Patents by Inventor Shigeo Sakino
Shigeo Sakino has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7771065Abstract: An optical unit including a plate, an optical element, a fixing device for partially fixing the optical element against the plate, and a deforming device, located between the plate and the optical element, for applying a deforming force to the optical element to change a surface shape of the optical element. The deforming device includes poles for contacting a back face of the optical element, and actuators for driving the poles against the plate.Type: GrantFiled: April 12, 2006Date of Patent: August 10, 2010Assignee: Canon Kabushiki KaishaInventors: Choshoku Sai, Shigeo Sakino, Katsumi Asada, Hirohito Ito, Shinji Uchida
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Patent number: 7535552Abstract: A moving apparatus including a first movable body which moves in a first direction in a horizontal plane, a second movable body arranged in a location different from a location of the first movable body in a vertical direction, which moves in a second direction intersecting with the first direction in the horizontal plane, a first linear motor which moves the first movable body in the first direction, a second linear motor which moves the second movable body in the second direction, a third movable body which is moved in the first direction and is moved in the second direction, a vacuum container which puts the first, second and third movable bodies in a vacuum, driving force transmission rods, and a sealing mechanism for sealing the driving force transmission rods and the vacuum container.Type: GrantFiled: March 5, 2002Date of Patent: May 19, 2009Assignee: Canon Kabushiki KaishaInventor: Shigeo Sakino
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Patent number: 7453623Abstract: A mirror apparatus including a reflecting mirror reflecting light, partition walls, the walls and the reflecting mirror defining a plurality of air chambers, and a regulator regulating air pressure in at least one of the air chambers. With this configuration, the front surface of the reflecting mirror is deformed into a smooth shape so as to correct optical aberration.Type: GrantFiled: April 21, 2006Date of Patent: November 18, 2008Assignee: Canon Kabushiki KaishaInventors: Shinji Uchida, Choshoku Sai, Katsumi Asada, Hirohito Ito, Shigeo Sakino
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Patent number: 7443619Abstract: At least one exemplary embodiment is directed to an optical element holding apparatus including a force generating actuator configured to deform the optical element, a measuring device configured to measure a position of the optical element, and a displacement causing actuator configured to position the optical element based on the measured position.Type: GrantFiled: September 19, 2006Date of Patent: October 28, 2008Assignee: Canon Kabushiki KaishaInventors: Shigeo Sakino, Hirohito Ito, Shinji Uchida, Choshoku Sai, Katsumi Asada
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Publication number: 20070076310Abstract: At least one exemplary embodiment is directed to an optical element holding apparatus including a force generating actuator configured to deform the optical element, a measuring device configured to measure a position of the optical element, and a displacement causing actuator configured to position the optical element based on the measured position.Type: ApplicationFiled: September 19, 2006Publication date: April 5, 2007Applicant: Canon Kabushiki KaishaInventors: Shigeo Sakino, Hirohito Ito, Shinji Uchida, Choshoku Sai, Katsumi Asada
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Publication number: 20060245035Abstract: A mirror apparatus including a reflecting mirror reflecting light, partition walls, the walls and the reflecting mirror defining a plurality of air chambers, and a regulator regulating air pressure in at least one of the air chambers. With this configuration, the front surface of the reflecting mirror is deformed into a smooth shape so as to correct optical aberration.Type: ApplicationFiled: April 21, 2006Publication date: November 2, 2006Applicant: Canon Kabushiki KaishaInventors: Shinji Uchida, Choshoku Sai, Katsumi Asada, Hirohito Ito, Shigeo Sakino
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Publication number: 20060232866Abstract: An optical unit includes a plate having a fixed position, an optical element having a specific optical action, a fixing device for partially fixing the optical element, and a deforming device, located between the plate and the optical element, for applying a deforming force to the optical element to asymmetrically change a surface shape of the optical element.Type: ApplicationFiled: April 12, 2006Publication date: October 19, 2006Applicant: CANON KABUSHIKI KAISHAInventors: Choshoku Sai, Shigeo Sakino, Katsumi Asada, Hirohito Ito, Shinji Uchida
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Publication number: 20050002012Abstract: Using a conductive material having volume resistance of approximately 1E?3 ?·cm or above for a movable guide 3 axially supported by a static pressure bearing 10 makes it possible to sufficiently reduce deflection of beams caused by eddy current generated due to a leaked magnetic field from an electron lens of an electron beam exposure apparatus or deflection of beams due to the influences from increased charge by secondary electrons.Type: ApplicationFiled: May 14, 2004Publication date: January 6, 2005Applicants: Canon Kabushiki Kaisha, Hitachi High-Technologies CorporationInventors: Shigeo Sakino, Yoshimasa Fukushima
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Patent number: 6644855Abstract: A stage device includes a table having a reference plane parallel to first and second directions; a driving body movable along the first direction; a moving body movable along the second direction with respect to the driving body; a static pressure bearing provided on the moving body; an exhaust groove provided surrounding the static pressure bearing; and a mechanism for delivering a gas of the static pressure bearing recovered by the exhaust groove between the moving body and the driving body. The adverse affects of piping on the moving body can be reduced and it is possible to position the moving body with high precision.Type: GrantFiled: February 12, 2002Date of Patent: November 11, 2003Assignee: Canon Kabushiki KaishaInventors: Shigeo Sakino, Mitsuru Inoue, Tadayuki Kubo
