Abstract: Some embodiments of the present disclosure relate to a processing tool. The tool includes a housing enclosing a processing chamber, and an input/output port configured to pass a wafer through the housing into and out of the processing chamber. A back-side macro-inspection system is arranged within the processing chamber and is configured to image a back side of the wafer. A front-side macro-inspection system is arranged within the processing chamber and is configured to image a front side of the wafer according to a first image resolution. A front-side micro-inspection system is arranged within the processing chamber and is configured to image the front side of the wafer according to a second image resolution which is higher than the first image resolution.

Abstract: An apparatus for inspecting wafer carriers is disclosed. In one example, the apparatus includes: a housing; a load port; a robot arm inside the housing; and a processor. The load port is configured to load a wafer carrier into the housing. The robot arm is configured to move a first camera connected to the robot arm. The first camera is configured to capture a plurality of images of the wafer carrier. The processor is configured to process the plurality of images to inspect the wafer carrier.

Abstract: The present invention provides an uninterruptible power supply display device which includes a signal bus and a plurality of power supply modules each having a power supply unit, a display unit and a control unit. The plurality of power supply modules electrically connect with the signal bus. The control unit on each power supply module simultaneously electrically connects with the power supply unit, the display unit and the signal bus. Each display unit can be operated under a single machine display mode or a system display mode. When under the single machine display mode, the display unit displays the operation message of the corresponding power supply module. When under the system display mode, the display unit generates a system display screen to display the operation messages of the plurality of power supply modules.

Abstract: The present invention provides an uninterruptible power supply display device which includes a signal bus and a plurality of power supply modules each having a power supply unit, a display unit and a control unit. The plurality of power supply modules electrically connect with the signal bus. The control unit on each power supply module simultaneously electrically connects with the power supply unit, the display unit and the signal bus. Each display unit can be operated under a single machine display mode or a system display mode. When under the single machine display mode, the display unit displays the operation message of the corresponding power supply module. When under the system display mode, the display unit generates a system display screen to display the operation messages of the plurality of power supply modules.