Abstract: A surface acoustic wave device includes: a quartz substrate; and at least a single-type IDT electrode provided on a surface of the quartz substrate for exciting a Rayleigh surface acoustic wave in the upper limit mode of the surface acoustic wave stop band with the following relationships satisfied; ?=0°, 110°???140°, and 38°?|?|?44°, when the quartz substrate cut angles and the surface acoustic wave propagation direction are represented by Euler angles (?, ?, ?), and wherein the electrode thickness relative to wavelength set such that H/??0.1796?3?0.4303?2+0.2071?+0.0682, with the thickness of the IDT electrode defined as H, the width of an electrode IDT finger defined as d, the pitch between the electrode fingers of the IDT electrode as P, the wavelength of the surface acoustic wave as ?, and where ?=d/P.

Abstract: The embodiments of the present invention provide methods and systems for simulating a SAW and/or an LSAW device, while taking into account the temperature and residual stress of the device into consideration. The simulation involves transforming an equation of variational principle of elasticity into an equation of variational total potential energy with combined effects of temperature and residual stress. The transformation considers frequency-temperature relation and the effect of initial deformation caused by residual stress. The equation of variational total potential energy is then transformed into a finite element equation by considering the periodic constraints of the SAW or LSAW device. Afterwards, the finite element equation is solved to obtain eigen values and frequencies of the SAW or LSAW device.

Abstract: A surface acoustic wave device includes: a quartz substrate; and at least a single-type IDT electrode provided on a surface of the quartz substrate for exciting a Rayleigh surface acoustic wave in the upper limit mode of the surface acoustic wave stop band with the following relationships satisfied; ?=0, 110°???140°, and 38°?|?|?44°, when the quartz substrate cut angles and the surface acoustic wave propagation direction are represented by Euler angles (?, ?, ?), and wherein the electrode thickness relative to wavelength set such that H/??0.1796?3?0.4303?2+0.2071?+0.0682, with the thickness of the IDT electrode defined as H, the width of an electrode IDT finger defined as d, the pitch between the electrode fingers of the IDT electrode as P, the wavelength of the surface acoustic wave as ?, and where ?=d/P.

Abstract: An angular velocity sensor includes a protrusion protruding in a Y?-axis direction and extending in an X-axis direction on a main surface of a rotated Y cut quartz plate, and an excitation electrode and a detection electrode formed on the main surface adjacent to this protrusion. This excitation electrode excites thickness-shear vibration in the X-axis direction on the quartz substrate, exiting vibration on the protrusion. Then, the protrusion is bent and displaced due to Coriolis force acting in a direction orthogonal to the vibration of the protrusion corresponding to a rotation around an Y? axis. This displacement at the protrusion is applied to the quartz substrate as stress. The detection electrode detects change of this stress, thereby angular speed added to the angular velocity sensor is detected.

Abstract: An angular velocity sensor includes a protrusion protruding in a Y?-axis direction and extending in an X-axis direction on a main surface of a rotated Y cut quartz plate, and an excitation electrode and a detection electrode formed on the main surface adjacent to this protrusion. This excitation electrode excites thickness-shear vibration in the X-axis direction on the quartz substrate, exiting vibration on the protrusion. Then, the protrusion is bent and displaced due to Coriolis force acting in a direction orthogonal to the vibration of the protrusion corresponding to a rotation around an Y? axis. This displacement at the protrusion is applied to the quartz substrate as stress. The detection electrode detects change of this stress, thereby angular speed added to the angular velocity sensor is detected.

Abstract: A surface acoustic wave device includes: a quartz substrate; and at least a single-type IDT electrode provided on a surface of the quartz substrate for exciting a Rayleigh surface acoustic wave in the upper limit mode of the surface acoustic wave stop band with the following relationships satisfied; ?=0, 110°???140°, and 38°?|?|?44°, when the quartz substrate cut angles and the surface acoustic wave propagation direction are represented by Euler angles (?, ?, ?), and wherein the electrode thickness relative to wavelength set such that H/??0.1796?3?0.4303?2+0.2071?+0.0682, with the thickness of the IDT electrode defined as H, the width of an electrode IDT finger defined as d, the pitch between the electrode fingers of the IDT electrode as P, the wavelength of the surface acoustic wave as ?, and where ?=d/P.

Abstract: To provide a transducer that can detect the rotation of the transducer with high degree of accuracy, a transducer includes a pair of oscillating reeds extending in the Y-direction to generate a first oscillation to generate a Coriolis force corresponding to the rotation of the transducer, a beam extending in the X-direction and connected to the pair of oscillating reeds, a first detecting unit provided on the beam to detect deformation of the beam due to a second oscillation of the pair of oscillating reeds caused by the Coriolis force, a base member to support the beam, a first connecting device to connect one end of the beam and the base member, and a second connecting device to connect the other end of the beam and the base member.

