Patents by Inventor Shiau-Yi Ma

Shiau-Yi Ma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for designing patterning system based on patterning fidelity
    Patent number: 8490033
    Abstract: A method which directly incorporates patterning fidelity into the design of a patterning system is provided. A production result of a target pattern is simulated according to a set of design parameters to obtain a simulated pattern. The target pattern is compared with the simulated pattern to obtain a patterning fidelity, and the values of the set of design parameters of the patterning system are adjusted according to a target patterning fidelity to optimize the values of the set of design parameters of the patterning system.
    Type: Grant
    Filed: May 23, 2012
    Date of Patent: July 16, 2013
    Assignee: National Taiwan University
    Inventors: Kuen-Yu Tsai, Sheng-Yung Chen, Hoi-Tou Ng, Shiau-Yi Ma
  • METHOD AND APPARATUS FOR DESIGNING PATTERNING SYSTEM BASED ON PATTERNING FIDELITY
    Publication number: 20130024823
    Abstract: A method which directly incorporates patterning fidelity into the design of a patterning system is provided. A production result of a target pattern is simulated according to a set of design parameters to obtain a simulated pattern. The target pattern is compared with the simulated pattern to obtain a patterning fidelity, and the values of the set of design parameters of the patterning system are adjusted according to a target patterning fidelity to optimize the values of the set of design parameters of the patterning system.
    Type: Application
    Filed: May 23, 2012
    Publication date: January 24, 2013
    Applicant: NATIONAL TAIWAN UNIVERSITY
    Inventors: Kuen-Yu Tsai, Sheng-Yung Chen, Hoi-Tou Ng, Shiau-Yi Ma