Patents by Inventor Shi Teng Zhong

Shi Teng Zhong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240063017
    Abstract: The invention provides a photoresist coating method, which comprises the following steps: providing a wafer with a pattern on the wafer, placing the wafer on a spinner, injecting a photoresist on a central region of the wafer from a nozzle, and carrying out a spin coating step, the spin coating step comprises: turning on the spinner to rotate the spinner to a first rotation speed, and raising the first rotation speed to a second rotation speed, and performing a plurality of brakes during the process of maintaining the second rotation speed, so that the second rotation speed instantly drops to a third rotation speed, and then rises to the second rotation speed again.
    Type: Application
    Filed: September 19, 2022
    Publication date: February 22, 2024
    Applicant: United Semiconductor (Xiamen) Co., Ltd.
    Inventors: Shi Teng Zhong, Ching-Shu Lo, Yuan-Chi Pai, WEN YI TAN