: Application
    Filed: November 17, 2023
    Publication date: March 14, 2024
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chang-Lin YANG, Chung-Te LIN, Sheng-Yuan CHANG, Han-Ting LIN, Chien-Hua HUANG
  • Patent number: 11849644
    Abstract: A method for fabricating magnetoresistive random-access memory cells (MRAM) on a substrate is provided. The substrate is formed with a magnetic tunneling junction (MTJ) layer thereon. When the MTJ layer is etched to form the MRAM cells, there may be metal components deposited on a surface of the MRAM cells and between the MRAM cells. The metal components are then removed by chemical reaction. However, the removal of the metal components may form extra substances on the substrate. A further etching process is then performed to remove the extra substances by physical etching.
    Type: Grant
    Filed: April 15, 2021
    Date of Patent: December 19, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chang-Lin Yang, Chung-Te Lin, Sheng-Yuan Chang, Han-Ting Lin, Chien-Hua Huang
  • Publication number: 20230263069
    Abstract: A method for manufacturing a memory device includes forming a first metal layer over a substrate, forming a magnetic tunnel junction (MTJ) layer stack over the first metal layer, forming a second metal layer over the MTJ layer stack, forming a hard mask layer over the second metal layer, performing a first etching process on the MTJ layer stack to form an MTJ structure and a redeposited layer on a sidewall of the MTJ structure, performing a second etching process to remove the redeposited layer, and performing a third etching process on the sidewall of the MTJ structure.
    Type: Application
    Filed: February 15, 2022
    Publication date: August 17, 2023
    Inventors: Chang-Lin Yang, Sheng-Yuan Chang, Chung-Te Lin, Han-Ting Lin, Chien-Hua Huang
  • Publication number: 20220384521
    Abstract: Structures and formation methods of a semiconductor structure are provided. The semiconductor structure includes an insulating layer covering a device region and an alignment mark region of a semiconductor substrate. A conductive feature is formed in the insulating layer and corresponds to the device region. An alignment mark structure is formed in the first insulating layer and corresponds to the alignment mark region. The alignment mark structure includes a first conductive layer, a second conductive layer covering the first conductive layer, and a first magnetic tunnel junction (MTJ) stack layer covering the second conductive layer. The first conductive layer and the conductive feature are made of the same material.
    Type: Application
    Filed: May 26, 2021
    Publication date: December 1, 2022
    Inventors: Wei-De HO, Lan-Hsin CHIANG, Chien-Hua HUANG, Chung-Te LIN, Yung-Yu WANG, Sheng-Yuan CHANG, Kai-Chieh LIANG
  • Publication number: 20220336731
    Abstract: A method for fabricating magnetoresistive random-access memory cells (MRAM) on a substrate is provided. The substrate is formed with a magnetic tunneling junction (MTJ) layer thereon. When the MTJ layer is etched to form the MRAM cells, there may be metal components deposited on a surface of the MRAM cells and between the MRAM cells. The metal components are then removed by chemical reaction. However, the removal of the metal components may form extra substances on the substrate. A further etching process is then performed to remove the extra substances by physical etching.
    Type: Application
    Filed: April 15, 2021
    Publication date: October 20, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chang-Lin YANG, Chung-Te LIN, Sheng-Yuan CHANG, Han-Ting LIN, Chien-Hua HUANG
  • Publication number: 20220336732
    Abstract: A method for fabricating magnetoresistive random-access memory cells (MRAM) on a substrate is provided. The substrate is formed with a magnetic tunneling junction (MTJ) layer thereon. When the MTJ layer is etched to form the MRAM cells, there may be metal components deposited on a surface of the MRAM cells and between the MRAM cells by chemical reaction. The metal components are then removed by chemical reaction.
    Type: Application
    Filed: April 15, 2021
    Publication date: October 20, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chang-Lin YANG, Chung-Te LIN, Sheng-Yuan CHANG, Han-Ting LIN, Chien-Hua HUANG
  • Publication number: 20180375826
    Abstract: An active network backup device includes at least a mainframe and a hardware. The mainframe and other network devices cannot log in, create settings and access data of the hardware. Hence, the hardware can practically prevent and block viruses, ransomware and attacks by hackers; moreover, the device has a physical security switch design for switching on and off a port to ensure personal operation of the administrator and prevent the hardware from being hacked by robot program. Most importantly, the hardware cannot execute destructive instructions and thereby viruses cannot be executed or run in the hardware, which also prevents accidental deletion due to setting errors, or any ransomware or malicious programs in the disguise of setting programs being downloaded and executed by careless users.
