Abstract: A pachinko ball sensing apparatus which can detect pachinko balls on a base board, and can accurately detect and count propelled pachinko balls is provided. The pachinko ball sensing apparatus comprises a propelled ball point storage medium for storing a plurality of detection positions along a propelled ball guide rail on the base board as propelled ball points, a propelled ball counter (300) for storing the number of propelled pachinko balls, and a processor (30) which reads sense data for the propelled ball points stored on the propelled ball point storage medium after a lapse of a predetermined wait time and when a value of the sense data changes, counts up a value of the propelled ball counter.

Abstract: A metal substance detection system which comprises a matrix sensor (20) having a group of transmission lines (22) and a group of reception lines (26) and a signal processing system (170) which drives the matrix sensor for detecting the presence and position of a metal substance. The signal processing system scans the transmission line group and the reception line group; it sends a signal current to the former and receives a reception signal from the latter for detecting the presence and position of a metal substance based on the reception signal. If some lines of either the transmission line group or the reception line group are prespecified as unscanned lines, the signal processing system skips the lines of the corresponding line group specified as the unscanned lines.

Abstract: A metal body detecting device having a sensing matrix (20) and a signal processing system (170) for driving the sensing matrix. The sensing matrix comprises a plurality of transmission lines (22) and a plurality of reception lines (26) arranged in rows and column respectively, and a wiring board (17) for supporting these lines. Each of the transmission lines and reception lines consists of a pair of lead wires formed of an outward path and a return path being in parallel each other. The pair of lead wires is connected at one end, and are used, at the other end, as an input and an output end of a signal. The wiring board includes a transmission terminal unit (23) and a reception terminal unit (27) and an area on which the transmission lines and the reception lines are wired.

Abstract: A sensor of the invention has a plurality of transmission lines (22) being energized for generating a magnetic field, a board for supporting the transmission lines (22), a plurality of reception lines (26) being electro-magnetically coupled with the transmission lines (22) for detecting a magnetic flux change made by the approach of the metal object, and a board for supporting the reception lines (26). The transmission lines (22) and the reception lines (26) are made of conductive thin films formed on their respective boards having sending and returning paths. The transmission lines (22) and the reception lines (26) are laid out in a direction to cross each other with the boards between.

Abstract: A metal object detection system comprising a matrix sensor having sensing units arranged like a matrix and a signal processing system for driving the matrix sensor for detecting a metal object. The signal processing system comprises circuitry for driving the matrix sensor and inputting a reception signal from the sensor, a plurality of peripheral detection points surrounding a main detection point, and circuitry which, when a metal object detection response is made at the main detection point by a sensing unit contained in the monitor frame, compares the response with a response of each of other peripheral detection points in the frame. When, the response of the main detection point is the largest, the circuitry determines that a metal object exists at the main detection point.

Abstract: An article control system has an article stand on which articles on which articles are placed. An article monitor apparatus monitors the entry and exit of articles to and from the article stand. The monitor apparatus includes a planar matrix sensor for detecting the article and a signal processing system for both driving the matrix sensor and detecting the articles placed on the matrix sensor. The matrix sensor is disposed on the upper surface of the article stand. The article stand preferably includes an article placing stand on which the articles are placed and an article confirmation stand on which articles taken from the article placing stand are temporarily placed for confirmation.

Abstract: The present invention consists of an apparatus comprising a signal sending line which has a folded-back shape, and which serves to send a current for generating a magnetic field; and a signal receiving line which has a folded-back shape, which is arranged at a position permitting it to be electromagnetically coupled with the signal sending line, and which serves to detect a magnetic flux change caused by the approach of metal. The plurality of signal sending lines are arranged coplanarly, while the plurality of signal receiving lines are arranged coplanarly. The signal sending lines and the signal receiving lines are arranged with their planes held in parallel and in directions intersecting to each other, thereby constructing a sensing matrix. The sensing matrix is arranged in opposition to a panel along which a metal body to be detected moves, while holding therebetween a space which is, at least, large enough to pass the metal body.

Abstract: The present invention consists of an apparatus comprising signal sending lines, each of which has a folded-back shape and serves to send a current for generating a magnetic field, and signal receiving lines, each of which has a folded-back shape, and which are arranged at a position permitting them to be electromagnetically coupled with the signal sending lines thus serving to detect a magnetic flux change caused by the approach of metal. The plurality of signal sending lines are arranged coplanarly, while the plurality of signal receiving lines are arranged coplanarly. The signal sending lines and the signal receiving lines are arranged with their planes held in parallel and in directions intersecting to each other, thereby constructing a sensing matrix. This sensing matrix is arranged in opposition to a panel along which a metal body to be detected moves, while holding there-between a space which is, at least, large enough to pass the metal body.

Abstract: The present invention comprises a sensing matrix (20) comprised of matrix-arranged sensing units for sensing an object, a driving means (40, 50, 63) which drives the sensing matrix (20) and receives a signal showing a state of each sensing unit, and a detecting means (30) which detects location of the object on the sensing matrix (20) on the basis of the signal received by said driving means. The detecting means (30) includes an offset means (30a) which sequentially updates and memorizes a value of the received signal as an offset value at every sensing unit, an operation means (30b) which operates a change in values between a value of a newly received signal and the offset value before updating, and a comparing means (30c) for comparing the change in values between the two with the set value which is set beforehand for detecting the presence of the object.

Abstract: An ashing apparatus of the vertical type comprises a reaction tube erected in the vertical direction to house therein a plurality of semiconductor wafers, an inner tube arranged in the reaction tube to enclose the semiconductor wafers and having a plurality of holes through which activated radicals in plasma can be selectively passed, a reaction gas supply pipe for supplying reaction gases into a space between the reaction tube and the inner tube, and plasma generating electrode unit located outside the reactor tube to generate plasma of the reaction gases only in the space between the reaction tube and the inner tube.