Abstract: The semiconductor device includes: an epitaxial layer of a first conductivity type formed on a first principal surface of a semiconductor substrate; a first semiconductor region of the first conductivity type formed from an outermost surface to an inner portion of the epitaxial layer; and a third semiconductor region of a second conductivity type formed from a bottom surface of the first semiconductor region to an inner portion of the semiconductor substrate. The method includes: (a) polishing a second principal surface opposite to the first principal surface of the semiconductor substrate above which at least a source region, a drain region, and a gate electrode are formed to thin the substrate; and (b) ion-implanting impurities of the second conductivity type from the second principal surface of the polished semiconductor substrate to form the third semiconductor region.

Abstract: The semiconductor device includes: an epitaxial layer of a first conductivity type formed on a first principal surface of a semiconductor substrate; a first semiconductor region of the first conductivity type formed from an outermost surface to an inner portion of the epitaxial layer; and a third semiconductor region of a second conductivity type formed from a bottom surface of the first semiconductor region to an inner portion of the semiconductor substrate. The method includes: (a) polishing a second principal surface opposite to the first principal surface of the semiconductor substrate above which at least a source region, a drain region, and a gate electrode are formed to thin the substrate; and (b) ion-implanting impurities of the second conductivity type from the second principal surface of the polished semiconductor substrate to form the third semiconductor region.

Abstract: In a semiconductor device, an active region is formed in a semiconductor substrate separated by a plurality of isolation regions. A plurality of surface insulating films of different thickness are formed separately on the active region. A plurality of conductive films are formed on the respective insulating films. Then, one of the surface insulating film having smaller thickness is caused to break down to work as an electric fuse.

Abstract: A photolithography step is carried out for exposing/etching a resist film in an etching step. Thereafter a superposition inspection step employing a superposed layer superposition mark and a resist film superposition mark is carried out with a superposition inspection apparatus. In this step, an applied mask confirmation step is simultaneously carried out with the superposition inspection apparatus. Thus, it is possible to provide a method of fabricating a semiconductor device including a superposition inspection step, capable of efficiently confirming an applied mask and improving the fabrication yield for the semiconductor device.

Abstract: A photolithography step is carried out for exposing/etching a resist film in an etching step. Thereafter a superposition inspection step employing a superposed layer superposition mark and a resist film superposition mark is carried out with a superposition inspection apparatus. In this step, an applied mask confirmation step is simultaneously carried out with the superposition inspection apparatus. Thus, it is possible to provide a method of fabricating a semiconductor device including a superposition inspection step, capable of efficiently confirming an applied mask and improving the fabrication yield for the semiconductor device.

Abstract: A semiconductor device having a test mark comprising: a semiconductor substrate; a first TEOS layer formed on the semiconductor substrate; a second TEOS layer formed on the first TEOS layer and having a fluidity lower than that of the first TEOS layer at an elevated temperature; a recess formed in the first and second TEOS layers and exposing the surface of the semiconductor substrate, wherein the horizontal cross section of the recess is substantially rectangular in configuration; and a metal layer formed between the first and second TEOS layers and opposing to the corner of the recess.

Abstract: In order to provide a method of fabricating a high melting point metal wiring layer improved to be capable of forming a thin line without employing a mask, a gate oxide film is formed on a semiconductor substrate. A silicon layer is formed on the gate oxide film. A high melting point metal layer is formed on the silicon layer. A mixed layer of the silicon layer and the high melting point metal layer is formed on a portion for defining a wiring layer. Remaining parts of the silicon layer and the high melting point metal layer other than those forming the mixed layer are removed by etching thereby forming a wiring layer. The wiring layer is heat-treated.

Abstract: Storage node plugs are formed on a semiconductor substrate. A silicon nitride film is formed on a silicon oxide film. By etching the silicon oxide film with the silicon nitride film as a mask, storage node openings each exposing a surface of a corresponding storage node plug are formed, followed by forming a capacitor including a storage node, a capacitor dielectric film and a cell plate in a corresponding opening. With such a procedure, there can be obtained a semiconductor device in which electric short-circuit between adjacent elements is prevented from occurring; and a manufacturing method of such a semiconductor device.

Abstract: A semiconductor device with a high reliability is provided. The semiconductor device includes a silicon substrate, titanium nitride films and an interlayer insulating film. A first opening is formed in the titanium nitride film. A second opening having a diameter different from that of the first opening is formed in the second titanium nitride film. A contact hole is formed in the interlayer insulating film. A titanium film, a titanium nitride film, a plug layer and an interconnect layer are formed so as to be electrically connected to the titanium nitride films through the first and second openings.

Abstract: A contact structure is formed with no voids in an interlayer insulation film and good surface planarity. A first insulation film (21) formed of p-TEOS is deposited to cover a substrate (1) and wires (4) formed on the substrate (1). A second insulation film (22) which is coating glass is formed by SOG. The surface is etched back from the opposite side to the substrate (1); therefore, the second insulation film (22) is etched. The etching is stopped at the point where the surface (21a) of the first insulation film (21) on the wires (4) is exposed. This ensures good surface,planarity. A third insulation film (23) is stacked on top of the second insulation film (22), and portions of the third insulation film (23) above the wires (4) are isotropically etched to form openings (51). At this time, the isotropic etching does not extend over the second insulation film (22).

Abstract: Provided is a method of manufacturing a semiconductor device having a capacitor above a semiconductor substrate, with which it is possible to reduce the number of steps and the cost of manufacture. Specifically, a polysilicon layer (12) in which impurity is diffused is deposited on the entire surface including the inside of a hole (8A). An etching process of the polysilicon layer (12) is performed to form a storage node electrode composed of the polysilicon layer (12) remaining on the bottom and side of a groove for metallization (15) and in the hole (8A). The storage node electrode is broadly divided into a storage node electrode body disposed on the bottom and side of the groove for metallization (15), and a plug part disposed in the hole (8A). The storage node electrode is electrically connected via the plug part to a diffused region (19) of a semiconductor substrate (1).