Patents by Inventor Shi-Ya Hsu

Shi-Ya Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • RETAINER RING FOR SEMICONDUCTOR MANUFACTURING PROCESSES
    Publication number: 20170341201
    Abstract: An embodiment retainer ring includes an outer ring encircling an opening and an inner ring attached to the outer ring. The inner ring is disposed between the opening and the outer ring. The inner ring includes a softer material than the outer ring and a plurality of voids within the softer material.
    Type: Application
    Filed: May 26, 2016
    Publication date: November 30, 2017
    Inventors: Chun-Wei Hsu, Chi-Jen Liu, Liang-Guang Chen, Chih-Chung Chang, Cheng-Chun Chang, Hsin-Kai Chen, Yi-Sheng Lin, Shi-Ya Hsu, Tsung-Ju Lin, Yi-Sheng Ma