Abstract: A reference sample for analysis that is optimal for calibration of a pyrolysis gas chromatograph-mass spectrometer and with which precise calibration is always possible by preventing a reference substance from evaporating is provided. A reference sample sheet 1 is provided by distributing a target component or target components with a uniform normality in a base made of a high polymer material, and the reference sample sheet 1 is rolled up so that the target component or target components can be prevented from evaporating from the reference sample sheet 1 even in the case where a component has volatility. A reference sample for calibration of a pyrolysis gas chromatograph-mass spectrometer can be easily, quickly, and efficiently collected by punching out the reference sample sheet 1 using a micro-puncher 2.

Abstract: A reference sample for analysis that is optimal for calibration of a pyrolysis gas chromatograph-mass spectrometer and with which precise calibration is always possible by preventing a reference substance from evaporating is provided. A reference sample sheet 1 is provided by distributing a target component or target components with a uniform normality in a base made of a high polymer material, and the reference sample sheet 1 is rolled up so that the target component or target components can be prevented from evaporating from the reference sample sheet 1 even in the case where a component has volatility. A reference sample for calibration of a pyrolysis gas chromatograph-mass spectrometer can be easily, quickly, and efficiently collected by punching out the reference sample sheet 1 using a micro-puncher 2.

Abstract: A reference sample for analysis that is optimal for calibration of a pyrolysis gas chromatograph-mass spectrometer and with which precise calibration is always possible by preventing a reference substance from evaporating is provided. A reference sample sheet 1 is provided by distributing a target component or target components with a uniform normality in a base made of a high polymer material, and the reference sample sheet 1 is rolled up so that the target component or target components can be prevented from evaporating from the reference sample sheet 1 even in the case where a component has volatility. A reference sample for calibration of a pyrolysis gas chromatograph-mass spectrometer can be easily, quickly, and efficiently collected by punching out the reference sample sheet 1 using a micro-puncher 2.

Abstract: Embodiments of the invention provide a magnetic recording medium superior in terms magnetic head flying performance, abrasion resistant reliability and corrosion resistance and a method for manufacturing the same. In one embodiment, method for manufacturing a magnetic recording medium, comprising forming at least an adhesion layer, a soft magnetic layer, a granular magnetic film and a diamond-like carbon (DLC) protective film on a nonmagnetic substrate. While the DLC protective film layer to protect the granular magnetic layer of the magnetic recording medium is formed, hydrocarbon gas is mixed with hydrogen gas and a bias voltage is applied to the substrate.

Abstract: A magnetic recording medium with a granular magnetic recording layer excellent in corrosion resistance is provided. In one embodiment, after formation of, on a non-magnetic substrate, an NiTa adhesion layer, a soft magnetic layer, a Ta intermediate layer, an Ru intermediate layer, and a Co alloy granular magnetic recording layer, hydrogen (H2) plasma processing is applied to the surface of the Co alloy granular magnetic recording layer. Then, a DLC protective film layer is formed and a lubricant layer is coated.

Abstract: To promote reduction in thickness of an air bearing surface protective film of a magnetic head, a magnetic head having an air bearing surface protective film consisting only of a thin carbon film while excluding formation of a dead layer by ion incidence as less as possible to the read/write device, and a manufacturing method therefore, are provided. In an embodiment, an air bearing surface protective film of a magnetic head comprises a thin carbon film, in which the mass density a lowermost layer of the air bearing surface protective film on the side of a magnetic device is made lower compared with a thin carbon film constituting other adjacent layers. Further, the manufacturing method comprises deposition under the control of time for the incident angle of ion flow to a substrate to be processed and deposition under the control of time for the ion flow energy to a substrate to be processed.

Abstract: This magnetic recording medium is characterized in that in the magnetic recording medium having a magnetic layer on a non-magnetic substrate by intercalating at least an under layer, the proportion of functional groups per 100 carbon atoms in a diamond-like carbon protective layer mainly composed of carbon for protecting the magnetic layer exceeds 20%. The bonding force between the protective layer and the lubricating layer of the magnetic recording medium is increased so that under high speed rotation, a decrease in the lubricating layer is not caused so as to provide a magnetic recording apparatus having high reliability.

Abstract: This magnetic recording medium is characterized in that in the magnetic recording medium having a magnetic layer on a non-magnetic substrate by intercalating at least an under layer, the proportion of functional groups per 100 carbon atoms in a diamond-like carbon protective layer mainly composed of carbon for protecting the magnetic layer exceeds 20%. The bonding force between the protective layer and the lubricating layer of the magnetic recording medium is increased so that under high speed rotation, a decrease in the lubricating layer is not caused so as to provide a magnetic recording apparatus having high reliability.

Abstract: A method for manufacturing a magnetic recording medium includes forming a first protective layer of first material over a magnetic film provided on a substrate. The first protective layer has a thickness of about 0.2 nm to about 2 nm. A second protective layer of second material is formed over the first protective layer by driving ions of the second material into the first protective layer. The first protective layer is configured to prevent the ions of the second material from penetrating into the magnetic film.

Abstract: A magnetic recording medium with a granular magnetic recording layer excellent in corrosion resistance is provided. In one embodiment, after formation of, on a non-magnetic substrate, an NiTa adhesion layer, a soft magnetic layer, a Ta intermediate layer, an Ru intermediate layer, and a Co alloy granular magnetic recording layer, hydrogen (H2) plasma processing is applied to the surface of the Co alloy granular magnetic recording layer. Then, a DLC protective film layer is formed and a lubricant layer is coated.