    Type: Application
    Filed: June 23, 2017
    Publication date: December 27, 2018
    Inventors: SHENG-HSIUNG CHANG, SHENG-YUAN CHANG
  • Patent number: 9740824
    Abstract: Disclosed is a drinking water reminding system and the reminding method thereof. The water intake of user is measured by the operation of a reminder of the drinking water reminding system, and a collector of the drinking water reminding system is provided for adjusting the daily drinking water demand of user according to environmental parameters or the physiological parameters of user. The drinking water reminding system reminds the user to drink water if the drinking water reminding system determines that the user has taken insufficient water according to predetermined conditions and measurement results, drinking water reminding system.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: August 22, 2017
    Assignee: Taiwan Gomet Technology Co., Ltd.
    Inventors: Sheng-Hsiung Chang, Sheng-Yuan Chang
  • Publication number: 20160172294
    Abstract: A high aspect ratio structure is provided. The high aspect ratio structure includes a substrate, a plurality of stack structures, and a plurality of support structures. The stack structures are disposed on the substrate, and a trench is formed between adjacent two stack structures. Each of the stack structures includes a plurality of first material layers and a plurality of second material layers. The second material layers and the first material layers are disposed alternately. The support structures are respectively disposed between the substrate and the stack structures, wherein each of the support structures has a concave-convex surface.
    Type: Application
    Filed: December 16, 2014
    Publication date: June 16, 2016
    Inventors: Sheng-Yuan Chang, An-Chyi Wei, Nan-Tsu Lian, Ta-Hone Yang, Kuang-Chao Chen
  • Patent number: 9349746
    Abstract: Present example embodiments relate generally to methods for fabricating semiconductor devices comprising forming an initial stack of alternating insulative and conductive layers over a substrate, identifying a plurality of bit line locations and word line locations for the initial stack, including a first bit line location and a first word line location, and forming, from the initial stack, a vertical arrangement of bit lines in the first bit line location, the vertical arrangement of bit lines having opposing sidewalls. The method further comprises forming a word line by forming a thin conductive layer over selected sections of the opposing sidewalls, the selected sections of the opposing sidewalls being sections within the first word line location. The forming the word line further comprises depositing conductive material adjacent to each thin conductive layer, the deposited conductive material in direct contact with the thin conductive layer.
    Type: Grant
    Filed: January 12, 2015
    Date of Patent: May 24, 2016
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Ta-Hone Yang, Nan-Tsu Lian, An Chyi Wei, Sheng-Yuan Chang, Kuang-Chao Chen
  • Publication number: 20160020119
    Abstract: A semiconductor stack includes a carbon doped/implanted stop layer that reacts with etching plasma to form polymers that maintain bottom etched critical dimension (ECD) and avoid excess recess depth when over-etching in high-aspect-ratio structures.
    Type: Application
    Filed: July 16, 2014
    Publication date: January 21, 2016
    Inventors: Sheng-Yuan Chang, An Chyi Wei
  • Patent number: 9229515
    Abstract: A cloud management method of electronic devices is disclosed herein. The method comprises collecting at least one first information from a electronic device by an information collector comprising a safe power switch; calculating a temporary safe interruption value by the information collector via analyzing a predetermined number of times of a working current or voltage of the electronic device, or calculating a safe interruption value by a local server or a first server; and writing back the temporary safe interruption value or the safe interruption value to the safe power switch. Preferably, a power supply of the electronic device is cut off by the safe power switch in response to the working current or voltage surpassing the temporary safe interruption value or the safe interruption value.
    Type: Grant
    Filed: November 14, 2012
    Date of Patent: January 5, 2016
    Assignee: Taiwan Gomet Technology Co. Ltd.
