Patents by Inventor Shengjiao Zhang

Shengjiao Zhang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Graphene production using plasma-enhanced chemical vapor deposition
    Patent number: 10604844
    Abstract: A method of growing graphene at low temperature on a substrate. The method includes placing a substrate with a layer of cobalt deposited thereon in a plasma enhanced chemical vapor deposition (PECVD) chamber, providing a carbon precursor gas to the PECVD chamber, generating plasma at between about 350° C. and about 800° C. to decompose the carbon precursor gas to thereby deposit carbon atoms on the cobalt layer and enabling a plurality of the carbon atoms to diffuse through the cobalt layer thereby growing graphene on top of the cobalt layer and in between the substrate and the cobalt layer, removing carbon atoms from top of the cobalt layer, and removing the cobalt layer.
    Type: Grant
    Filed: May 14, 2018
    Date of Patent: March 31, 2020
    Assignee: Purdue Research Foundation
    Inventors: Zhihong Chen, Shengjiao Zhang
  • GRAPHENE PRODUCTION USING PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION
    Publication number: 20190345609
    Abstract: A method of growing graphene at low temperature on a substrate. The method includes placing a substrate with a layer of cobalt deposited thereon in a plasma enhanced chemical vapor deposition (PECVD) chamber, providing a carbon precursor gas to the PECVD chamber, generating plasma at between about 350° C. and about 800° C. to decompose the carbon precursor gas to thereby deposit carbon atoms on the cobalt layer and enabling a plurality of the carbon atoms to diffuse through the cobalt layer thereby growing graphene on top of the cobalt layer and in between the substrate and the cobalt layer, removing carbon atoms from top of the cobalt layer, and removing the cobalt layer.
    Type: Application
    Filed: May 14, 2018
    Publication date: November 14, 2019
    Applicant: Purdue Research Foundation
    Inventors: Zhihong Chen, Shengjiao Zhang