Abstract: A surface acoustic wave device including at least an interdigital transducer electrode that excites a Rayleigh surface acoustic wave on a surface of a crystal substrate and giving excitation in an upper limit mode of a stopband of the surface acoustic wave, wherein Euler angle representation (?, ?, ?) showing a cut angle and surface acoustic wave propagation direction of the crystal substrate is set as (0°, 0°???180°, 0°<|?|<90°).

Abstract: The invention miniaturizes a surface acoustic wave device on which a plurality of surface acoustic wave elements are disposed and connected together in parallel on a plate, and provides a good temperature characteristic in a wide temperature range. A surface acoustic wave device according to the invention includes a plurality of surface acoustic wave elements disposed on a main surface of a quartz plate cut out with a Euler angle at (0°, 113° to 135°, +/?(40 to 49)°). Surface acoustic waves have propagation directions “?” which are different each other. When the Euler angle is set at (0°, ?, ?), it is possible to reduce differences in each propagation direction by setting each propagation angle so as to satisfy a formula: ?=0.3295?+3.3318°+/?1.125°. This makes it possible to decrease the angle among the surface acoustic wave elements, and thereby miniaturizes the surface acoustic wave elements.

Abstract: Exemplary embodiments provide a tuning-fork-type vibrating reed having satisfactory frequency-temperature characteristics in a broad temperature range, i.e. a tuning-fork-type vibrating reed exhibiting small changes in frequency over a broad temperature range is provided. The tuning-fork-type vibrating reed according to exemplary embodiments of the present invention includes a GaPO4 piezoelectric material and a pair of arms having the thickness in Z?-axis direction, the width in X-axis direction, and the length in Y?-axis direction. The X-axis, the Y?-axis, and the Z?-axis are defined by rotating around the X-axis among the crystal X-axis, Y-axis, and Z-axis of the GaPO4 by an angle between 7.7 degrees and 11.3 degrees measured clockwise as viewed from the origin looking in the positive X-axis direction.

Abstract: To provide a transducer that can detect the rotation of the transducer with high degree of accuracy, a transducer includes a pair of oscillating reeds extending in the Y-direction to generate a first oscillation to generate a Coriolis force corresponding to the rotation of the transducer, a beam extending in the X-direction and connected to the pair of oscillating reeds, a first detecting unit provided on the beam to detect deformation of the beam due to a second oscillation of the pair of oscillating reeds caused by the Coriolis force, a base member to support the beam, a first connecting device to connect one end of the beam and the base member, and a second connecting device to connect the other end of the beam and the base member.

Abstract: To provide a vibratory gyroscope capable of detecting a change in posture with high accuracy without causing leaking of vibrations of vibrating bars via supporting units, a vibrator includes first to fourth vibrating bars extending parallel to each other substantially in the same plane, a bar-shaped beam extending substantially perpendicular to the four vibrating bars in the same plane and connected to the vibrating bars, bar-shaped supporting units to support the beam, driving units arranged in the third and fourth vibrating bars, and a detecting unit arranged the first vibrating bar.

Abstract: The invention provides an in-plane rotational ST-cut SAW resonator that is formed of an in-plane rotational ST-cut crystal plate having Eulerian angles of (0°, 113° to 135°, and ±(40° to 49°)). The in-plane rotational ST-cut SAW resonator can include an interdigital transducer (IDT) electrode for exciting a Rayleigh wave on the main surface. The ratio Lt/Pt of the electrode width Lt and the interelectrode pitch Pt of the IDT electrode is 0.5 or more and 0.65 or less. Accordingly, a reduction in the fluctuation in resonance frequency relative to the variations in an IDT electrode of a surface acoustic wave device by using the in-plane rotated ST-cut crystal plate around the Z?-axis can be achieved.

Abstract: The invention provides a method for adjusting the temperature-dependent property of a surface acoustic wave device is provided,, The method is appropriate for a temperature-dependent property that is expressed by a cubic function of a surface acoustic wave device using an in-plane rotated ST cut quartz crystal plate. The invention therefore provides a method for adjusting the temperature-dependent property of a surface acoustic wave device using an in-plane rotated ST cut quartz crystal plate having Euler angles of (0°, 113-135°, ±(40-49°)). The range of Euler angles is defined so that the temperature-dependent property of the surface acoustic wave device, using an in-plane rotated ST cut quartz crystal plate having the temperature-dependent property expressed by a cubic function, has an extreme value within the temperature range of −40 to +85° C.

