Abstract: There is set forth herein a method comprising applying a drive signal to a drive element in a sensor assembly having a drive element and one or more sensor element so that responsively to the drive signal the drive element generates a magnetic flux that travels through a target, determining a strain of the target using a picked up output signal picked up by the one or more sensor element. In one embodiment, a sensor assembly can be employed for detecting a proximity of the target using a picked up output signal picked up by e.g., the drive element. In one embodiment, a drive signal can have a plurality of frequency components.

Abstract: There is set forth herein a method comprising applying a drive signal to a drive element in a sensor assembly having a drive element and one or more sensor element so that responsively to the drive signal the drive element generates a magnetic flux that travels through a target, determining a strain of the target using a picked up output signal picked up by the one or more sensor element. In one embodiment, a sensor assembly can be employed for detecting a proximity of the target using a picked up output signal picked up by e.g., the drive element. In one embodiment, a drive signal can have a plurality of frequency components.

Abstract: An inductor and an eddy current sensor including an inductor are disclosed. The inductor includes a patterned metal layer arranged on an insulating substrate. The inductor is capable of sensing eddy current within a high temperature region.

Abstract: A method for generating a signal indicative of a pressure oscillation in a chamber is provided. The method includes sensing a pressure within the chamber, generating a signal relative to the sensed pressure, digitizing the signal, transforming the digitized signal from the time domain to the frequency domain to generate an energy spectrum, and analyzing the energy spectrum to determine an energy spike indicative of a substantially non-random component of the digitized signal.