Abstract: A sample holder HL capable of efficiently applying a pressure to an observation surface of a sample SAM is provided. The sample holder HL includes a fixed electrode 4b, a movable electrode 5, and a pressure applying member 6 attached to the movable electrode 5 and having a function to move the movable electrode 5 in a horizontal direction. When the sample SAM is held between a side surface of the fixed electrode 4b and a side surface of the movable electrode 5, an upper surface of the sample SAM is located within a range of a width of the pressure applying member 6 at a position where the pressure applying member 6 is in contact with the movable electrode 5 in the Z direction.

Abstract: There is provided a technology for imparting attenuation while maintaining rigidity of a support member that reduces vibration of a sample stage when disturbance such as an environmental sound is applied to a device and vibrates the sample stage. A charged particle beam device according to the present disclosure includes a sample stage that can move a sample, an attenuation unit that attenuates vibration of the sample stage, and a sample chamber that stores the sample stage and the attenuation unit. In the charged particle beam device, the sample stage and the attenuation unit are disposed so as to be horizontal to each other. Also, the sample stage is configured to be supported so as to be sandwiched between the attenuation unit and a first side surface of a casing, and the inside of the casing of the attenuation unit is filled with a plural number of friction bodies.

Abstract: In order to provide a sample holder capable of easily searching for an observation field of view, the sample holder includes a sample placement portion including a first top surface on which a counterbore part is formed and a rotational axis for rotating the first top surface horizontally, the counterbore part being aligned by being mounted with a sample supporting member having a pattern for alignment, a sample base portion including an opening through which the sample placement portion is capable of moving vertically and a second top surface around the opening, and a sample cover portion which has conductivity and is pressed down toward a direction of the second top surface of the sample base portion, so that a top surface of the sample supporting member placed on the sample placement portion and the second top surface of the sample base portion are flush with each other.

Abstract: In order to provide a sample holder capable of easily searching for an observation field of view, the sample holder includes a sample placement portion including a first top surface on which a counterbore part is formed and a rotational axis for rotating the first top surface horizontally, the counterbore part being aligned by being mounted with a sample supporting member having a pattern for alignment, a sample base portion including an opening through which the sample placement portion is capable of moving vertically and a second top surface around the opening, and a sample cover portion which has conductivity and is pressed down toward a direction of the second top surface of the sample base portion, so that a top surface of the sample supporting member placed on the sample placement portion and the second top surface of the sample base portion are flush with each other.

Abstract: In order to provide a stage apparatus with high speed stability in addition to being able to achieve positioning with a high degree of accuracy, and a sample observation apparatus, such as an optical microscope and a scanning electron microscope, including the stage apparatus, the stage apparatus and the sample observation apparatus of the present invention correct a command voltage value of standard waveform data or an output timing of a command voltage value such that a difference between a first time history response and a second time history response is reduced to zero, the first time history response for displacement or speed when the stage mechanism is driven with use of the standard waveform data showing the command voltage value at each predetermined time and the second time history response for displacement or speed when a speed of the stage mechanism is constant, to be set as drive waveform data to be outputted to a drive unit of the stage mechanism.

Abstract: In order to provide a stage apparatus with high speed stability in addition to being able to achieve positioning with a high degree of accuracy, and a sample observation apparatus, such as an optical microscope and a scanning electron microscope, including the stage apparatus, the stage apparatus and the sample observation apparatus of the present invention correct a command voltage value of standard waveform data or an output timing of a command voltage value such that a difference between a first time history response and a second time history response is reduced to zero, the first time history response for displacement or speed when the stage mechanism is driven with use of the standard waveform data showing the command voltage value at each predetermined time and the second time history response for displacement or speed when a speed of the stage mechanism is constant, to be set as drive waveform data to be outputted to a drive unit of the stage mechanism.