Abstract: The invention provides a surface acoustic wave device which uses an in-plane rotated ST cut quartz crystal plate around the Z′-axis, and which has a large reflection coefficient of the Rayleigh wave. Comb teeth-like IDT electrodes are provided and reflectors to trap the Rayleigh wave are provided on both sides of the IDT electrodes on the principal surface of the in-plane rotated ST cut quartz crystal plate. The electrode width and pitch at the IDT electrodes are defined as Lt, Pt, the width and pitch of short-circuit electrodes at the reflectors as Lr, Pr, and the thickness of the IDT electrodes and the short-circuit electrodes side as Ht and Hr. If the electrode widths and pitches are set up so that either or both of Lt/Pt and Lr/Pr become 0.32±0.1, this enables maximizing the reflection coefficient and achieving the miniaturization of device itself by reducing the number of the short-circuit electrodes.

Abstract: The invention miniaturizes a surface acoustic wave device on which a plurality of surface acoustic wave elements are disposed and connected together in parallel on a plate, and provides a good temperature characteristic in a wide temperature range. A surface acoustic wave device according to the invention includes a plurality of surface acoustic wave elements disposed on a main surface of a quartz plate cut out with a Euler angle at (0°, 113° to 135°, +/−(40 to 49)°). Surface acoustic waves have propagation directions “&psgr;” which are different each other. When the Euler angle is set at (0°, &thgr;, &psgr;), it is possible to reduce differences in each propagation direction by setting each propagation angle so as to satisfy a formula: &psgr;=0.3295&thgr;+3.3318°+/−1.125°. This makes it possible to decrease the angle among the surface acoustic wave elements, and thereby miniaturizes the surface acoustic wave elements.

Abstract: The invention provides an in-plane rotational ST-cut SAW resonator that is formed of an in-plane rotational ST-cut crystal plate having Eulerian angles of (0°, 113° to 135°, and ±(40° to 49°)). The in-plane rotational ST-cut SAW resonator can include an interdigital transducer (IDT) electrode for exciting a Rayleigh wave on the main surface. The ratio Lt/Pt of the electrode width Lt and the interelectrode pitch Pt of the IDT electrode is 0.5 or more and 0.65 or less. Accordingly, a reduction in the fluctuation in resonance frequency relative to the variations in an IDT electrode of a surface acoustic wave device by using the in-plane rotated ST-cut crystal plate around the Z′-axis can be achieved.

Abstract: The invention provides a method for adjusting the temperature-dependent property of a surface acoustic wave device is provided. The method is appropriate for a temperature-dependent property that is expressed by a cubic function of a surface acoustic wave device using an in-plane rotated ST cut quartz crystal plate. The invention therefore provides a method for adjusting the temperature-dependent property of a surface acoustic wave device using an in-plane rotated ST cut quartz crystal plate having Euler angles of (0°, 113-135°, ±(40-49°)). The range of Euler angles is defined so that the temperature-dependent property of the surface acoustic wave device, using an in-plane rotated ST cut quartz crystal plate having the temperature-dependent property expressed by a cubic function, has an extreme value within the temperature range of −40 to +85° C.

Abstract: The invention provides a surface acoustic wave device which uses an in-plane rotated ST cut quartz crystal plate around the Z′-axis, and which has a large reflection coefficient of the Rayleigh wave. Comb teeth-like IDT electrodes are provided and reflectors to trap the Rayleigh wave are provided on both sides of the IDT electrodes on the principal surface of the in-plane rotated ST cut quartz crystal plate. The electrode width and pitch at the IDT electrodes are defined as Lt, Pt, the width and pitch of short-circuit electrodes at the reflectors as Lr, Pr, and the thickness of the IDT electrodes and the short-circuit electrodes side as Ht and Hr. If the electrode widths and pitches are set up so that either or both of Lt/Pt and Lr/Pr become 0.32±0.1, this enables maximizing the reflection coefficient and achieving the miniaturization of device itself by reducing the number of the short-circuit electrodes.

Abstract: A high-precision surface acoustic wave (SAW) device improves the frequency-temperature characteristics of a conventional surface acoustic wave device several-fold. In this high-precision surface acoustic wave device, two one-port SAW resonators, or two two-port SAW resonators, alternatively, two one-port-resonator-type, two-port-resonator-type or transversal-type filters are placed in parallel with each other. Further, these resonators or filters are excited and are elastically coupled to each other in such a way as to be in an oblique symmetry mode. Moreover, the frequency-temperature characteristics of the two elements are made to differ from each other. Furthermore, a flat frequency-temperature characteristic, which cannot be realized by a single element, is realized by being synthesized from the frequency-temperature characteristics of the two elements.