Abstract: An electrode for manipulating an ion beam. The electrode may include an insert having an ion beam aperture to conduct the ion beam therethrough, the insert comprising a first electrically conductive material; a frame disposed around the insert and comprising a second electrically conductive material; and an outer portion, the outer portion disposed around the frame and comprising a third electrically conductive material, wherein the insert is reversibly detachable from the frame, and wherein the frame is reversibly attachable from the outer portion.

Abstract: A system for transferring articles between an atmospheric pressure environment and a vacuum pressure environment. The system may include a vacuum enclosure having a wall separating the atmospheric pressure environment from the vacuum pressure environment. A transfer shaft may extend through the wall from the atmospheric pressure environment to the vacuum pressure environment. The transfer shaft may include an atmospheric transfer port disposed within the atmospheric pressure environment, a vacuum transfer port disposed within the vacuum pressure environment, and an intermediate port disposed adjacent a channel in the wall. The system may further include a movable transfer carriage disposed within the transfer shaft, the transfer carriage having an access port for providing access to an interior of the transfer carriage. The system may further include an air bearing on the transfer carriage configured to expel gas for maintaining a gap between the transfer carriage and the transfer shaft.