Abstract: This invention stabilizes positioning and provides improved positioning accuracy in a scanning electron microscope provided with stage-driving means utilizing an effect of rolling friction. In this scanning electron microscope that includes a sample stage equipped with an x-table, a y-table, a z-table, a rotation table, and a tilting table, and moved by means of stepping motors each connected to a ball screw via a coupling, a sliding friction element is disposed at a position close to the ball screw, between the x-table and the y-table and between a tilting base and the x-table.

Abstract: In the present invention, a stage device is configured to: provide a marker on a specimen, a specimen holder or a rotary table that allows measurement of position and direction; perform a rotation and translation movement of a stage according to a predetermined operation pattern; measure the position and direction of the marker there; identify the rotation center position of the rotary table from the results of this measurement; further create a correction value table relative to a rotation angle by calculating rotation-angle correction value for correcting the rotation error, and translation correction value for correcting a positional variation of the rotation center position; obtain from the correction value table the correction values associated with either an inputted rotation-angle command value or an actual rotation angle; and control the stage device by correcting either the rotation-angle and translation-position command values inputted or a rotation-angle and translation-position detected.

Abstract: In the present invention, a stage device is configured to: provide a marker on a specimen, a specimen holder or a rotary table that allows measurement of position and direction; perform a rotation and translation movement of a stage according to a predetermined operation pattern; measure the position and direction of the marker there; identify the rotation center position of the rotary table from the results of this measurement; further create a correction value table relative to a rotation angle by calculating rotation-angle correction value for correcting the rotation error, and translation correction value for correcting a positional variation of the rotation center position; obtain from the correction value table the correction values associated with either an inputted rotation-angle command value or an actual rotation angle; and control the stage device by correcting either the rotation-angle and translation-position command values inputted or a rotation-angle and translation-position detected.

Abstract: A stage comprises a linear guide rail (2) for guiding a movable table (4), a driven bar (12), a linear drive actuator in contact with the driven bar (12) to transmit driving force to the driven bar (12), and parallel plate springs (30) for holding opposite ends of the driven bar (12). A drive transmitting surface of the linear drive actuator is provided so as to be separated from the movable table (4), and this prevents the accuracy of positioning from being reduced. Also, the parallel springs (30) reduce deforming forces applied to sections supporting the driven bar (12), and this prevents the driven bar from being damaged. The configuration makes the stage highly accurate and highly reliable.

Abstract: Fluctuation in speed when a stage with a sample mounted thereon is moved at low speed is reduced such that an image to be observed is moved at constant speed when performing high-magnification observation using a scanning electron microscope. A control amount is obtained by compensation means from the deviation between position information obtained from position information detected by position detection means through a first low-pass filter and a command value obtained by integrating a speed command value input from stage operation input means and through a second low-pass filter having the same frequency characteristic as the first low-pass filter, and a driving signal to be output to driving means is generated from the added value of the control amount and the speed command value by waveform output means.

Abstract: Sample drift in a scanning electron microscope is suppressed which is caused by a change in room temperature or associated with operation of motors for driving a sample stage. Supply currents to the motors during movement of the sample and a stop of the sample movement are controlled so that the supply currents have the same level or so that a maximum difference in level between the supply currents is 20%. This lessens any changes in the amounts of heat generated by the motors, thereby reducing sample drift during observation.

Abstract: This invention stabilizes positioning and provides improved positioning accuracy in a scanning electron microscope provided with stage-driving means utilizing an effect of rolling friction. In this scanning electron microscope that includes a sample stage equipped with an x-table, a y-table, a z-table, a rotation table, and a tilting table, and moved by means of stepping motors each connected to a ball screw via a coupling, a sliding friction element is disposed at a position close to the ball screw, between the x-table and the y-table and between a tilting base and the x-table.

Abstract: A stage comprises a linear guide rail (2) for guiding a movable table (4), a driven bar (12), a linear drive actuator in contact with the driven bar (12) to transmit driving force to the driven bar (12), and parallel plate springs (30) for holding opposite ends of the driven bar (12). A drive transmitting surface of the linear drive actuator is provided so as to be separated from the movable table (4), and this prevents the accuracy of positioning from being reduced. Also, the parallel springs (30) reduce deforming forces applied to sections supporting the driven bar (12), and this prevents the driven bar from being damaged. The configuration makes the stage highly accurate and highly reliable.

