Abstract: A chemical liquid supply system that prevents the generation of heat during operation in a pump and allows downsizing the discharge pump for instilling a chemical liquid from a tip nozzle. Compressed air is supplied to an upper space of a resist bottle and the chemical liquid is conferred positive pressure and sent out to a pump chamber of a discharge pump, thereby the pump chamber is filled with a resist liquid. This eliminates the need of a conventional construction where a spring or others are used to drive a flexible membrane of the discharge pump to the operation chamber side to take in the resist liquid. As a result, no electric motor is used, so there is obviously no risk of heat damage to a semiconductor wafer and the discharge pump itself can be further downsized.

Abstract: An opening 22d of a supply/withdrawal passage 22b is positioned at the center part of the internal wall surface 22c of the operating chamber 26 (concave area 22a), and a pin 24 that protrudes toward the diaphragm 23 is provided in a position that is offset from the center of the wall surface 22c. When the diaphragm 23 is deformed toward the operating chamber 26 by the suction of an operation air into the operating chamber 26 during drawing in the chemical liquid, a part of the diaphragm 23 opposing to the pin 24 rides on the pin 24 and this part becomes a slightly convex shape toward the pump chamber 25. When the operation air is supplied from the opening 22d into the operating chamber 26 during the discharge of the chemical liquid, the deformation begins first from the part of the diaphragm 23 riding on the pin 24.

Abstract: A seal structure in which a sealing member 510 fitted in the seal holding part 120 is elastically deformed to hermetically seal a flow passage joining portion. The seal holding part 120 opening on a flow passage side and including a first retaining surface 121, a second retaining surface 122, and a circumferential surface 123. The sealing member 510 includes a first surface 511 in contact with the first retaining surface 121, a second surface 512 in contact with the retaining surface 122, and an inner surface 513 located inside the seal holding part 510 and tapered to have a diameter becoming smaller from the first surface 511 side to the second surface 512 side. An engagement portion 515 engaged in the seal holding part 120 is formed protruding from an outer surface 514 located on the circumferential surface 123 side and on the first surface 511 side.

Abstract: A seal structure in which a sealing member 510 fitted in the seal holding part 120 is elastically deformed to hermetically seal a flow passage joining portion. The seal holding part 120 opening on a flow passage side and including a first retaining surface 121, a second retaining surface 122, and a circumferential surface 123. The sealing member 510 includes a first surface 511 in contact with the first retaining surface 121, a second surface 512 in contact with the retaining surface 122, and an inner surface 513 located inside the seal holding part 510 and tapered to have a diameter becoming smaller from the first surface 511 side to the second surface 512 side. An engagement portion 515 engaged in the seal holding part 120 is formed protruding from an outer surface 514 located on the circumferential surface 123 side and on the first surface 511 side.

Abstract: An opening 22d of a supply/withdrawal passage 22b is positioned at the center part of the internal wall surface 22c of the operating chamber 26 (concave area 22a), and a pin 24 that protrudes toward the diaphragm 23 is provided in a position that is offset from the center of the wall surface 22c. When the diaphragm 23 is deformed toward the operating chamber 26 by the suction of an operation air into the operating chamber 26 during drawing in the chemical liquid, a part of the diaphragm 23 opposing to the pin 24 rides on the pin 24 and this part becomes a slightly convex shape toward the pump chamber 25. When the operation air is supplied from the opening 22d into the operating chamber 26 during the discharge of the chemical liquid, the deformation begins first from the part of the diaphragm 23 riding on the pin 24.

Abstract: An opening 22d of a supply/withdrawal passage 22b is positioned at the center part of the internal wall surface 22c of the operating chamber 26 (concave area 22a), and a cross-shaped venting groove 22e extending from the opening 22d of the passage 22b to the periphery of the wall surface 22c is formed in the wall surface 22c. Thus, an operating air in the chamber 26 is discharged (sucked) through the passage 22b during drawing in the chemical liquid.

Abstract: A window glass dew-point compartment interior absolute humidity Xrmax is acquired, and a temporary compartment interior set absolute humidity Xset (temporary Xset) is determined from a compartment interior set temperature Tset. A smaller one of Xrmax and (temporary Xset) is used as a compartment interior set absolute humidity Xset. An outlet air required absolute humidity Xao required to obtain Xset is calculated taking into account the humidity of exterior air introduced into the passenger compartment. Using Xao and an outlet air required temperature Tao required to obtain Tset, a control temperature Tea for controlling a compressor is determined.

Abstract: A pump unit for supplying chemical liquids capable of reducing the trapping of air bubbles and chemical liquids inside the chemical liquid passage of the unit while reducing the size by forming the pump and open/close valves in the vicinity of the pump into a single unit. The pump unit 10 is formed by integrally mounting a suction-side passage member 17 with which a suction-side shutoff valve 13 is assembled together and a discharge-side passage member 18 with which a discharge side shutoff valve 14 is assembled together on the pump 11 (pump housings 21, 22). Suction passages 17a and 21b and discharge passages 18a and 21c communicating with a pump chamber 25 are disposed on the same line L1.

Abstract: A window glass dew-point compartment interior absolute humidity Xrmax is acquired, and a temporary compartment interior set absolute humidity Xset (temporary Xset) is determined from a compartment interior set temperature Tset. A smaller one of Xrmax and (temporary Xset) is used as a compartment interior set absolute humidity Xset. An outlet air required absolute humidity Xao required to obtain Xset is calculated taking into account the humidity of exterior air introduced into the passenger compartment. Using Xao and an outlet air required temperature Tao required to obtain Tset, a control temperature Tea for controlling a compressor is determined.