    Inventors: Sheng-Hsiung Chang, Sheng-Yuan Chang
  • Publication number: 20150143353
    Abstract: A firmware overwriting method for paired use wireless microphone and receiver is disclosed. The firmware update method comprises building a wireless connection between the at least one wireless microphone and the at least one receiver; and executing the determining program by the receiver processing module to determine if the installed wireless microphone matching backup firmware is the same as the wireless microphone firmware. If yes, the overwriting program is not executed. If no, the receiver processing module sends a command to the wireless microphone processing module to download the installed wireless microphone matching backup firmware from the receiver storage module, and the overwriting program is executed by the wireless microphone processing module to overwrite the wireless microphone firmware with the installed wireless microphone matching backup firmware.
    Type: Application
    Filed: January 22, 2015
    Publication date: May 21, 2015
    Inventors: SHENG-HSIUNG CHANG, SHENG-YUAN CHANG
  • Patent number: 8972970
    Abstract: A firmware overwriting method for paired use wireless microphone and receiver is disclosed. The firmware update method comprises building a wireless connection between the at least one wireless microphone and the at least one receiver; and executing the determining program by the receiver processing module to determine if the installed wireless microphone compatible backup firmware is the same as the wireless microphone firmware. If yes, the overwriting program is not executed. If no, the receiver processing module sends a command to the wireless microphone processing module to download the installed wireless microphone compatible backup firmware from the receiver storage module, and the overwriting program is executed by the wireless microphone processing module to overwrite the wireless microphone firmware with the installed wireless microphone compatible backup firmware.
    Type: Grant
    Filed: July 2, 2012
    Date of Patent: March 3, 2015
    Assignee: Taiwan Gomet Technology Co. Ltd.
    Inventors: Sheng-Hsiung Chang, Sheng-Yuan Chang
  • Patent number: 8761687
    Abstract: A bidirectional microphone system is disclosed, including a base station, a wireless microphone and an external control device. A bidirectional wireless communication may be performed between the wireless microphone and the base station. The external control device is connected to the wireless microphone for controlling the wireless microphone via at least one push button on the external control device. The external control device is also provided with light-emitting elements to show the function or status of the wireless microphone. The wireless microphone is provided with a global positioning system or a G-sensor for locating the coordinates of the wireless microphone under different situations. When the wireless microphone is in an emergency and located beyond the wireless communication range, the wireless microphone emits a high-power pulsed radio frequency signal for antenna of the base station to locate the position of the wireless microphone.
    Type: Grant
    Filed: August 10, 2012
    Date of Patent: June 24, 2014
    Assignee: Taiwan Gomet Technology Co., Ltd.
    Inventors: Sheng-Hsiung Chang, Sheng-Yuan Chang
  • Publication number: 20140136380
    Abstract: A cloud management method of electronic devices is disclosed herein. The method comprises collecting at least one first information from a electronic device by an information collector comprising a safe power switch; calculating a temporary safe interruption value by the information collector via analyzing a predetermined number of times of a working current or voltage of the electronic device, or calculating a safe interruption value by a local server or a first server; and writing back the temporary safe interruption value or the safe interruption value to the safe power switch. Preferably, a power supply of the electronic device is cut off by the safe power switch in response to the working current or voltage surpassing the temporary safe interruption value or the safe interruption value.
    Type: Application
    Filed: November 14, 2012
    Publication date: May 15, 2014
    Applicant: TAIWAN GOMET TECHNOLOGY CO. LTD.
    Inventors: Sheng-Hsiung Chang, Sheng-Yuan Chang
  • Publication number: 20140046596
    Abstract: Disclosed is a drinking water reminding system and the reminding method thereof. The water intake of user is measured by the operation of a reminder of the drinking water reminding system, and a collector of the drinking water reminding system is provided for adjusting the daily drinking water demand of user according to environmental parameters or the physiological parameters of user. The drinking water reminding system reminds the user to drink water if the drinking water reminding system determines that the user has taken insufficient water according to predetermined conditions and measurement results, drinking water reminding system.
    Type: Application
    Filed: March 15, 2013
    Publication date: February 13, 2014
    Applicant: TAIWAN GOMET TECHNOLOGY CO., LTD
    Inventors: SHENG-HSIUNG CHANG, SHENG-YUAN CHANG