Abstract: A semiconductor light-emitting material includes a semiconductor substance including a matrix semiconductor whose constituent atoms are bonded to form a tetrahedral structure, an impurity atom S substituted for an atom in a lattice site of the matrix semiconductor, and an impurity atom I inserted in a interstitial site of the matrix semiconductor, the impurity atom S and the impurity atom I being bonded through charge transfer therebetween in a state that the impurity atom S has an electric charge coincident with that of the constituent atom of the matrix semiconductor and the impurity atom I has an electron configuration of a closed shell structure, in which the semiconductor substance is stretched in a direction of a bond forming the tetrahedral structure.

Abstract: A magneto-resistance effect element can obtain a high output and makes it possible to stabilize magnetization in a magnetization free layer therein even if a sense current is caused to flow. The magneto-resistance effect element is provided with a magnetization free layer whose magnetization direction is variable, a magnetization pinned layer whose magnetization direction is pinned, and an intermediate layer provided between the magnetization free layer and the magnetization pinned layer, where when no external magnetic field is present and no current flows, the magnetization direction in the magnetization free layer is anti-parallel to the magnetization direction pinned in the magnetization pinned layer, an easy axis of magnetization in the magnetization free layer is parallel to the magnetization direction pinned in the magnetization pinned layer, and a sense current flows from the magnetization free layer to the magnetization pinned layer.

Abstract: A magnetic element includes a channel layer, a first magnetic electrode which is in contact with the channel layer, a second magnetic electrode which is in contact with the channel layer and is insulated from the first magnetic electrode, a first intermediate layer which is provided adjacent to the first magnetic electrode and has a first insulating layer, a first magnetic layer which is provided in contact with a surface of the first intermediate layer on an opposite side to a surface contacting the first magnetic electrode to transfer magnetization to the first magnetic electrode, a first electrode which is connected to the first magnetic electrode, and a second electrode which is connected to the second magnetic electrode, at least one of the first electrode and the second electrode outputting a first signal which changes depending on a magnetic arrangement of the first magnetic electrode and the second magnetic electrode.

Abstract: A magneto-resistive element comprising a free layer having two ferromagnetic layers having a nonmagnetic layer interposed therebetween are coupled with each other in an anti-ferromagnetic manner, a difference between an absolute value of a total of magnetizations of at least one ferromagnetic layer in which the magnetization direction is a first direction and an absolute value of a total of magnetizations of at least one ferromagnetic layer in which the magnetization direction is a second direction which is opposite to the first direction is equal to or smaller than 5×10?15 emu, and planes parallel to a substrate of the ferromagnetic layers are smaller as the planes are distant from the substrate.

Abstract: A magnetic switching element according to an example of the present invention includes a magnetic element, first and second electrodes which put the magnetic element therebetween, a current control section which is connected to the first and second electrodes, the current control section controlling a magnetization direction of a magnetization free section in such a manner that a current is made to flow between the magnetization free section and the magnetization fixed section, a movable conductive tube having a fixed end and a free end, and a third electrode connected to the fixed end of the conductive tube. A switching operation is performed in such a manner that a spatial position of the conductive tube is caused to change depending on the magnetization direction of the magnetization free section.

Abstract: A light emitting device includes an active layer including atoms A of a matrix semiconductor having a tetrahedral structure, a heteroatom D substituted for the atom A in a lattice site, and a heteroatom Z inserted into an interstitial site positioned closest to the heteroatom D, the heteroatom D having a valence electron number differing by +1 or ?1 from that of the atom A, and the heteroatom Z having an electron configuration of a closed shell structure through charge compensation with the heteroatom D, and an n-electrode and a p-electrode adapted to supply a current to the active layer.