Patents by Inventor Shigenori Tsuchida

Shigenori Tsuchida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Overflow scrub-washing method and apparatus
    Patent number: 6112355
    Abstract: A washing liquid is continuously supplied upward from the bottom of an inner vessel in such a way that the liquid overflows the top of the vessel while platelike workpieces are entirely immersed in the washing liquid in such a way as to lie parallel with the flow of the liquid. The workpieces are washed in the flow of the washing liquid using washing brushes.
    Type: Grant
    Filed: August 19, 1998
    Date of Patent: September 5, 2000
    Assignee: Speedfam Clean System Co., Ltd.
    Inventors: Shigenori Tsuchida, Minoru Yamahira