Abstract: Embodiments of the invention provide a magnetic recording medium superior in terms magnetic head flying performance, abrasion resistant reliability and corrosion resistance and a method for manufacturing the same. In one embodiment, method for manufacturing a magnetic recording medium, comprising forming at least an adhesion layer, a soft magnetic layer, a granular magnetic film and a diamond-like carbon (DLC) protective film on a nonmagnetic substrate. While the DLC protective film layer to protect the granular magnetic layer of the magnetic recording medium is formed, hydrocarbon gas is mixed with hydrogen gas and a bias voltage is applied to the substrate.

Abstract: To promote reduction in thickness of an air bearing surface protective film of a magnetic head, a magnetic head having an air bearing surface protective film consisting only of a thin carbon film while excluding formation of a dead layer by ion incidence as less as possible to the read/write device, and a manufacturing method therefore, are provided. In an embodiment, an air bearing surface protective film of a magnetic head comprises a thin carbon film, in which the mass density a lowermost layer of the air bearing surface protective film on the side of a magnetic device is made lower compared with a thin carbon film constituting other adjacent layers.

Abstract: This magnetic recording medium is characterized in that in the magnetic recording medium having a magnetic film on a non-magnetic substrate by intercalating at least an under layer, the proportion of functional groups per 100 carbon atoms in a diamond-like carbon protective coating mainly composed of carbon for protecting the magnetic film exceeds 20%. The bonding force between the protective coating layer and the lubricating layer of the magnetic recording medium is increased so that under high speed rotation, a decrease in the lubricating layer is not caused so as to provide a magnetic recording apparatus having high reliability.

Abstract: This magnetic recording medium is characterized in that in the magnetic recording medium having a magnetic film on a non-magnetic substrate by intercalating at least an under layer, the proportion of functional groups per 100 carbon atoms in a diamond-like carbon protective coating mainly composed of carbon for protecting the magnetic film exceeds 20%. The bonding force between the protective coating layer and the lubricating layer of the magnetic recording medium is increased so that under high speed rotation, a decrease in the lubricating layer is not caused so as to provide a magnetic recording apparatus having high reliability.

Abstract: A magnetic recording medium is provided in which film thickness of the DLC layer is 5 nm or less. A tangential force of the magnetic head is small. The magnetic recording medium has excellent durability to sliding property. A magnetic storage device can be realized that is capable of stable floating of the magnetic head at 10 nm or less. The magnetic recording medium has a primary coat layer, a magnetic layer, and an overcoat layer on a substrate, wherein the overcoat layer is composed of a DLC film, and in an area in which depth from the surface of the DLC film is 13 Å or less, there is formed a CN bond.

Abstract: This magnetic recording medium is characterized in that in the magnetic recording medium having a magnetic layer on a non-magnetic substrate by intercalating at least an under layer, the proportion of functional groups per 100 carbon atoms in a diamond-like carbon protective layer mainly composed of carbon for protecting the magnetic layer exceeds 20%. The bonding force between the protective layer and the lubricating layer of the magnetic recording medium is increased so that under high speed rotation, a decrease in the lubricating layer is not caused so as to provide a magnetic recording apparatus having high reliability.

Abstract: A method for manufacturing a magnetic recording medium includes forming a first protective layer of first material over a magnetic film provided on a substrate. The first protective layer has a thickness of about 0.2 nm to about 2 nm. A second protective layer of second material is formed over the first protective layer by driving ions of the second material into the first protective layer. The first protective layer is configured to prevent the ions of the second material from penetrating into the magnetic film.

Abstract: There will be provided a magnetic recording medium in which film thickness of the DLC layer is 5 nm or less, a tangential force of the magnetic head is small, having excellent durability to sliding property, and there will be obtained a magnetic storage device capable of stable floating of the magnetic head at 10nm or less. There will be used a magnetic recording medium having a primary coat layer, a magnetic layer, and an overcoat layer on a substrate, wherein the overcoat layer is composed of a DLC film, and in an area in which depth from the surface of the DLC film is 13 Å or less, there is formed a CN bond.

Abstract: This magnetic recording medium is characterized in that in the magnetic recording medium having a magnetic film on a non-magnetic substrate by intercalating at least an under layer, the proportion of functional groups per 100 carbon atoms in a diamond-like carbon protective coating mainly composed of carbon for protecting the magnetic film exceeds 20%. The bonding force between the protective coating layer and the lubricating layer of the magnetic recording medium is increased so that under high speed rotation, a decrease in the lubricating layer is not caused so as to provide a magnetic recording apparatus having high reliability.

Abstract: A plasma processing apparatus comprising: a vacuum container; an evacuation means for keeping the interior of the vacuum container at a pressure not higher than atmospheric pressure; a substrate support device for supporting a substrate to be subjected to plasma processing; an electrode for generating plasma in cooperation with the substrate support; a voltage supply for applying a voltage to the electrode; a gas introducing system for introducing a gaseous material into a space where the plasma is produced; a surrounding member for enclosing the space above the substrate support, and a drive for relatively moving the surrounding member to space an end of the surrounding member proximate from the substrate from at least one of the substrate support and the substrate supported thereon by a distance which is short enough to suppress plasma leakage during the plasma processing and to position the end of the surrounding member away from said at least one of the substrate support and the substrate thereon for char