Abstract: A motor controller includes: an error suppression compensation unit that outputs an error suppression signal for driving the motor such that a difference between the position command signal and a signal based on the motor position signal equals zero; an acceleration extraction unit that outputs an acceleration component of a natural frequency of a stand from a stand vibration signal; an acceleration compensation unit that outputs a proportional compensation signal obtained by multiplying the stand acceleration signal by a proportional gain; a machine end correction unit that outputs a machine end correction signal, and decreases an amplitude of vibration at the machine end relative position; and an addition unit that outputs a signal obtained by adding the machine end correction signal to the error suppression signal.

Abstract: A motor controller includes: an error suppression compensation unit that outputs an error suppression signal for driving the motor such that a difference between the position command signal and a signal based on the motor position signal equals zero; an acceleration extraction unit that outputs an acceleration component of a natural frequency of a stand from a stand vibration signal; an acceleration compensation unit that outputs a proportional compensation signal obtained by multiplying the stand acceleration signal by a proportional gain; a machine end correction unit that outputs a machine end correction signal, and decreases an amplitude of vibration at the machine end relative position; and an addition unit that outputs a signal obtained by adding the machine end correction signal to the error suppression signal.

Abstract: To provide a parallel drive system that can reduce vibrations of an arm member and can realize positioning at a high speed even when a slave servomotor does not have a position detector, at a low cost. To achieve this object, a parallel drive system of the invention includes: a master servomotor and a slave servomotor that include linearly-moving movable units that are arranged in parallel to each other, respectively; and an arm member that forms a bridge between the two movable units. The system includes: a position detector detecting position information on the movable unit of the master servomotor; an acceleration sensor detecting acceleration information on the movable unit of the slave servomotor; a master servo amplifier controlling the master servomotor based on the position information; and a slave servo amplifier controlling the slave servomotor based on the position information and the acceleration information.

Abstract: To provide a parallel drive system that can reduce vibrations of an arm member and can realize positioning at a high speed even when a slave servomotor does not have a position detector, at a low cost. To achieve this object, a parallel drive system of the invention includes: a master servomotor and a slave servomotor that include linearly-moving movable units that are arranged in parallel to each other, respectively; and an arm member that forms a bridge between the two movable units. The system includes: a position detector detecting position information on the movable unit of the master servomotor; an acceleration sensor detecting acceleration information on the movable unit of the slave servomotor; a master servo amplifier controlling the master servomotor based on the position information; and a slave servo amplifier controlling the slave servomotor based on the position information and the acceleration information.