Patents by Inventor Shian-Hung SU

Shian-Hung SU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pump assembly for creating vacuum in wafer processing chamber
    Patent number: 10879054
    Abstract: A processing apparatus is provided. The processing apparatus includes a wafer processing chamber. The processing apparatus further includes a pump configured to evacuate the wafer processing chamber. The pump includes an inlet port located on a lower boundary plane. The processing apparatus also includes an exhaust conduit placed in fluid communication with the gas outlet of the wafer processing chamber and the inlet port of the pump. The exhaust conduit includes a sacrificial tube structure. The sacrificial tube structure is arranged in such a way that a projection of the sacrificial tube structure on the lower boundary plane overlaps the inlet port of the pump.
    Type: Grant
    Filed: April 27, 2018
    Date of Patent: December 29, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shian-Hung Su, Chen-Yung Wang, Jia-Ming Lee
  • PUMP ASSEMBLY FOR CREATING VACUUM IN WAFER PROCESSING CHAMBER
    Publication number: 20190157050
    Abstract: A processing apparatus is provided. The processing apparatus includes a wafer processing chamber. The processing apparatus further includes a pump configured to evacuate the wafer processing chamber. The pump includes an inlet port located on a lower boundary plane. The processing apparatus also includes an exhaust conduit placed in fluid communication with the gas outlet of the wafer processing chamber and the inlet port of the pump. The exhaust conduit includes a sacrificial tube structure. The sacrificial tube structure is arranged in such a way that a projection of the sacrificial tube structure on the lower boundary plane overlaps the inlet port of the pump.
    Type: Application
    Filed: April 27, 2018
    Publication date: May 23, 2019
    Inventors: Shian-Hung SU, Chen-Yung WANG, Jia-Ming LEE