Abstract: Lower members each have a bolt bore comprising a large-diameter portion larger than the head of a bolt in diameter, and a small diameter portion extending downward from the large-diameter portion with a stepped portion formed therebetween and having a diameter intermediate between the diameter of the bolt head and the diameter of the shank of the bolt. The small-diameter portion of the bolt bore has fitted therein a hollow cylindrical spacer with an inside diameter larger than the diameter of the bolt shank. The spacer has a lower end supported by a support member and an upper end positioned in the large-diameter portion. A hollow cylindrical elastic member is interposed between the bolt head and the stepped portion for biasing the lower member toward the support member.

Abstract: In a diaphragm valve designed to seal with a metal diaphragm, corrosion resistance and strength of the diaphragm are improved by forming the diaphragm from a thin alloy sheet containing, by weight, 12.5-14.5% Mo, 20.0-22.5% Cr, 2.0-6% Fe, 2.5-3.5% W, 2.5% or less Co, 0.015% or less C, 0.08% or less Si, 0.50% or less Mn, 0.35% or less V, 0.02% or less P, 0.02% or less S and the remainder Ni. The thin alloy sheet is cold-rolled after annealing to enhance the strength of the diaphragm.

Abstract: A fluid controller 2 comprises a controller main body 6 formed with an inlet channel 42 and an outlet channel 43 each having a downwardly open end, an operating portion 7 provided on the main body 6 and integral therewith for opening and closing the outlet channel 43, and a connector 11 provided beneath the main body 6. The connector 11 has an inlet channel 41 for causing an inlet channel 40 of an inlet pipe joint member 1 to communicate with the inlet channel 42 of the main body 6, and a leftwardly open outlet channel 44 communicating with the outlet channel 43 of the main body 6. The controller main body 6 is fastened to the connector 11 with screws 17. The operating portion 7 can be removed from the connector 11 together with the main body 6.

Abstract: A fluid control apparatus comprises a mass flow controller, two on-off valves disposed at the inlet side of the controller and three on-off valves disposed at the outlet side of the controller. At the inlet side, a main fluid on-off valve is positioned on a purge fluid on-off valve, and at the outlet side, a vent on-off valve is positioned on a vacuum suction on-off valve, with a main passage on-off valve further positioned on the vent on-off valve.

Abstract: A controller comprises a valve body having a valve element and a valve seat defining therebetween a fluid channel openable and closable with reciprocating upward and downward movement of a valve stem, a casing fixed to an upper portion of the valve body, an operating rod provided in an upper inside portion of the casing and movable upward and downward, a drive device for moving the operating rod upward and downward, and a force transmission device provided in a lower inside portion of the casing for transmitting force acting on the operating rod to the valve stem.

Abstract: A controller comprises a valve body having a valve element and a valve seat defining a fluid cannel openable and closable with a reciprocating upward and downward movement of a valve stem, a casing fixed to an upper portion of the valve body, an operating rod provided in an upper inside portion of the casing upwardly and downwardly movably, a drive device for moving the rod upward and downward, and a transmission device provided in a lower inside portion of the casing for transmitting a force acting on the rod to the valve stem.

Abstract: A diaphragm valve is provided with a removable metallic elastic seating ring (7) having a first passage (10) and at least one second passage (11) extending through it. The first passage communicates with an inlet passage (8) of the valve while the second passage communicates with the outflow passage (9). A first surface (7a) of the seating ring is provided with a valve seat (12) against which the diaphragm (6) may be pressed to block fluid flow through the valve. A second surface (7b) of the seating ring has two annular and axially extending projections (15, 16). The first projection (15) contacts a bottom surface (2a) of valve chamber (2) in a region surrounding the opening where the inflow passage joins the valve chamber. The second projection (16) contacts the bottom surface of the valve chamber around the periphery of the valve chamber.

Abstract: In a flow rate control valve having a handle (12) for rotating a stem (9), the handle being locked to a bonnet (3) by a lock screw (14), the handle (12) comprises a handle main body (12') fixed to an upper end of the stem (9), and a tubular lock handle (12") coupled to the lower end of the handle main body (12'). The lock handle is movable in a direction orthogonal to an axial line of elongation Y of the stem 9 relative to the handle main body, with the lock handle enclosing the upper outer circumference of the bonnet (3), and the lock screw (14) being movable in the lock handle (12") in a direction nearly orthogonal to the axial line of elongation Y of the stem (9) to engage the bonnet (3).

Abstract: In a diaphragm type control valve, a slide stem (14) having a coupling screw part (14a) is elevatably but non-rotatably inserted into a bonnet (11) having a coupling screw part (11c). A rotary stem (15) has concentrically a first coupling screw part (22) of thread pitch P1 inside, and a second coupling screw part (23) of thread pitch P2 larger than the thread pitch P1 outside is coaxially disposed above the slide stem (14), the first coupling screw part (22) being driven into the coupling screw part (14i c) of the slide stem (14), and the second coupling screw part (23) into the coupling screw part (11c) of the bonnet (11), so that the slide stem (14) is moved vertically by a small distance at each revolution of the rotary stem (15).