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Publication number: 20020128733Abstract: A moving/guiding apparatus has X- and Y-direction movable bodies guided and moved in intersecting directions, arranged at vertically different positions, and restrained in a vertical direction, respectively, and an X-Y movable body guided vertically on a surface plate (11) and movable in moving directions of the X- and Y-direction movable bodies. A vacuum container is provided for accommodating these movable bodies. Actuators for driving the X-direction movable body (41) and Y-direction movable body (42) in the intersecting directions are set outside the vacuum container. The movable body (3) is driven in two intersecting directions upon reception of forces from guide surfaces in a horizontal direction of the movable bodies (41, 42).Type: ApplicationFiled: March 5, 2002Publication date: September 12, 2002Applicant: Canon Kabushiki KaishaInventor: Shigeo Sakino
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Publication number: 20020118897Abstract: A stage device includes a table having a reference plane parallel to first and second directions; a driving body movable along the first direction; a moving body movable along the second direction with respect to the driving body; a static pressure bearing provided on the moving body; an exhaust groove provided surrounding the static pressure bearing; and a mechanism for delivering a gas of the static pressure bearing recovered by the exhaust groove between the moving body and the driving body. The adverse affects of piping on the moving body can be reduced and it is possible to position the moving body with high precision.Type: ApplicationFiled: February 12, 2002Publication date: August 29, 2002Applicant: Canon Kabushiki KaishaInventors: Shigeo Sakino, Mitsuru Inoue, Tadayuki Kubo
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Patent number: 6244702Abstract: This invention relates to a highly precise and efficient color filter producing apparatus, which is provided with at least a set of drawing heads for respectively generating ink jets of red, green and blue colors, movement means for moving, with a substrate on which a color filter is to be formed by drawing with said ink jets, in a plane having a predetermined distance from the drawing heads, displacement detection means for detecting relative displacement between the substrate and the drawing heads in directions of six freedoms, means for detecting the reaching position on the substrate of the ink jet discharged from the drawing head, and alignment means for effecting alignment between the substrate and the drawing heads in directions of six freedoms, based on the results of detection of the reaching position and of the relative displacement between the substrate and the drawing head in directions of six freedoms.Type: GrantFiled: September 13, 1999Date of Patent: June 12, 2001Assignee: Canon Kabushiki KaishiInventors: Shigeo Sakino, Kazuaki Masuda, Shinsuke Tsuruoka, Toshikazu Sakai
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Patent number: 5984470Abstract: This invention relates to a highly precise and efficient color filter producing apparatus, which is provided with at least a set of drawing heads for respectively generating ink jets of red, green and blue colors, movement device for moving, with a substrate on which a color filter is to be formed by drawing with said ink jets, in a plane having a predetermined distance from the drawing heads, displacement detection device for detecting relative displacement between the substrate and the drawing heads in directions of six degrees of freedom, device for detecting the reaching position on the substrate of the ink jet discharged from the drawing head, and alignment device for effecting alignment between the substrate and the drawing heads in directions of six degrees of freedom, based on the results of detection of the reaching position and of the relative displacement between the substrate and the drawing head in directions of six degrees of freedom.Type: GrantFiled: April 18, 1996Date of Patent: November 16, 1999Assignee: Canon Kabushiki KaishaInventors: Shigeo Sakino, Kazuaki Masuda, Shinsuke Tsuruoka, Toshikazu Sakai
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Patent number: 5228358Abstract: A motion guiding device includes a first movable member movable in a first direction, a second movable member movable in a second direction different from the first direction and for guiding motion of the first movable member in the first direction through a gas pressure, a base for supporting the first and second movable members independently of each other, with respect to a vertical direction through cooperation of a gas pressure. In addition, a guide is fixed to the base for guiding motion of the second movable member in the second direction through cooperation of a gas pressure and a magnetic force of a permanent magnet, a first linear motor moves the first movable member in the first direction, relative to the second movable member, and a second linear motor moves the second movable member with the first movable member in the second direction.Type: GrantFiled: December 16, 1992Date of Patent: July 20, 1993Assignee: Canon Kabushiki KaishaInventors: Shigeo Sakino, Eiji Osanai
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Patent number: 5040431Abstract: In a movement guiding device, two parallel stationary guides are fixed to a surface plate and plural hydrostatic gas or bearing members are provided for the surface plate and the stationary guides. A Y stage is moved in a Y-axis direction under the influence of these bearing members. Additional hydrostatic gas or air bearing members are provided in relation to the surface plate and the Y stage so as to support an X stage for movement in an X-axis direction orthogonal to the Y-axis direction. Guide of the Y stage in the X-axis direction is made by the stationary guides on the surface plate, while guide thereof in a Z-axis direction perpendicular to an X-Y plane is made by the surface plate. Guide of the X stage in the Y-axis direction is made by the Y stage, while the guide thereof in the Z-axis direction is made by the surface plate, similar to the Y stage. With such structure, any vibration, rolling, or otherwise, of the Y stage is not transmitted to the X stage. Thus, high-precision guide is attainable.Type: GrantFiled: January 23, 1989Date of Patent: August 20, 1991Assignee: Canon Kabushiki KaishaInventors: Shigeo Sakino, Eiji Osanai, Mahito Negishi, Michio Horikoshi, Mitsuru Inoue, Kazuya Ono
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Patent number: 4744675Abstract: A moving mechanism for relatively moving first and second members, the mechanism comprising a first fluid discharging portion provided on the first member, for relatively supporting the second member by use of a static pressure, and a second fluid discharging portion operable to produce a static pressure that is effective to apply, to the first member, a force contributable to prevent any deformation of the first member due to the static pressure caused by the first fluid discharging portion.Type: GrantFiled: January 16, 1987Date of Patent: May 17, 1988Assignee: Canon Kabushiki KaishaInventors: Shigeo Sakino, Mahito Negishi, Koichi Matsushita, Michio Horikoshi, Makoto Higomura