Abstract: A leakage flux detector includes a substrate, a sensing layer formed on the substrate for detecting presence or absence of a magnetic force, and two terminal layers formed on the substrate and jointed to the sensing layer.

Abstract: A plane magnetic sensor or a plane magnetic sensor for a multidimensional magnetic field analysis which can measure a magnetic field ever a wide area in a short time is provided. A plane magnetic sensor 10 according to the present invention comprises a sensing layer 11 made of a magnetoresistance effect film formed in a planar state with an arbitrary size, to pass a current therethrough due to a tunneling effect only when voltage reaches or exceeds a predetermined value, and to change its resistance value to show a giant magnetoresistance effect when directions of magnetization of magnetic fine particles change according to the strength of a magnetic field, and conductor layers 12, 13 laminated on respective surfaces of the magnetoresistance effect film and are made of a plurality of line conductor films 12a, 13a formed in linear shapes along directions of the respective surfaces with predetermined intervals therebetween.

Abstract: A plane magnetic sensor or a plane magnetic sensor for a multidimensional magnetic field analysis which can measure a magnetic field ever a wide area in a short time is provided. A plane magnetic sensor 10 according to the present invention comprises a sensing layer 1 made of a magnetoresistance effect film formed in a planar state with an arbitrary size, to pass a current therethrough due to a tunneling effect only when voltage reaches or exceeds a predetermined value, and to change its resistance value to show a giant magnetoresistance effect when directions of magnetization of magnetic fine particles change according to the strength of a magnetic field, and conductor layers 12, 13 laminated on respective surfaces of the magnetoresistance effect film and are made of a plurality of line conductor films 12a, 13a formed in linear shapes along directions of the respective surfaces with predetermined intervals therebetween.

Abstract: A clean room arrangement comprises a clean room having an upper portion and a lower portion. Clean air is introduced into the upper portion of the clean room, flows downward and expelled from the lower portion of the clean room. An air recirculation passage is connected to the clean room such that the lower portion of the clean room is communicated with the upper portion of the clean room. A heat source is provided in the air recirculation passage to generate an ascending flow of air in the air recirculation passage so that the air descends in the clean room due to natural convection.