Patents by Inventor Shenshen Zhao

Shenshen Zhao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for active shape control of a micro pick up array
    Patent number: 10814496
    Abstract: Structures and methods to actively control the shape of a micro pickup array (MPA) during micro device transfer are described. In an embodiment, a strain is applied to the MPA counteractive to strain arising during micro device transfer operations. For example, strain may be applied by a piezoelectric actuator element bonded to a back side of the base substrate to control a curvature of base substrate, and by extension the MPA.
    Type: Grant
    Filed: December 12, 2017
    Date of Patent: October 27, 2020
    Inventors: Andreas Bibl, Paul A. Parks, Stephen P. Bathurst, Jon A. Williams, John A. Higginson, Shenshen Zhao
  • APPARATUS AND METHOD FOR ACTIVE SHAPE CONTROL OF A MICRO PICK UP ARRAY
    Publication number: 20180194014
    Abstract: Structures and methods to actively control the shape of a micro pickup array (MPA) during micro device transfer are described. In an embodiment, a strain is applied to the MPA counteractive to strain arising during micro device transfer operations. For example, strain may be applied by a piezoelectric actuator element bonded to a back side of the base substrate to control a curvature of base substrate, and by extension the MPA.
    Type: Application
    Filed: December 12, 2017
    Publication date: July 12, 2018
    Inventors: Andreas Bibl, Paul A. Parks, Stephen P. Bathurst, Jon A. Williams, John A. Higginson, Shenshen Zhao